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Journal Articles

Thickness and temperature dependence of stress relaxation in nanoscale aluminum films

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S. Hyun, W. L. Brown, R. P. Vinci
Journal: Applied Physics Letters
Appl. Phys. Lett. 83, 4411–4413 (2003)
https://doi.org/10.1063/1.1629381
Published: November 2003
View articletitled, Thickness and temperature dependence of stress relaxation in nanoscale aluminum films
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Journal Articles

Electromigration-induced plastic deformation in passivated metal lines

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B. C. Valek, J. C. Bravman, N. Tamura, A. A. MacDowell, R. S. Celestre, H. A. Padmore, R. Spolenak, W. L. Brown, B. W. Batterman, J. R. Patel
Journal: Applied Physics Letters
Appl. Phys. Lett. 81, 4168–4170 (2002)
https://doi.org/10.1063/1.1525880
Published: November 2002
View articletitled, Electromigration-induced plastic deformation in passivated metal lines
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Journal Articles

High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron x-ray diffraction

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N. Tamura, A. A. MacDowell, R. S. Celestre, H. A. Padmore, B. Valek, J. C. Bravman, R. Spolenak, W. L. Brown, T. Marieb, H. Fujimoto, B. W. Batterman, J. R. Patel
Journal: Applied Physics Letters
Appl. Phys. Lett. 80, 3724–3726 (2002)
https://doi.org/10.1063/1.1477621
Published: May 2002
View articletitled, High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron x-ray diffraction
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Journal Articles

High resolution microdiffraction studies using synchrotron radiation

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R. Spolenak, N. Tamura, B. C. Valek, A. A. MacDowell, R. S. Celestre, H. A. Padmore, W. L. Brown, T. Marieb, B. W. Batterman, J. R. Patel
Journal: AIP Conference Proceedings
AIP Conf. Proc. 612, 217–228 (2002)
https://doi.org/10.1063/1.1469906
Published: April 2002
View articletitled, High resolution microdiffraction studies using synchrotron radiation
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Journal Articles

Texture development of blanket electroplated copper films

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C. Lingk, M. E. Gross, W. L. Brown
Journal: Journal of Applied Physics
J. Appl. Phys. 87, 2232–2236 (2000)
https://doi.org/10.1063/1.372166
Published: March 2000
View articletitled, Texture development of blanket electroplated copper films
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Journal Articles

Structures and coalescence behavior of size-selected silicon nanoclusters studied by surface-plasmon-polariton enhanced Raman spectroscopy

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E. C. Honea, A. Ogura, D. R. Peale, C. Félix, C. A. Murray, K. Raghavachari, W. O. Sprenger, M. F. Jarrold, W. L. Brown
Journal: The Journal of Chemical Physics
J. Chem. Phys. 110, 12161–12172 (1999)
https://doi.org/10.1063/1.479153
Published: June 1999
View articletitled, Structures and coalescence behavior of size-selected silicon nanoclusters studied by surface-plasmon-polariton enhanced Raman spectroscopy
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Journal Articles

X-ray diffraction pole figure evidence for (111) sidewall texture of electroplated Cu in submicron damascene trenches

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C. Lingk, M. E. Gross, W. L. Brown
Journal: Applied Physics Letters
Appl. Phys. Lett. 74, 682–684 (1999)
https://doi.org/10.1063/1.122986
Published: February 1999
View articletitled, X-ray diffraction pole figure evidence for (111) sidewall texture of electroplated Cu in submicron damascene trenches
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Journal Articles

On the mechanism of the hydrogen-induced exfoliation of silicon

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M. K. Weldon, V. E. Marsico, Y. J. Chabal, A. Agarwal, D. J. Eaglesham, J. Sapjeta, W. L. Brown, D. C. Jacobson, Y. Caudano, S. B. Christman, E. E. Chaban
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 1065–1073 (1997)
https://doi.org/10.1116/1.589416
Published: July 1997
View articletitled, On the mechanism of the hydrogen-induced exfoliation of silicon
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Journal Articles

Vacuum ultraviolet rare gas excimer light source

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J. Wieser, D. E. Murnick, A. Ulrich, H. A. Huggins, A. Liddle, W. L. Brown
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 68, 1360–1364 (1997)
https://doi.org/10.1063/1.1147942
Published: March 1997
View articletitled, Vacuum ultraviolet rare gas excimer light source
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Journal Articles

