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Journal Articles

Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition

Benfu Wang, Xiubo Tian, Jian Hu, Chunzhi Gong, Xiangli Liu, Jin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033003 (2023)
https://doi.org/10.1116/6.0002352
Published: March 2023
View article titled, Enhancement of discharge and mechanical properties of ta-C films by pulse-enhanced cathodic arc deposition
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Journal Articles

Characteristics of continuous high power magnetron sputtering (C-HPMS) in reactive O2/Ar atmospheres

Suihan Cui, Liangliang Liu, Zheng Jin, Lin Zhou, Qingdong Ruan, Zhongcan Wu, Ricky K. Y. Fu, Xiubo Tian, Paul K. Chu, Zhongzhen Wu
Journal: Journal of Applied Physics
J. Appl. Phys. 129, 243301 (2021)
https://doi.org/10.1063/5.0051296
Published: June 2021
View article titled, Characteristics of continuous high power magnetron sputtering (C-HPMS) in reactive O<sub>2</sub>/Ar atmospheres
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Journal Articles

Nano-second temporal particle behavior in high-power impulse magnetron sputtering discharge in a cylindrical cathode

Editor’s Pick
Suihan Cui, Zhongzhen Wu, Shu Xiao, Bocong Zheng, Lei Chen, Tijun Li, Ricky K. Y. Fu, Paul K. Chu, Xiubo Tian, Wenchang Tan, Daining Fang, Feng Pan
Journal: Journal of Applied Physics
J. Appl. Phys. 127, 023301 (2020)
https://doi.org/10.1063/1.5127565
Published: January 2020
View article titled, Nano-second temporal particle behavior in high-power impulse magnetron sputtering discharge in a cylindrical cathode
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Journal Articles

Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode

Suihan Cui, Zhongzhen Wu, Hai Lin, Shu Xiao, Bocong Zheng, Liangliang Liu, Xiaokai An, Ricky K. Y. Fu, Xiubo Tian, Wenchang Tan, Paul K. Chu
Journal: Journal of Applied Physics
J. Appl. Phys. 125, 063302 (2019)
https://doi.org/10.1063/1.5048554
Published: February 2019
View article titled, Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode
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Journal Articles

Microstructure and mechanical properties of (AlTi)xN1-x films by magnetic-field-enhanced high power impulse magnetron sputtering

Xiubo Tian, Yinghe Ma, Jian Hu, Mingkang Bi, Chunzhi Gong, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021402 (2017)
https://doi.org/10.1116/1.4971202
Published: December 2016
View article titled, Microstructure and mechanical properties of (AlTi)<sub>x</sub>N<sub>1-x</sub> films by magnetic-field-enhanced high power impulse magnetron sputtering
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Journal Articles

Novel high power impulse magnetron sputtering enhanced by an auxiliary electrical field

Chunwei Li, Xiubo Tian
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 87, 083507 (2016)
https://doi.org/10.1063/1.4960671
Published: August 2016
View article titled, Novel high power impulse magnetron sputtering enhanced by an auxiliary electrical field
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Journal Articles

Discharge current modes of high power impulse magnetron sputtering

Zhongzhen Wu, Shu Xiao, Zhengyong Ma, Suihan Cui, Shunping Ji, Xiubo Tian, Ricky K. Y. Fu, Paul K. Chu, Feng Pan
Journal: AIP Advances
AIP Advances 5, 097178 (2015)
https://doi.org/10.1063/1.4932135
Published: September 2015
View article titled, Discharge current modes of high power impulse magnetron sputtering
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Journal Articles

High voltage pulser with a fast fall-time for plasma immersion ion implantation

Zongtao Zhu, Chunzhi Gong, Xiubo Tian, Shiqin Yang, Ricky K. Y. Fu, Paul K. Chu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 82, 045102 (2011)
https://doi.org/10.1063/1.3575320
Published: April 2011
View article titled, High voltage pulser with a fast fall-time for plasma immersion ion implantation
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Journal Articles

Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge

Zhongzhen Wu, Xiubo Tian, Jingwei Shi, Zeming Wang, Chunzhi Gong, Shiqin Yang, Paul K. Chu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 82, 033511 (2011)
https://doi.org/10.1063/1.3565175
Published: March 2011
View article titled, Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge
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Journal Articles

Hybrid radio-frequency/direct-current plasma-enhanced chemical vapor deposition system for deposition on inner surfaces of polyethylene terephthalate bottles

