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Journal Articles

Demystifying metal-assisted chemical etching of GaN and related heterojunctions

Featured
Clarence Y. Chan, Jan Paul Menzel, Yicong Dong, Zhuoran Long, Aadil Waseem, Xihang Wu, Yixin Xiao, Jinqiao Xie, Edmond K. C. Chow, Shaloo Rakheja, Victor S. Batista, Zetian Mi, Xiuling Li
Journal: Applied Physics Reviews
Appl. Phys. Rev. 11, 021416 (2024)
https://doi.org/10.1063/5.0186709
Published: April 2024
View article titled, Demystifying metal-assisted chemical etching of GaN and related heterojunctions
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Includes: Supplementary data
Journal Articles

Strain-induced self-rolled-up microtubes for multifunctional on-chip microfluidic applications

Apratim Khandelwal, Xiuling Li
Journal: Biomicrofluidics
Biomicrofluidics 17, 051501 (2023)
https://doi.org/10.1063/5.0170958
Published: September 2023
View article titled, Strain-induced self-rolled-up microtubes for multifunctional on-chip microfluidic applications
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Journal Articles

Temperature dependent characteristics of β -Ga2O3 FinFETs by MacEtch

Zhongjie Ren, Hsien-Chih Huang, Hanwool Lee, Clarence Chan, Henry C. Roberts, Xihang Wu, Aadil Waseem, A F M Anhar Uddin Bhuiyan, Hongping Zhao, Wenjuan Zhu, Xiuling Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 123, 043505 (2023)
https://doi.org/10.1063/5.0159420
Published: July 2023
View article titled, Temperature dependent characteristics of <em>β</em> -Ga<sub>2</sub>O<sub>3</sub> FinFETs by MacEtch
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Journal Articles

Publisher's Note: “Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing” [Appl. Phys. Rev. 10 , 011409 (2023)]

Lukas L. Janavicius, Julian A. Michaels, Clarence Chan, Dane J. Sievers, Xiuling Li
Journal: Applied Physics Reviews
Appl. Phys. Rev. 10, 029901 (2023)
https://doi.org/10.1063/5.0151279
Published: April 2023
View article titled, Publisher's Note: “Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing” [Appl. Phys. Rev. 10 , 011409 (2023)]
Open the PDF for Publisher's Note: “Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing” [Appl. Phys. Rev. 10 , 011409 (2023)] in another window
Journal Articles

Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing

Featured
Lukas L. Janavicius, Julian A. Michaels, Clarence Chan, Dane J. Sievers, Xiuling Li
Journal: Applied Physics Reviews
Appl. Phys. Rev. 10, 011409 (2023)
https://doi.org/10.1063/5.0132116
Published: February 2023
View article titled, Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing
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Includes: Supplementary data
Book Chapter

Etching of β-Ga2O3

Series: AIPP Books, Principles
Published: February 2023
10.1063/9780735425033_009
EISBN: 978-0-7354-2503-3
ISBN: 978-0-7354-2500-2
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Journal Articles

β -Ga2O3 FinFETs with ultra-low hysteresis by plasma-free metal-assisted chemical etching

Editor’s Pick
Hsien-Chih Huang, Zhongjie Ren, A F M Anhar Uddin Bhuiyan, Zixuan Feng, Zhendong Yang, Xixi Luo, Alex Q. Huang, Andrew Green, Kelson Chabak, Hongping Zhao, Xiuling Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 121, 052102 (2022)
https://doi.org/10.1063/5.0096490
Published: August 2022
View article titled, β -Ga<sub>2</sub>O<sub>3</sub> FinFETs with ultra-low hysteresis by plasma-free metal-assisted chemical etching
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Includes: Supplementary data
Journal Articles

Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching

Clarence Y. Chan, Shunya Namiki, Jennifer K. Hite, Michael A. Mastro, Syed B. Qadri, Xiuling Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053212 (2021)
https://doi.org/10.1116/6.0001231
Published: August 2021
View article titled, Homoepitaxial GaN micropillar array by plasma-free photo-enhanced metal-assisted chemical etching
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Includes: Supplementary data
Journal Articles

Au-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructures

Xiaowei Wang, Hsien-Chih Huang, Bruce Green, Xiang Gao, Daniel Rosenmann, Xiuling Li, Junxia Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062206 (2020)
https://doi.org/10.1116/6.0000287
Published: October 2020
View article titled, Au-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructures
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Journal Articles

Nanoscale groove textured β-Ga2O3 by room temperature inverse metal-assisted chemical etching and photodiodes with enhanced responsivity

