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Journal Articles

Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy

Yoshiharu Goshima, Shinsuke Kashiwagi, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 054001 (2023)
https://doi.org/10.1116/6.0002895
Published: September 2023
View article titled, Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy
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