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Journal Articles

Nucleation control of high crystal quality heteroepitaxial Sc_0.4Al_0.6N grown by molecular beam epitaxy

Matthew T. Hardy, Andrew C. Lang, Eric N. Jin, Neeraj Nepal, Brian P. Downey, Vikrant J. Gokhale, D. Scott Katzer, Virginia D. Wheeler

J. Appl. Phys. 134, 105301 (2023)

https://doi.org/10.1063/5.0164430

Published: September 2023

View article titled, Nucleation control of high crystal quality heteroepitaxial Sc0.4Al0.6N grown by molecular beam epitaxy

Journal Articles

Impact of surface preparation on the epitaxial growth of SrTiO₃ on ScAlN/GaN heterostructures

Eric N. Jin, Andrew C. Lang, Brian P. Downey, Vikrant J. Gokhale, Matthew T. Hardy, Neeraj Nepal, D. Scott Katzer, Virginia D. Wheeler

J. Appl. Phys. 134, 025303 (2023)

https://doi.org/10.1063/5.0152694

Published: July 2023

View article titled, Impact of surface preparation on the epitaxial growth of SrTiO3 on ScAlN/GaN heterostructures

Includes: Supplementary data

Journal Articles

Heteroepitaxial growth of β-Ga₂O₃ films on SiC via molecular beam epitaxy

Neeraj Nepal, D. Scott Katzer, Brian P. Downey, Virginia D. Wheeler, Luke O. Nyakiti, David F. Storm, Matthew T. Hardy, Jaime A. Freitas, Eric N. Jin, Diego Vaca, Luke Yates, Samuel Graham, Satish Kumar, David J. Meyer

J. Vac. Sci. Technol. A 38, 063406 (2020)

https://doi.org/10.1116/6.0000452

Published: October 2020

View article titled, Heteroepitaxial growth of β-Ga2O3 films on SiC via molecular beam epitaxy

Journal Articles

Comprehensive characterization of copper oxide atomic layer deposition using water or ozone with enhanced bis-(dimethylamino-2-propoxide) copper delivery

Jason R. Avila, Charles R. Eddy, Jr., Virginia D. Wheeler

J. Vac. Sci. Technol. A 38, 042403 (2020)

https://doi.org/10.1116/6.0000248

Published: May 2020

View article titled, Comprehensive characterization of copper oxide atomic layer deposition using water or ozone with enhanced bis-(dimethylamino-2-propoxide) copper delivery

Journal Articles

The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

David R. Boris, Virginia D. Wheeler, Neeraj Nepal, Syed B. Qadri, Scott G. Walton, Charles (Chip) R. Eddy

J. Vac. Sci. Technol. A 38, 040801 (2020)

https://doi.org/10.1116/6.0000145

Published: May 2020

View article titled, The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

Journal Articles

Integration of polycrystalline Ga₂O₃ on diamond for thermal management

Zhe Cheng, Virginia D. Wheeler, Tingyu Bai, Jingjing Shi, Marko J. Tadjer, Tatyana Feygelson, Karl D. Hobart, Mark S. Goorsky, Samuel Graham

Appl. Phys. Lett. 116, 062105 (2020)

https://doi.org/10.1063/1.5125637

Published: February 2020

View article titled, Integration of polycrystalline Ga2O3 on diamond for thermal management

Journal Articles

Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy

David R. Boris, Virginia D. Wheeler, Jason R. Avila, Syed B. Qadri, Charles R. Eddy, Jr., Scott G. Walton

J. Vac. Sci. Technol. A 37, 060909 (2019)

https://doi.org/10.1116/1.5128208

Published: November 2019

View article titled, Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy

Journal Articles

Electrical characterization of ALD HfO₂ high-k dielectrics on ( 2 ¯ 01) β-Ga₂O₃

David I. Shahin, Marko J. Tadjer, Virginia D. Wheeler, Andrew D. Koehler, Travis J. Anderson, Charles R. Eddy, Jr., Aris Christou

Appl. Phys. Lett. 112, 042107 (2018)

https://doi.org/10.1063/1.5006276

Published: January 2018

View article titled, Electrical characterization of ALD HfO2 high-k dielectrics on ( 2 ¯ 01) β-Ga2O3

Journal Articles

Fabrication of nanopower generators using thin atomic layer deposited films

Robert Parker Given, Kyle S. Wenger, Virginia D. Wheeler, Brian C. Utter, Giovanna Scarel

