AFM scan of a 320 nm pitch line sample using a z-stage as mentioned in this work at two different speeds (20 and 30 lines/s, respectively, corresponding to 0.1 and 0.15 mm/s). Resolution: 512 × 512 pixels, 5 × 5 μm. Measurements were obtained using a NanoWorld Arrow UHF cantilever at 1.19 MHz. (a) Topography at 20 lines/s (color scale in nm). (b) Topography at 30 lines/s (color scale in nm). (c) Error signal at 20 line/s (color scale in V). (d) Error signal at 20 lines/s (color scale in V). (e) Cross section of the measured topography.