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W. Pamler
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Journal Articles

Scaling of Metal Interconnects: Challenges to Functionality and Reliability

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M. Engelhardt, G. Schindler, M. Traving, A. Stich, Z. Gabric, W. Pamler, W. Hönlein
Journal: AIP Conference Proceedings
AIP Conf. Proc. 817, 3–12 (2006)
https://doi.org/10.1063/1.2173526
Published: February 2006
View articletitled, Scaling of Metal Interconnects: Challenges to Functionality and Reliability
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Journal Articles

Platinum contamination issues in ferroelectric memories

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H. Boubekeur, T. Mikolajick, W. Pamler, J. Höpfner, L. Frey, H. Ryssel
Journal: Journal of Applied Physics
J. Appl. Phys. 92, 3257–3265 (2002)
https://doi.org/10.1063/1.1500414
Published: September 2002
View articletitled, Platinum contamination issues in ferroelectric memories
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Journal Articles

Thickness determination of thin oxide layers at the bottom of contact holes of semiconductor devices by Auger electron spectroscopy

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W. Pamler, J. Mathuni
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 12–18 (1994)
https://doi.org/10.1116/1.578907
Published: January 1994
View articletitled, Thickness determination of thin oxide layers at the bottom of contact holes of semiconductor devices by Auger electron spectroscopy
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Journal Articles

Performance and failure mechanisms of TiN diffusion barrier layers in submicron devices

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A. Kohlhase, M. Mändl, W. Pamler
Journal: Journal of Applied Physics
J. Appl. Phys. 65, 2464–2469 (1989)
https://doi.org/10.1063/1.342816
Published: March 1989
View articletitled, Performance and failure mechanisms of TiN diffusion barrier layers in submicron devices
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Journal Articles

Impact of copper contamination on the quality of silicon oxides

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H. Wendt, H. Cerva, V. Lehmann, W. Pamler
Journal: Journal of Applied Physics
J. Appl. Phys. 65, 2402–2405 (1989)
https://doi.org/10.1063/1.342808
Published: March 1989
View articletitled, Impact of copper contamination on the quality of silicon oxides
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Journal Articles

Summary Abstract: Auger analysis of sputter deposited TiNx thin films

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W. Pamler, M. Hüttinger, A. Kohlhase, S. Yurkov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 1106–1107 (1988)
https://doi.org/10.1116/1.575653
Published: May 1988
View articletitled, Summary Abstract: Auger analysis of sputter deposited TiNx thin films
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Journal Articles

Transient conductivity studies in tellurium thin films

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W. Pamler, E. E. Marinero
Journal: Journal of Applied Physics
J. Appl. Phys. 61, 2294–2300 (1987)
https://doi.org/10.1063/1.337939
Published: March 1987
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Journal Articles

Laser‐driven metal cluster segregation in oxide matrices

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E. E. Marinero, W. Pamler, M. Chen, V. Jipson, W. Y. Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 3, 1560–1562 (1985)
https://doi.org/10.1116/1.582984
Published: September 1985
View articletitled, Laser‐driven metal cluster segregation in oxide matrices
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