J. Vac. Sci. Technol. A 35, 01B120 (2017)

https://doi.org/10.1116/1.4971403

Published: December 2016

View article titled, Fabrication of nanopower generators using thin atomic layer deposited films

Journal Articles

Growth and characterization of Al₂O₃ films on fluorine functionalized epitaxial graphene

Zachary R. Robinson, Glenn G. Jernigan, Virginia D. Wheeler, Sandra C. Hernández, Charles R. Eddy, Jr., Tyler R. Mowll, Eng Wen Ong, Carl A. Ventrice, Jr., Heike Geisler, Ivo Pletikosic, Hongbo Yang, Tonica Valla

J. Appl. Phys. 120, 075302 (2016)

https://doi.org/10.1063/1.4960803

Published: August 2016

View article titled, Growth and characterization of Al2O3 films on fluorine functionalized epitaxial graphene

Journal Articles

Publisher's Note: “Structural consequences of hydrogen intercalation of epitaxial graphene on SiC(0001)” [Appl. Phys. Lett. 105 , 161602 (2014)]

Jonathan D. Emery, Virginia D. Wheeler, James E. Johns, Martin E. McBriarty, Blanka Detlefs, Mark C. Hersam, D. Kurt Gaskill, Michael J. Bedzyk

Appl. Phys. Lett. 107, 189902 (2015)

https://doi.org/10.1063/1.4935412

Published: November 2015

View article titled, Publisher's Note: “Structural consequences of hydrogen intercalation of epitaxial graphene on SiC(0001)” [Appl. Phys. Lett. 105 , 161602 (2014)]

Journal Articles

Graphene nanoribbon field-effect transistors on wafer-scale epitaxial graphene on SiC substrates

Wan Sik Hwang, Pei Zhao, Kristof Tahy, Luke O. Nyakiti, Virginia D. Wheeler, Rachael L. Myers-Ward, Charles R. Eddy, Jr., D. Kurt Gaskill, Joshua A. Robinson, Wilfried Haensch, Huili (Grace) Xing, Alan Seabaugh, Debdeep Jena

APL Mater. 3, 011101 (2015)

https://doi.org/10.1063/1.4905155

Published: January 2015

View article titled, Graphene nanoribbon field-effect transistors on wafer-scale epitaxial graphene on SiC substrates

Includes: Supplementary data

Journal Articles

Structural consequences of hydrogen intercalation of epitaxial graphene on SiC(0001)

Jonathan D. Emery, Virginia D. Wheeler, James E. Johns, Martin E. McBriarty, Blanka Detlefs, Mark C. Hersam, D. Kurt Gaskill, Michael J. Bedzyk

Appl. Phys. Lett. 105, 161602 (2014)

https://doi.org/10.1063/1.4899142

Published: October 2014

View article titled, Structural consequences of hydrogen intercalation of epitaxial graphene on SiC(0001)

Journal Articles

Silicon nitride thin films deposited using electron-beam evaporation in an RF plasma MBE system

D. Scott Katzer, David J. Meyer, David F. Storm, Neeraj Nepal, Virginia D. Wheeler

J. Vac. Sci. Technol. B 32, 02C117 (2014)

https://doi.org/10.1116/1.4867435

Published: March 2014

View article titled, Silicon nitride thin films deposited using electron-beam evaporation in an RF plasma MBE system

Journal Articles

Electronic transport properties of top-gated epitaxial-graphene nanoribbon field-effect transistors on SiC wafers

Wan Sik Hwang, Kristof Tahy, Pei Zhao, Luke O. Nyakiti, Virginia D. Wheeler, Rachael L. Myers-Ward, Charles R. Eddy, Jr, D. Kurt Gaskill, Huili (Grace) Xing, Alan Seabaugh, Debdeep Jena

J. Vac. Sci. Technol. B 32, 012202 (2014)

https://doi.org/10.1116/1.4861379

Published: January 2014

View article titled, Electronic transport properties of top-gated epitaxial-graphene nanoribbon field-effect transistors on SiC wafers

Journal Articles

Impact of surface treatments on high-κ dielectric integration with Ga-polar and N-polar GaN

Caroline R. English, Virginia D. Wheeler, Nelson Y. Garces, Neeraj Nepal, Anindya Nath, Jennifer K. Hite, Michael A. Mastro, Charles R. Eddy, Jr.

