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Journal Articles

Investigation on the surface diffusion process of gas molecules in porous graphene membranes

Jun Zhang, Chenhui Liu, Rui Huang, Xudi Wang, Qing Cao
Journal: Physics of Fluids
Physics of Fluids 36, 092022 (2024)
https://doi.org/10.1063/5.0227446
Published: September 2024
View article titled, Investigation on the surface diffusion process of gas molecules in porous graphene membranes
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Journal Articles

Numerical analysis of high vacuum packaging efficiency for narrow structured devices

Zhengwei Mei, Siwei Wang, Wenyu Lin, Xudi Wang, Yuqing Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044202 (2024)
https://doi.org/10.1116/6.0003641
Published: June 2024
View article titled, Numerical analysis of high vacuum packaging efficiency for narrow structured devices
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Journal Articles

Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities

Jun Zhang, Chenhui Liu, Chenchen Song, Xudi Wang, Rui Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063403 (2023)
https://doi.org/10.1116/6.0002937
Published: December 2023
View article titled, Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities
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Includes: Supplementary data
Journal Articles

Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect

Zhengwei Mei, Hailin Bi, Qing Cao, Yuqing Wang, Wenyu Lin, Junfeng Ye, Xudi Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 054202 (2023)
https://doi.org/10.1116/6.0002906
Published: September 2023
View article titled, Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect
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Journal Articles

Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method

Wentian Zhou, Hailin Bi, Zhenhua Yu, Xudi Wang, Yongjun Cheng, Zhenhua Xi, Wei Wei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 050603 (2019)
https://doi.org/10.1116/1.5119842
Published: August 2019
View article titled, Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method
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Journal Articles

Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method

Benmeng Wei, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 040601 (2017)
https://doi.org/10.1116/1.4985621
Published: June 2017
View article titled, Fabrication of conductance-controllable standard leak elements on anodic aluminum oxide using a selective coating method
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Journal Articles

New leak assembly based on fluidic nanochannels

Aiqing Zhu, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu, Dong Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 050604 (2016)
https://doi.org/10.1116/1.4960646
Published: August 2016
View article titled, New leak assembly based on fluidic nanochannels
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Journal Articles

Reactive ion beam etching of Hf O 2 film and removal of sidewall redeposition

Xudi Wang, Ying Liu, Xiangdong Xu, Shaojun Fu, Zheng Cui
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1067–1072 (2006)
https://doi.org/10.1116/1.2209657
Published: June 2006
View article titled, Reactive ion beam etching of Hf O 2 film and removal of sidewall redeposition
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