Munho Kim, Hsien-Chih Huang, Jeong Dong Kim, Kelson D. Chabak, Akhil Raj Kumar Kalapala, Weidong Zhou, Xiuling Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 113, 222104 (2018)
https://doi.org/10.1063/1.5053219
Published: November 2018
View article titled, Nanoscale groove textured β-Ga<sub>2</sub>O<sub>3</sub> by room temperature inverse metal-assisted chemical etching and photodiodes with enhanced responsivity
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Includes: Supplementary data
Journal Articles

Low index contrast heterostructure photonic crystal cavities with high quality factors and vertical radiation coupling

Editor’s Pick
Xiaochen Ge, Momchil Minkov, Shanhui Fan, Xiuling Li, Weidong Zhou
Journal: Applied Physics Letters
Appl. Phys. Lett. 112, 141105 (2018)
https://doi.org/10.1063/1.5026433
Published: April 2018
View article titled, Low index contrast heterostructure photonic crystal cavities with high quality factors and vertical radiation coupling
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Journal Articles

Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides

Xin Yu, Lynford L. Goddard, Jinlong Zhu, Xiuling Li, Xiaogang Chen
Journal: Applied Physics Letters
Appl. Phys. Lett. 112, 021108 (2018)
https://doi.org/10.1063/1.5017707
Published: January 2018
View article titled, Passive wavelength tuning and multichannel photonic coupling using monolithically integrated vertical microresonators on ridge waveguides
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Journal Articles

Enhancement-mode Ga2O3 wrap-gate fin field-effect transistors on native (100) β-Ga2O3 substrate with high breakdown voltage

Kelson D. Chabak, Neil Moser, Andrew J. Green, Dennis E. Walker, Jr., Stephen E. Tetlak, Eric Heller, Antonio Crespo, Robert Fitch, Jonathan P. McCandless, Kevin Leedy, Michele Baldini, Gunter Wagner, Zbigniew Galazka, Xiuling Li, Gregg Jessen
Journal: Applied Physics Letters
Appl. Phys. Lett. 109, 213501 (2016)
https://doi.org/10.1063/1.4967931
Published: November 2016
View article titled, Enhancement-mode Ga<sub>2</sub>O<sub>3</sub> wrap-gate fin field-effect transistors on native (100) <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> substrate with high breakdown voltage
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Journal Articles

Enhanced axial confinement in a monolithically integrated self-rolled-up SiNx vertical microring photonic coupler

Xin Yu, Lynford L. Goddard, Xiuling Li, Xiaogang Chen
Journal: Applied Physics Letters
Appl. Phys. Lett. 109, 111104 (2016)
https://doi.org/10.1063/1.4962901
Published: September 2016
View article titled, Enhanced axial confinement in a monolithically integrated self-rolled-up SiN<sub>x</sub> vertical microring photonic coupler
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Journal Articles

High performance p-type NiOx thin-film transistor by Sn doping

Tengda Lin, Xiuling Li, Jin Jang
Journal: Applied Physics Letters
Appl. Phys. Lett. 108, 233503 (2016)
https://doi.org/10.1063/1.4953222
Published: June 2016
View article titled, High performance p-type NiO<sub>x</sub> thin-film transistor by Sn doping
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Journal Articles

Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Xin Yu, Ehsan Arbabi, Lynford L. Goddard, Xiuling Li, Xiaogang Chen
Journal: Applied Physics Letters
Appl. Phys. Lett. 107, 031102 (2015)
https://doi.org/10.1063/1.4927243
Published: July 2015
View article titled, Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration
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Journal Articles

Evolution of GaAs nanowire geometry in selective area epitaxy

Kevin P. Bassett, Parsian K. Mohseni, Xiuling Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 106, 133102 (2015)
https://doi.org/10.1063/1.4916347
Published: March 2015
View article titled, Evolution of GaAs nanowire geometry in selective area epitaxy
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Includes: Supplementary data
Journal Articles

Scaling junctionless multigate field-effect transistors by step-doping

Yi Song, Xiuling Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 105, 223506 (2014)
https://doi.org/10.1063/1.4902864
Published: December 2014
View article titled, Scaling junctionless multigate field-effect transistors by step-doping
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Journal Articles

Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip-based nanofabrication

Huan Hu, Parsian K. Mohseni, Lei Pan, Xiuling Li, Suhas Somnath, Jonathan R. Felts, Mark A. Shannon, William P. King
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06FJ01 (2013)
https://doi.org/10.1116/1.4831767
Published: November 2013
View article titled, Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip-based nanofabrication
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Journal Articles

Photonic crystal membrane reflectors by magnetic field-guided metal-assisted chemical etching

Karthik Balasundaram, Parsian K. Mohseni, Yi-Chen Shuai, Deyin Zhao, Weidong Zhou, Xiuling Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 103, 214103 (2013)
https://doi.org/10.1063/1.4831657
Published: November 2013
View article titled, Photonic crystal membrane reflectors by magnetic field-guided metal-assisted chemical etching
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