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Journal Articles

Nonlinear scaling of photon radiation power in relativistic plasma current filamentation instability with beam parameters

Zhang-Hu Hu, Wen-Yuan Zhai, Jie-Jie Lan, You-Nian Wang

Phys. Plasmas 31, 083103 (2024)

https://doi.org/10.1063/5.0210348

Published: August 2024

View article titled, Nonlinear scaling of photon radiation power in relativistic plasma current filamentation instability with beam parameters

Journal Articles

Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Ze-Xuan Liu, Xing-Yu Li, Quan-Zhi Zhang, Julian Schulze, Ruo-Bing Zhang, You-Nian Wang

J. Vac. Sci. Technol. A 42, 053006 (2024)

https://doi.org/10.1116/6.0003745

Published: July 2024

View article titled, Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Journal Articles

Jump and hysteresis of plasma density in the spatial afterglow of inductively coupled plasmas

Yu Zhang, Wei Yang, Fei Gao, You-Nian Wang

Phys. Plasmas 31, 073506 (2024)

https://doi.org/10.1063/5.0213329

Published: July 2024

View article titled, Jump and hysteresis of plasma density in the spatial afterglow of inductively coupled plasmas

Journal Articles

Influence of surface work function and neutral gas temperature on mechanism of H⁻ production in negative hydrogen ion sources

Zhou-Qi He, Wei Yang, Fei Gao, Cheng-Ran Du, You-Nian Wang

Phys. Plasmas 31, 043501 (2024)

https://doi.org/10.1063/5.0196340

Published: April 2024

View article titled, Influence of surface work function and neutral gas temperature on mechanism of H− production in negative hydrogen ion sources

Journal Articles

Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources

Yang Zhou, Kai Zhao, Fang-Fang Ma, Yong-Xin Liu, Fei Gao, Julian Schulze, You-Nian Wang

Appl. Phys. Lett. 124, 064102 (2024)

https://doi.org/10.1063/5.0190803

Published: February 2024

View article titled, Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources

Journal Articles

Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges

Jing-Yu Sun, Julian Schulze, Fang-Fang Ma, Quan-Zhi Zhang, You-Nian Wang

Phys. Plasmas 30, 120702 (2023)

https://doi.org/10.1063/5.0175060

Published: December 2023

View article titled, Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges

Journal Articles

Enhancing plasma uniformity by employing non-uniform magnetic field modulation in capacitively coupled plasmas

Fang-Fang Ma, Quan-Zhi Zhang, Yu-Meng Cui, You-Nian Wang

Appl. Phys. Lett. 123, 202103 (2023)

https://doi.org/10.1063/5.0169640

Published: November 2023

View article titled, Enhancing plasma uniformity by employing non-uniform magnetic field modulation in capacitively coupled plasmas

Journal Articles

Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation

Jia-Wei Huang, Fang-Jie Zhou, Xiang-Yun Lv, Yu-Ru Zhang, Fei Gao, You-Nian Wang

Phys. Plasmas 30, 093502 (2023)

https://doi.org/10.1063/5.0159577

Published: September 2023

View article titled, Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation

Journal Articles

Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors

Fang-Fang Ma, Quan-Zhi Zhang, Dao-Man Han, Zi-Lan Xiong, Ming Gao, You-Nian Wang

J. Vac. Sci. Technol. A 41, 053002 (2023)

https://doi.org/10.1116/6.0002585

Published: July 2023

View article titled, Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors

Journal Articles

Fast simulation of the E–H mode transition in Ar/O₂ inductively coupled plasmas

Ming-Liang Zhao, Lei Tong, Yu-Ru Zhang, Fei Gao, You-Nian Wang

J. Appl. Phys. 134, 033303 (2023)

https://doi.org/10.1063/5.0155954

Published: July 2023

View article titled, Fast simulation of the E–H mode transition in Ar/O2 inductively coupled plasmas

Journal Articles

Optimization of e⁺/e⁻ pair yield during the interaction of a Doppler-boosted laser with a solid-density plasma

De-Xuan Hui, Zhang-Hu Hu, Xian-Xiu Mei, You-Nian Wang

AIP Advances 13, 075214 (2023)

https://doi.org/10.1063/5.0155941

Published: July 2023

View article titled, Optimization of e+/e− pair yield during the interaction of a Doppler-boosted laser with a solid-density plasma

Includes: Supplementary data

Journal Articles

Modulation of the plasma radial uniformity in pulsed dual-antenna inductively coupled plasmas

Chang Lu, Jia-Wei Huang, Yu-Ru Zhang, Fei Gao, You-Nian Wang

Phys. Plasmas 30, 063506 (2023)

https://doi.org/10.1063/5.0145117

Published: June 2023

View article titled, Modulation of the plasma radial uniformity in pulsed dual-antenna inductively coupled plasmas

Journal Articles

Effects of external magnetic and electric field on multipactor and plasma breakdown of high-power microwave window

Chun-Yan Zuo, Fei Gao, Zhong-Ling Dai, You-Nian Wang

Phys. Plasmas 30, 062101 (2023)

https://doi.org/10.1063/5.0146150

Published: June 2023

View article titled, Effects of external magnetic and electric field on multipactor and plasma breakdown of high-power microwave window

