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Won Chegal
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Journal Articles

Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

Min Young Yoon, H. J. Yeom, Jung Hyung Kim, Won Chegal, Yong Jai Cho, Deuk-Chul Kwon, Jong-Ryul Jeong, Hyo-Chang Lee
Journal: Physics of Plasmas
Phys. Plasmas 28, 063504 (2021)
https://doi.org/10.1063/5.0047811
Published: June 2021
View article titled, Discharge physics and atomic layer etching in Ar/C<sub>4</sub>F<sub>6</sub> inductively coupled plasmas with a radio frequency bias
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Includes: Supplementary data
Journal Articles

Label-free detection of hepatitis B virus using solution immersed silicon sensors

Mangesh S. Diware, Hyun Mo Cho, Won Chegal, Yong Jai Cho, Sang Won O, Se-Hwan Paek, Dong Soo Kim, Kyeong-Suk Kim, Yoon Gi Min, Jae Heung Jo, ChaeHo Shin
Journal: Biointerphases
Biointerphases 12, 01A402 (2017)
https://doi.org/10.1116/1.4977075
Published: February 2017
View article titled, Label-free detection of hepatitis B virus using solution immersed silicon sensors
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Journal Articles

Development of a Focused‐Beam Ellipsometer Based on a New Principle

Sang‐Heon Ye, Yoon Keun Kwak, Soo Hyun Kim, Hyun Mo Cho, Yong Jai Cho, Won Chegal
Journal: AIP Conference Proceedings
AIP Conf. Proc. 931, 69–73 (2007)
https://doi.org/10.1063/1.2799439
Published: September 2007
View article titled, Development of a Focused‐Beam Ellipsometer Based on a New Principle
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Journal Articles

Non‐destructive surface profile measurement of a thin film deposited on a patterned sample

Daesuk Kim, Won Chegal, Soohyun Kim, Hong Jin Kong, Yunwoo Lee
Journal: AIP Conference Proceedings
AIP Conf. Proc. 683, 357–361 (2003)
https://doi.org/10.1063/1.1622496
Published: September 2003
View article titled, Non‐destructive surface profile measurement of a thin film deposited on a patterned sample
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Journal Articles

One‐dimensional Spectroscopic Measurement of Patterned Structures Using a Custom‐built Spectral Imaging Ellipsometer

Won Chegal, Daesuk Kim, Soohyun Kim, Yong Jai Cho, Hyun Mo Cho, Yun Woo Lee
Journal: AIP Conference Proceedings
AIP Conf. Proc. 683, 753–757 (2003)
https://doi.org/10.1063/1.1622555
Published: September 2003
View article titled, One‐dimensional Spectroscopic Measurement of Patterned Structures Using a Custom‐built Spectral Imaging Ellipsometer
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