J. Vac. Sci. Technol. B 32, 03D106 (2014)

https://doi.org/10.1116/1.4831875

Published: December 2013

View article titled, Impact of surface treatments on high-κ dielectric integration with Ga-polar and N-polar GaN

Journal Articles

Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications

Nelson Y. Garces, David J. Meyer, Virginia D. Wheeler, Zuzanna Liliental-Weber, David K. Gaskill, Charles R. Eddy, Jr.

J. Vac. Sci. Technol. B 32, 03D101 (2014)

https://doi.org/10.1116/1.4818254

Published: August 2013

View article titled, Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications

Journal Articles

Atomic-scale movement induced in nanoridges by scanning tunneling microscopy on epitaxial graphene grown on 4H-SiC(0001)

Peng Xu, Steven D. Barber, J. Kevin Schoelz, Matthew L. Ackerman, Dejun Qi, Paul M. Thibado, Virginia D. Wheeler, Luke O. Nyakiti, Rachael L. Myers-Ward, Charles R. Eddy, Jr., D. Kurt Gaskill

J. Vac. Sci. Technol. B 31, 04D101 (2013)

https://doi.org/10.1116/1.4803137

Published: May 2013

View article titled, Atomic-scale movement induced in nanoridges by scanning tunneling microscopy on epitaxial graphene grown on 4H-SiC(0001)

Journal Articles

Bilayer graphene by bonding CVD graphene to epitaxial graphene

Glenn G. Jernigan, Travis J. Anderson, Jeremy T. Robinson, Joshua D. Caldwell, Jim C. Culbertson, Rachael Myers-Ward, Anthony L. Davidson, Mario G. Ancona, Virginia D. Wheeler, Luke O. Nyakiti, Adam L. Friedman, Paul M. Campbell, D. Kurt Gaskill

J. Vac. Sci. Technol. B 30, 03D110 (2012)

https://doi.org/10.1116/1.3701700

Published: April 2012

View article titled, Bilayer graphene by bonding CVD graphene to epitaxial graphene

Journal Articles

Graphene functionalization and seeding for dielectric deposition and device integration

Nelson Y. Garces, Virginia D. Wheeler, D. Kurt Gaskill

J. Vac. Sci. Technol. B 30, 030801 (2012)

https://doi.org/10.1116/1.3693416

Published: March 2012

View article titled, Graphene functionalization and seeding for dielectric deposition and device integration

NARROW

Topics

Nucleation control of high crystal quality heteroepitaxial Sc_0.4Al_0.6N grown by molecular beam epitaxy

Impact of surface preparation on the epitaxial growth of SrTiO₃ on ScAlN/GaN heterostructures

Heteroepitaxial growth of β-Ga₂O₃ films on SiC via molecular beam epitaxy

Comprehensive characterization of copper oxide atomic layer deposition using water or ozone with enhanced bis-(dimethylamino-2-propoxide) copper delivery

The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

Integration of polycrystalline Ga₂O₃ on diamond for thermal management

Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy

Electrical characterization of ALD HfO₂ high-k dielectrics on ( 2 ¯ 01) β-Ga₂O₃

Fabrication of nanopower generators using thin atomic layer deposited films

Growth and characterization of Al₂O₃ films on fluorine functionalized epitaxial graphene

Publisher's Note: “Structural consequences of hydrogen intercalation of epitaxial graphene on SiC(0001)” [Appl. Phys. Lett. 105 , 161602 (2014)]

Graphene nanoribbon field-effect transistors on wafer-scale epitaxial graphene on SiC substrates

Structural consequences of hydrogen intercalation of epitaxial graphene on SiC(0001)

Silicon nitride thin films deposited using electron-beam evaporation in an RF plasma MBE system

Electronic transport properties of top-gated epitaxial-graphene nanoribbon field-effect transistors on SiC wafers

Impact of surface treatments on high-κ dielectric integration with Ga-polar and N-polar GaN

Plasma-assisted atomic layer deposition of nanolaminates for gate dielectric applications

Atomic-scale movement induced in nanoridges by scanning tunneling microscopy on epitaxial graphene grown on 4H-SiC(0001)

Bilayer graphene by bonding CVD graphene to epitaxial graphene

Graphene functionalization and seeding for dielectric deposition and device integration

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