Journal Articles

Investigation of stochastic heating and its influence on plasma radial uniformity in biased inductively coupled Ar discharges by hybrid simulation

Jia-Wei Huang, Ming-Liang Zhao, Yu-Ru Zhang, Fei Gao, You-Nian Wang

Phys. Plasmas 30, 043508 (2023)

https://doi.org/10.1063/5.0142345

Published: April 2023

View article titled, Investigation of stochastic heating and its influence on plasma radial uniformity in biased inductively coupled Ar discharges by hybrid simulation

Journal Articles

Optimization of overshoot in the pulsed radio frequency inductively coupled argon plasma by step waveform modulation

Xiang-Yun Lv, Quan-Zhi Zhang, Ke Jiang, Fei Gao, You-Nian Wang

J. Appl. Phys. 133, 043301 (2023)

https://doi.org/10.1063/5.0130054

Published: January 2023

View article titled, Optimization of overshoot in the pulsed radio frequency inductively coupled argon plasma by step waveform modulation

Journal Articles

Measurement of neutral gas temperature in inductively coupled Ar and Ar/O₂ plasmas

Peng-Cheng Du, Fang-Jie Zhou, Kai Zhao, Yong-Xin Liu, Fei Gao, You-Nian Wang

J. Appl. Phys. 132, 043302 (2022)

https://doi.org/10.1063/5.0079966

Published: July 2022

View article titled, Measurement of neutral gas temperature in inductively coupled Ar and Ar/O2 plasmas

Journal Articles

Effects of chamber size on electron bounce-resonance heating and power deposition profile in a finite inductive discharge

Wei Yang, Fei Gao, You-Nian Wang

Phys. Plasmas 29, 063503 (2022)

https://doi.org/10.1063/5.0090806

Published: June 2022

View article titled, Effects of chamber size on electron bounce-resonance heating and power deposition profile in a finite inductive discharge

Journal Articles

Effects of the excited states on electron kinetics and power absorption and dissipation in inductively coupled Ar plasmas

Wei Yang, Fei Gao, You-Nian Wang

AIP Advances 12, 055222 (2022)

https://doi.org/10.1063/5.0092556

Published: May 2022

View article titled, Effects of the excited states on electron kinetics and power absorption and dissipation in inductively coupled Ar plasmas

Journal Articles

Experimental study on the ignition process of a pulsed capacitively coupled RF discharge: Effects of gas pressure and voltage amplitude

Xiang-Yu Wang, Xiao-Kun Wang, Kai Zhao, Yong-Xin Liu, You-Nian Wang

Phys. Plasmas 29, 053501 (2022)

https://doi.org/10.1063/5.0087182

Published: May 2022

View article titled, Experimental study on the ignition process of a pulsed capacitively coupled RF discharge: Effects of gas pressure and voltage amplitude

Journal Articles

Simulation study of coupled two-stream and current filamentation instability excited by accelerator electron beams in plasmas

Han-Lin Li, Zhang-Hu Hu, Quan-Tang Zhao, Rui Cheng, Yong-Tao Zhao, Zi-Min Zhang, Xue-Chun Li, You-Nian Wang

Phys. Plasmas 29, 052101 (2022)

https://doi.org/10.1063/5.0086500

Published: May 2022

View article titled, Simulation study of coupled two-stream and current filamentation instability excited by accelerator electron beams in plasmas

NARROW

Topics

Nonlinear scaling of photon radiation power in relativistic plasma current filamentation instability with beam parameters

Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Jump and hysteresis of plasma density in the spatial afterglow of inductively coupled plasmas

Influence of surface work function and neutral gas temperature on mechanism of H⁻ production in negative hydrogen ion sources

Low-frequency dependence of plasma characteristics in dual-frequency capacitively coupled plasma sources

Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges

Enhancing plasma uniformity by employing non-uniform magnetic field modulation in capacitively coupled plasmas

Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation

Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors

Fast simulation of the E–H mode transition in Ar/O₂ inductively coupled plasmas

Optimization of e⁺/e⁻ pair yield during the interaction of a Doppler-boosted laser with a solid-density plasma

Modulation of the plasma radial uniformity in pulsed dual-antenna inductively coupled plasmas

Effects of external magnetic and electric field on multipactor and plasma breakdown of high-power microwave window

Investigation of stochastic heating and its influence on plasma radial uniformity in biased inductively coupled Ar discharges by hybrid simulation

Optimization of overshoot in the pulsed radio frequency inductively coupled argon plasma by step waveform modulation

Measurement of neutral gas temperature in inductively coupled Ar and Ar/O₂ plasmas

Effects of chamber size on electron bounce-resonance heating and power deposition profile in a finite inductive discharge

Effects of the excited states on electron kinetics and power absorption and dissipation in inductively coupled Ar plasmas

Experimental study on the ignition process of a pulsed capacitively coupled RF discharge: Effects of gas pressure and voltage amplitude

Simulation study of coupled two-stream and current filamentation instability excited by accelerator electron beams in plasmas

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