FIG. 13.
Scanning image of the 3-μm-pitch, 110-nm-high line sample (2048 × 2048 pixels, 2.5 Hz line-rate, Arrow UHF cantilever at 1144 kHz). (a) Scan from top to bottom. (b) Scan from bottom to top immediately after (a). Units of vertical axes are nm.

Scanning image of the 3-μm-pitch, 110-nm-high line sample (2048 × 2048 pixels, 2.5 Hz line-rate, Arrow UHF cantilever at 1144 kHz). (a) Scan from top to bottom. (b) Scan from bottom to top immediately after (a). Units of vertical axes are nm.

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