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Thomas Kailath
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Journal Articles

Temperature cycling and control system for photosensitive materials processing

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Khalid El-Awady, Charles D. Schaper, Thomas Kailath
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 1459–1465 (2003)
https://doi.org/10.1116/1.1593640
Published: July 2003
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Journal Articles

Control of spatial and transient temperature trajectories for photoresist processing

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Khalid El-Awady, Charles D. Schaper, Thomas Kailath
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 17, 2109–2114 (1999)
https://doi.org/10.1116/1.590880
Published: September 1999
View articletitled, Control of spatial and transient temperature trajectories for photoresist processing
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Journal Articles

Pattern recognition of trench width using a confocal microscope

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Yao‐Ting Wang, Charles D. Schaper, Thomas Kailath
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 13, 840–847 (1995)
https://doi.org/10.1116/1.588194
Published: May 1995
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Journal Articles

On discrete Schrödinger equations and their two‐component wave equation equivalents

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Alfred M. Bruckstein, Thomas Kailath
Journal: Journal of Mathematical Physics
J. Math. Phys. 28, 2914–2924 (1987)
https://doi.org/10.1063/1.527693
Published: December 1987
View articletitled, On discrete Schrödinger equations and their two‐component wave equation equivalents
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Magazine Articles

Elements of Probability Theory

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J. Bass, Thomas Kailath
Journal: Physics Today
Physics Today 20, 105–107 (1967)
https://doi.org/10.1063/1.3034003
Published: November 1967
View articletitled, Elements of Probability Theory
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Magazine Articles

Methods of Matrix Algebra

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Marshall C. Pease, Thomas Kailath
Journal: Physics Today
Physics Today 19, 124–125 (1966)
https://doi.org/10.1063/1.3048377
Published: July 1966
View articletitled, Methods of Matrix Algebra
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Magazine Articles

Engineering Applications of Random Function Theory and Probability

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John L. Bogdanoff, Frank Kozin, Thomas Kailath
Frank Kozin, John L. Bogdanoff
Journal: Physics Today
Physics Today 16, 72–74 (1963)
https://doi.org/10.1063/1.3051150
Published: September 1963
View articletitled, Engineering Applications of Random Function Theory and Probability
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