FIG. 8.
(a) CAD of the wafer stage design showing the guidance and rotation constraint, capacitive sensors, and the piezo actuation. (b) Modal analysis result of the wafer stage showing the mode shape of the lowest eigen frequency of 338 Hz.
(a) CAD of the wafer stage design showing the guidance and rotation constraint, capacitive sensors, and the piezo actuation. (b) Modal analysis result of the wafer stage showing the mode shape of the lowest eigen frequency of 338 Hz.
