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Yong Jai Cho
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Journal Articles

Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

Min Young Yoon, H. J. Yeom, Jung Hyung Kim, Won Chegal, Yong Jai Cho, Deuk-Chul Kwon, Jong-Ryul Jeong, Hyo-Chang Lee
Journal: Physics of Plasmas
Phys. Plasmas 28, 063504 (2021)
https://doi.org/10.1063/5.0047811
Published: June 2021
View article titled, Discharge physics and atomic layer etching in Ar/C<sub>4</sub>F<sub>6</sub> inductively coupled plasmas with a radio frequency bias
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Includes: Supplementary data
Journal Articles

Label-free detection of hepatitis B virus using solution immersed silicon sensors

Mangesh S. Diware, Hyun Mo Cho, Won Chegal, Yong Jai Cho, Sang Won O, Se-Hwan Paek, Dong Soo Kim, Kyeong-Suk Kim, Yoon Gi Min, Jae Heung Jo, ChaeHo Shin
Journal: Biointerphases
Biointerphases 12, 01A402 (2017)
https://doi.org/10.1116/1.4977075
Published: February 2017
View article titled, Label-free detection of hepatitis B virus using solution immersed silicon sensors
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Journal Articles

Development of a Focused‐Beam Ellipsometer Based on a New Principle

Sang‐Heon Ye, Yoon Keun Kwak, Soo Hyun Kim, Hyun Mo Cho, Yong Jai Cho, Won Chegal
Journal: AIP Conference Proceedings
AIP Conf. Proc. 931, 69–73 (2007)
https://doi.org/10.1063/1.2799439
Published: September 2007
View article titled, Development of a Focused‐Beam Ellipsometer Based on a New Principle
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Journal Articles

Change in electrical resistance and thermal stability of nitrogen incorporated Ge 2 Sb 2 Te 5 films

YoungKuk Kim, Uk Hwang, Yong Jai Cho, H. M. Park, M.-H. Cho, Pyeong-Seok Cho, Jong-Heun Lee
Journal: Applied Physics Letters
Appl. Phys. Lett. 90, 021908 (2007)
https://doi.org/10.1063/1.2431462
Published: January 2007
View article titled, Change in electrical resistance and thermal stability of nitrogen incorporated Ge 2 Sb 2 Te 5 films
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Journal Articles

Optical Properties of Jet‐Vapor‐Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Ellipsometry

N. V. Nguyen, Jin‐Ping Han, Jin Yong Kim, Eva Wilcox, Yong Jai Cho, Wenjuan Zhu, Zhijiong Luo, T. P. Ma
Journal: AIP Conference Proceedings
AIP Conf. Proc. 683, 181–185 (2003)
https://doi.org/10.1063/1.1622468
Published: September 2003
View article titled, Optical Properties of Jet‐Vapor‐Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Ellipsometry
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Journal Articles

Optical properties of silicon oxynitride thin films determined by vacuum ultraviolet spectroscopic ellipsometry

Hyun Jong Kim, Yong Jai Cho, Hyun Mo Cho, Sang Youl Kim, Changsun Moon, Gyungsu Cho, Youngmin Kwon
Journal: AIP Conference Proceedings
AIP Conf. Proc. 683, 171–175 (2003)
https://doi.org/10.1063/1.1622466
Published: September 2003
View article titled, Optical properties of silicon oxynitride thin films determined by vacuum ultraviolet spectroscopic ellipsometry
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Journal Articles

One‐dimensional Spectroscopic Measurement of Patterned Structures Using a Custom‐built Spectral Imaging Ellipsometer

Won Chegal, Daesuk Kim, Soohyun Kim, Yong Jai Cho, Hyun Mo Cho, Yun Woo Lee
Journal: AIP Conference Proceedings
AIP Conf. Proc. 683, 753–757 (2003)
https://doi.org/10.1063/1.1622555
Published: September 2003
View article titled, One‐dimensional Spectroscopic Measurement of Patterned Structures Using a Custom‐built Spectral Imaging Ellipsometer
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Journal Articles

Spectroscopic ellipsometry characterization of high-k dielectric HfO 2 thin films and the high-temperature annealing effects on their optical properties

Yong Jai Cho, N. V. Nguyen, C. A. Richter, J. R. Ehrstein, Byoung Hun Lee, Jack C. Lee
Journal: Applied Physics Letters
Appl. Phys. Lett. 80, 1249–1251 (2002)
https://doi.org/10.1063/1.1448384
Published: February 2002
View article titled, Spectroscopic ellipsometry characterization of high-<em>k</em> dielectric HfO 2 thin films and the high-temperature annealing effects on their optical properties
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Journal Articles

Comparison of the effective oxide thickness determined by ellipsometry with the result by medium energy ion scattering spectroscopy and high-resolution transmission electron microscopy

Hyun Mo Cho, Yun Woo Lee, In Won Lee, Dae Won Moon, Hwack Joo Lee, Byoung Yoon Kim, Hyun Jong Kim, Sang Youl Kim, Yong Jai Cho
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 19, 1144–1149 (2001)
https://doi.org/10.1116/1.1379799
Published: July 2001
View article titled, Comparison of the effective oxide thickness determined by ellipsometry with the result by medium energy ion scattering spectroscopy and high-resolution transmission electron microscopy
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Journal Articles

Effects of high-temperature annealing on the dielectric function of Ta 2 O 5 films observed by spectroscopic ellipsometry

N. V. Nguyen, C. A. Richter, Yong Jai Cho, G. B. Alers, L. A. Stirling
Journal: Applied Physics Letters
Appl. Phys. Lett. 77, 3012–3014 (2000)
https://doi.org/10.1063/1.1324730
Published: November 2000
View article titled, Effects of high-temperature annealing on the dielectric function of Ta 2 O 5 films observed by spectroscopic ellipsometry
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Journal Articles

Ellipsometric examination of optical property of the Si–SiO 2 interface using the s-wave antireflection

Yong Jai Cho, Yun Woo Lee, Hyun Mo Cho, In Won Lee, Sang Youl Kim
Journal: Journal of Applied Physics
J. Appl. Phys. 85, 1114–1119 (1999)
https://doi.org/10.1063/1.369253
Published: January 1999
View article titled, Ellipsometric examination of optical property of the Si–SiO 2 interface using the <em>s</em>-wave antireflection
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Journal Articles

Thickness evaluation of ultrathin gate oxides at the limit

Dae Won Moon, Hyun Kyong Kim, Hwack Joo Lee, Yong Jai Cho, Hyun Mo Cho
Journal: AIP Conference Proceedings
AIP Conf. Proc. 449, 197–200 (1998)
https://doi.org/10.1063/1.56794
Published: November 1998
View article titled, Thickness evaluation of ultrathin gate oxides at the limit
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