Contrast formation in focused ion beam images of polycrystalline aluminum

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D. L. Barr, W. L. Brown
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 13, 2580–2583 (1995)
https://doi.org/10.1116/1.588027
Published: November 1995
View articletitled, Contrast formation in focused ion beam images of polycrystalline aluminum
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Journal Articles

Variation in stress with background pressure in sputtered Mo/Si multilayer films

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D. L. Windt, W. L. Brown, C. A. Volkert, W. K. Waskiewicz
Journal: Journal of Applied Physics
J. Appl. Phys. 78, 2423–2430 (1995)
https://doi.org/10.1063/1.360164
Published: August 1995
View articletitled, Variation in stress with background pressure in sputtered Mo/Si multilayer films
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Journal Articles

A channel plate detector for electron backscatter diffraction

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D. L. Barr, W. L. Brown
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 66, 3480–3482 (1995)
https://doi.org/10.1063/1.1145457
Published: June 1995
View articletitled, A channel plate detector for electron backscatter diffraction
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Journal Articles

Studies of Ag films deposited using partially ionized beam deposition

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Zhong‐Min Ren, Yuan‐Cheng Du, Mao‐Qi He, Zhi‐Feng Ying, Xia‐Xing Xiong, Fu‐Ming Li, Yi Su, Liang‐Yao Chen, W. L. Brown
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 17–20 (1995)
https://doi.org/10.1116/1.579435
Published: January 1995
View articletitled, Studies of Ag films deposited using partially ionized beam deposition
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Journal Articles

Focused ion beam observation of grain structure and precipitates in aluminum thin films

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D. L. Barr, L. R. Harriott, W. L. Brown
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 3120–3125 (1992)
https://doi.org/10.1116/1.585941
Published: November 1992
View articletitled, Focused ion beam observation of grain structure and precipitates in aluminum thin films
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Journal Articles

Low‐temperature beam‐induced deposition of thin tin films

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H. O. Funsten, J. W. Boring, R. E. Johnson, W. L. Brown
Journal: Journal of Applied Physics
J. Appl. Phys. 71, 1475–1484 (1992)
https://doi.org/10.1063/1.351241
Published: February 1992
View articletitled, Low‐temperature beam‐induced deposition of thin tin films
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Journal Articles

An investigation of cluster formation in an ionized cluster beam deposition source

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R. L. McEachern, W. L. Brown, M. F. Jarrold, M. Sosnowski, G. Takaoka, H. Usui, I. Yamada
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 3105–3112 (1991)
https://doi.org/10.1116/1.577180
Published: November 1991
View articletitled, An investigation of cluster formation in an ionized cluster beam deposition source
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Journal Articles

Achromatic quadrupole focusing systems for use with liquid metal ion sources

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L. R. Harriott, W. L. Brown, D. L. Barr
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 8, 1706–1710 (1990)
https://doi.org/10.1116/1.585143
Published: November 1990
View articletitled, Achromatic quadrupole focusing systems for use with liquid metal ion sources
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Journal Articles

Anticipated performance of achromatic quadrupole focusing systems when used with liquid metal ion sources

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L. R. Harriott, W. L. Brown, D. L. Barr
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 8, 3279–3283 (1990)
https://doi.org/10.1116/1.576578
Published: July 1990
View articletitled, Anticipated performance of achromatic quadrupole focusing systems when used with liquid metal ion sources
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Journal Articles

Droplet emission from a gallium liquid metal ion source as observed with an ion streak camera

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D. L. Barr, W. L. Brown
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 7, 1806–1809 (1989)
https://doi.org/10.1116/1.584462
Published: November 1989
View articletitled, Droplet emission from a gallium liquid metal ion source as observed with an ion streak camera
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Journal Articles

Ion‐beam direct‐write mechanisms in palladium acetate films

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M. E. Gross, W. L. Brown, L. R. Harriott, K. D. Cummings, J. Linnros, H. Funsten
Journal: Journal of Applied Physics
J. Appl. Phys. 66, 1403–1410 (1989)
https://doi.org/10.1063/1.344444
Published: August 1989
View articletitled, Ion‐beam direct‐write mechanisms in palladium acetate films
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