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Journal Articles

Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition

Oili M. E. Ylivaara, Andreas Langner, Satu Ek, Jari Malm, Jaakko Julin, Mikko Laitinen, Saima Ali, Sakari Sintonen, Harri Lipsanen, Timo Sajavaara, Riikka L. Puurunen

J. Vac. Sci. Technol. A 40, 062414 (2022)

https://doi.org/10.1116/6.0002095

Published: November 2022

View article titled, Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition

Journal Articles

Size dependent swift heavy ion induced Au nanoparticle elongation in SiO₂ matrix

Spyridon Korkos, Kenichiro Mizohata, Sami Kinnunen, Timo Sajavaara, Kai Arstila

J. Appl. Phys. 132, 045901 (2022)

https://doi.org/10.1063/5.0099164

Published: July 2022

View article titled, Size dependent swift heavy ion induced Au nanoparticle elongation in SiO2 matrix

Journal Articles

Nanorod orientation control by swift heavy ion irradiation

Spyridon Korkos, Ville Jantunen, Kai Arstila, Timo Sajavaara, Aleksi Leino, Kai Nordlund, Flyura Djurabekova

Appl. Phys. Lett. 120, 171602 (2022)

https://doi.org/10.1063/5.0089028

Published: April 2022

View article titled, Nanorod orientation control by swift heavy ion irradiation

Includes: Supplementary data

Journal Articles

Photo-assisted O⁻ and Al⁻ production with a cesium sputter ion source

Olli Tarvainen, Risto Kronholm, Mikko Laitinen, Mikael Reponen, Jaakko Julin, Ville Toivanen, Mari Napari, Miha Marttinen, Taneli Kalvas, Dan Faircloth, Hannu Koivisto, Timo Sajavaara

AIP Conf. Proc. 2373, 020001 (2021)

https://doi.org/10.1063/5.0057495

Published: July 2021

View article titled, Photo-assisted O− and Al− production with a cesium sputter ion source

Journal Articles

Phosphites as precursors in atomic layer deposition thin film synthesis

Kristian B. Kvamme, Amund Ruud, Kristian Weibye, Timo Sajavaara, Ola Nilsen

J. Vac. Sci. Technol. A 39, 032404 (2021)

https://doi.org/10.1116/6.0000844

Published: March 2021

View article titled, Phosphites as precursors in atomic layer deposition thin film synthesis

Journal Articles

A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films

LiAo Cao, Felix Mattelaer, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier

J. Vac. Sci. Technol. A 38, 022417 (2020)

https://doi.org/10.1116/1.5139631

Published: February 2020

View article titled, A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films

Journal Articles

Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Fatemeh S. M. Hashemi, LiAo Cao, Felix Mattelaer, Timo Sajavaara, J. Ruud van Ommen, Christophe Detavernier

J. Vac. Sci. Technol. A 37, 040901 (2019)

https://doi.org/10.1116/1.5093402

Published: July 2019

View article titled, Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Includes: Supplementary data

Journal Articles

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Perttu Sippola, Alexander Pyymaki Perros, Oili M. E. Ylivaara, Helena Ronkainen, Jaakko Julin, Xuwen Liu, Timo Sajavaara, Jarkko Etula, Harri Lipsanen, Riikka L. Puurunen

J. Vac. Sci. Technol. A 36, 051508 (2018)

https://doi.org/10.1116/1.5038856

Published: July 2018

View article titled, Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Includes: Supplementary data

Journal Articles

Atomic layer deposition of AlN from AlCl₃ using NH₃ and Ar/NH₃ plasma

Ville Rontu, Perttu Sippola, Mikael Broas, Glenn Ross, Timo Sajavaara, Harri Lipsanen, Mervi Paulasto-Kröckel, Sami Franssila

J. Vac. Sci. Technol. A 36, 021508 (2018)

https://doi.org/10.1116/1.5003381

Published: January 2018

View article titled, Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Journal Articles

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Lauri Kilpi, Oili M. E. Ylivaara, Antti Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Jari Malm, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen, Helena Ronkainen

J. Vac. Sci. Technol. A 36, 01A122 (2018)

https://doi.org/10.1116/1.5003729

Published: December 2017

View article titled, Tribological properties of thin films made by atomic layer deposition sliding against silicon

