The introduction and subsequent removal of highly elastic solutions from surfaces has recently allowed industry to effectively remove colloidal, particulate contaminants from high-grade silicon. The substrate is first coated with the polymeric cleaning solution, and then the solution is removed either by simply rinsing the surface using an impinging water jet or by siphoning the cleaning fluid from the surface. The advantage of this continuous process over conventional techniques is the noninvasive removal while generating limited nonhazardous aqueous waste. Our group investigated the use of polymeric liquids that effectively eliminate particles without damaging the delicate surfaces. To investigate this removal, we studied two different flow types (siphoning and rinsing) of various rheological fluids to understand the governing physics that allow for removal. In this publication, we show that the presence of local shear flows of a viscoelastic fluid having a large elongational viscosity can create polymer stresses that are much larger than the associated Newtonian shear stresses. The onset of this added polymer stress in the flow field correlates well to the increase in particle removal.
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January 2014
Research Article|
January 01 2014
Enhanced particle removal using viscoelastic fluids
Travis W. Walker;
Travis W. Walker
a)
Department of Chemical Engineering, Stanford University
, Stanford, California 94305
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Tienyi T. Hsu;
Tienyi T. Hsu
a)
Department of Chemical Engineering, Stanford University
, Stanford, California 94305
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Sean Fitzgibbon;
Sean Fitzgibbon
Department of Chemical Engineering, Stanford University
, Stanford, California 94305
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Curtis W. Frank;
Curtis W. Frank
Department of Chemical Engineering, Stanford University
, Stanford, California 94305
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David S. L. Mui;
David S. L. Mui
LAM Research Corp.
, Fremont, California 94358
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Ji Zhu;
Ji Zhu
LAM Research Corp.
, Fremont, California 94358
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Arjun Mendiratta;
Arjun Mendiratta
LAM Research Corp.
, Fremont, California 94358
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Gerald G. Fuller
Gerald G. Fuller
b)
Department of Chemical Engineering
, Stanford University, Stanford, California 94305
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a)
These authors contributed equally to this article.
b)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Rheol. 58, 63–88 (2014)
Article history
Received:
July 11 2013
Accepted:
November 04 2013
Citation
Travis W. Walker, Tienyi T. Hsu, Sean Fitzgibbon, Curtis W. Frank, David S. L. Mui, Ji Zhu, Arjun Mendiratta, Gerald G. Fuller; Enhanced particle removal using viscoelastic fluids. J. Rheol. 1 January 2014; 58 (1): 63–88. https://doi.org/10.1122/1.4832637
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