Jing Li, Xiubo Tian, Chunzhi Gong, Shiqin Yang, Ricky K. Y. Fu, Paul K. Chu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 80, 123504 (2009)
https://doi.org/10.1063/1.3273944
Published: December 2009
View article titled, Hybrid radio-frequency/direct-current plasma-enhanced chemical vapor deposition system for deposition on inner surfaces of polyethylene terephthalate bottles
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Journal Articles

Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source

Xiubo Tian, Chunzhi Gong, Yongxian Huang, Haifu Jiang, Shiqin Yang, Ricky K. Y. Fu, Paul K. Chu
Journal: Applied Physics Letters
Appl. Phys. Lett. 93, 191501 (2008)
https://doi.org/10.1063/1.2988192
Published: November 2008
View article titled, Ion trajectories in plasma ion implantation of slender cylindrical bores using a small inner end source
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Journal Articles

Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation

Chunzhi Gong, Xiubo Tian, Shiqin Yang, Ricky K. Y. Fu, Paul K. Chu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 79, 043501 (2008)
https://doi.org/10.1063/1.2906220
Published: April 2008
View article titled, Direct coupling of pulsed radio frequency and pulsed high power in novel pulsed power system for plasma immersion ion implantation
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Journal Articles

Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and deposition

Jing Li, Xiubo Tian, Shiqin Yang, Paul K. Chu, Ricky K. Y. Fu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 438–443 (2008)
https://doi.org/10.1116/1.2891253
Published: April 2008
View article titled, Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and deposition
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Journal Articles

A ground-based radio frequency inductively coupled plasma apparatus for atomic oxygen simulation in low Earth orbit

Yongxian Huang, Xiubo Tian, Shiqin Yang, Paul K. Chu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 78, 103301 (2007)
https://doi.org/10.1063/1.2800766
Published: October 2007
View article titled, A ground-based radio frequency inductively coupled plasma apparatus for atomic oxygen simulation in low Earth orbit
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Journal Articles

Corrosion resistance of titanium ion implanted AZ91 magnesium alloy

Chenglong Liu, Yunchang Xin, Xiubo Tian, J. Zhao, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 334–339 (2007)
https://doi.org/10.1116/1.2699371
Published: February 2007
View article titled, Corrosion resistance of titanium ion implanted AZ91 magnesium alloy
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Journal Articles

Influence of thickness and dielectric properties on implantation efficacy in plasma immersion ion implantation of insulators

Ricky K. Y. Fu, Paul K. Chu, Xiubo Tian
Journal: Journal of Applied Physics
J. Appl. Phys. 95, 3319–3323 (2004)
https://doi.org/10.1063/1.1666976
Published: April 2004
View article titled, Influence of thickness and dielectric properties on implantation efficacy in plasma immersion ion implantation of insulators
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Journal Articles

Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics

Ricky K. Y. Fu, Ka Leung Fu, Xiubo Tian, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 356–360 (2004)
https://doi.org/10.1116/1.1648676
Published: February 2004
View article titled, Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics
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Journal Articles

Flexible system for multiple plasma immersion ion implantation-deposition processes

Xiubo Tian, Ricky K. Y. Fu, Paul K. Chu, Andre Anders, Chunzhi Gong, Shiqin Yang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 74, 5137–5140 (2003)
https://doi.org/10.1063/1.1626012
Published: December 2003
View article titled, Flexible system for multiple plasma immersion ion implantation-deposition processes
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Journal Articles

Enhancement of implantation energy using a conducting grid in plasma immersion ion implantation of dielectric/polymeric materials

Ricky K. Y. Fu, Xiubo Tian, Paul K. Chu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 74, 3697–3700 (2003)
https://doi.org/10.1063/1.1588757
Published: August 2003
View article titled, Enhancement of implantation energy using a conducting grid in plasma immersion ion implantation of dielectric/polymeric materials
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Journal Articles

Effects of bias voltage on the corrosion resistance of titanium nitride thin films fabricated by dynamic plasma immersion ion implantation-deposition

Xiubo Tian, Ricky K. Y. Fu, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 160–164 (2002)
https://doi.org/10.1116/1.1427892
Published: January 2002
View article titled, Effects of bias voltage on the corrosion resistance of titanium nitride thin films fabricated by dynamic plasma immersion ion implantation-deposition
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