Journal Articles

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Matti Putkonen, Pirjo Heikkilä, Antti T. Pasanen, Hille Rautkoski, Laura Svärd, Pekka Simell, Mika Vähä-Nissi, Timo Sajavaara

J. Vac. Sci. Technol. A 36, 01A102 (2018)

https://doi.org/10.1116/1.4999826

Published: October 2017

View article titled, Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Journal Articles

Blistering mechanisms of atomic-layer-deposited AlN and Al₂O₃ films

Mikael Broas, Hua Jiang, Andreas Graff, Timo Sajavaara, Vesa Vuorinen, Mervi Paulasto-Kröckel

Appl. Phys. Lett. 111, 141606 (2017)

https://doi.org/10.1063/1.4994974

Published: October 2017

View article titled, Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films

Includes: Supplementary data

Journal Articles

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A. Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich

J. Vac. Sci. Technol. A 35, 010801 (2017)

https://doi.org/10.1116/1.4971389

Published: December 2016

View article titled, Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Includes: Supplementary data

Journal Articles

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Oili M. E. Ylivaara, Lauri Kilpi, Xuwen Liu, Sakari Sintonen, Saima Ali, Mikko Laitinen, Jaakko Julin, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Helena Ronkainen, Riikka L. Puurunen

J. Vac. Sci. Technol. A 35, 01B105 (2017)

https://doi.org/10.1116/1.4966198

Published: November 2016

View article titled, Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Journal Articles

Simulations on time-of-flight ERDA spectrometer performance

Jaakko Julin, Kai Arstila, Timo Sajavaara

Rev. Sci. Instrum. 87, 083309 (2016)

https://doi.org/10.1063/1.4961577

Published: August 2016

View article titled, Simulations on time-of-flight ERDA spectrometer performance

Journal Articles

Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone

Joseph P. Klesko, James A. Bellow, Mark J. Saly, Charles H. Winter, Jaakko Julin, Timo Sajavaara

J. Vac. Sci. Technol. A 34, 051515 (2016)

https://doi.org/10.1116/1.4961385

Published: August 2016

View article titled, Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone

Includes: Supplementary data

Journal Articles

Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

Mikael Broas, Perttu Sippola, Timo Sajavaara, Vesa Vuorinen, Alexander Pyymaki Perros, Harri Lipsanen, Mervi Paulasto-Kröckel

J. Vac. Sci. Technol. A 34, 041506 (2016)

https://doi.org/10.1116/1.4953029

Published: June 2016

View article titled, Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

Journal Articles

Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition

Mari Napari, Jari Malm, Roope Lehto, Jaakko Julin, Kai Arstila, Timo Sajavaara, Manu Lahtinen

J. Vac. Sci. Technol. A 33, 01A128 (2015)

https://doi.org/10.1116/1.4902326

Published: November 2014

View article titled, Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition

Journal Articles

Studies on atomic layer deposition of IRMOF-8 thin films

Leo D. Salmi, Mikko J. Heikkilä, Marko Vehkamäki, Esa Puukilainen, Mikko Ritala, Timo Sajavaara

J. Vac. Sci. Technol. A 33, 01A121 (2015)

https://doi.org/10.1116/1.4901455

Published: November 2014

View article titled, Studies on atomic layer deposition of IRMOF-8 thin films

Journal Articles

Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

Ville Miikkulainen, Ola Nilsen, Han Li, Sean W. King, Mikko Laitinen, Timo Sajavaara, Helmer Fjellvåg

J. Vac. Sci. Technol. A 33, 01A101 (2015)

https://doi.org/10.1116/1.4890006

Published: July 2014

View article titled, Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

NARROW

Topics

Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition

Size dependent swift heavy ion induced Au nanoparticle elongation in SiO₂ matrix

Nanorod orientation control by swift heavy ion irradiation

Photo-assisted O⁻ and Al⁻ production with a cesium sputter ion source

Phosphites as precursors in atomic layer deposition thin film synthesis

A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films

Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Atomic layer deposition of AlN from AlCl₃ using NH₃ and Ar/NH₃ plasma

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Blistering mechanisms of atomic-layer-deposited AlN and Al₂O₃ films

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Simulations on time-of-flight ERDA spectrometer performance

Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone

Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition

Studies on atomic layer deposition of IRMOF-8 thin films

Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

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