FIG. 4.
Schematic layout of the mechanical z-stage. Stacked multiple flexures in parallel were used to (1) achieve high stiffness and (2) increase the torsional stiffness.

Schematic layout of the mechanical z-stage. Stacked multiple flexures in parallel were used to (1) achieve high stiffness and (2) increase the torsional stiffness.

Close Modal

or Create an Account

Close Modal
Close Modal