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Tetsuya Miyazawa
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Journal Articles

Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C

Tetsuya Miyazawa, Yuta Sugawara, Ichiro Yoshikawa, Yuta Sato, Shinya Ohno, Tomohiro Okada, Masuaki Matsumoto, Takashi Kikuchi, Kazuhiko Mase
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062923 (2019)
https://doi.org/10.1116/1.5111879
Published: November 2019
View article titled, Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C
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Journal Articles

Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films

Masuaki Matsumoto, Tomohiro Okada, Tetsuya Miyazawa, Kazuhiko Mase, Misao Yamanaka, Ayako Hashimoto, Markus Wilde, Katsuyuki Fukutani
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051601 (2019)
https://doi.org/10.1116/1.5108983
Published: July 2019
View article titled, Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films
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Journal Articles

Development of a new NEG pump using oxygen-free Pd/Ti thin film

Takashi Kikuchi, Tetsuya Miyazawa, Hiromu Nishiguchi, Kazuhiko Mase
Journal: AIP Conference Proceedings
AIP Conf. Proc. 2054, 060046 (2019)
https://doi.org/10.1063/1.5084677
Published: January 2019
View article titled, Development of a new NEG pump using oxygen-free Pd/Ti thin film
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Journal Articles

XPS study on the thermal stability of oxygen-free Pd/Ti thin film, a new non-evaporable getter (NEG) coating

Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Takashi Kikuchi, Kazuhiko Mase
Journal: AIP Conference Proceedings
AIP Conf. Proc. 2054, 060045 (2019)
https://doi.org/10.1063/1.5084676
Published: January 2019
View article titled, XPS study on the thermal stability of oxygen-free Pd/Ti thin film, a new non-evaporable getter (NEG) coating
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Journal Articles

Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen

Tetsuya Miyazawa, Yu Kano, Yasuo Nakayama, Kenichi Ozawa, Toshiharu Iga, Misao Yamanaka, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021601 (2019)
https://doi.org/10.1116/1.5074160
Published: January 2019
View article titled, Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen
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Journal Articles

Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Tetsuya Miyazawa, Masashi Kurihara, Shinya Ohno, Naoya Terashima, Yuto Natsui, Hiroo Kato, Yoshihiro Kato, Ayako Hashimoto, Takashi Kikuchi, Kazuhiko Mase
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051601 (2018)
https://doi.org/10.1116/1.5037023
Published: August 2018
View article titled, Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C
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Journal Articles

Epitaxial growth and characterization of thick multi-layer 4H-SiC for very high-voltage insulated gate bipolar transistors

Tetsuya Miyazawa, Koji Nakayama, Atsushi Tanaka, Katsunori Asano, Shi-yang Ji, Kazutoshi Kojima, Yuuki Ishida, Hidekazu Tsuchida
Journal: Journal of Applied Physics
J. Appl. Phys. 118, 085702 (2015)
https://doi.org/10.1063/1.4929456
Published: August 2015
View article titled, Epitaxial growth and characterization of thick multi-layer 4H-SiC for very high-voltage insulated gate bipolar transistors
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Journal Articles

Point defect reduction and carrier lifetime improvement of Si- and C-face 4H-SiC epilayers

Tetsuya Miyazawa, Hidekazu Tsuchida
Journal: Journal of Applied Physics
J. Appl. Phys. 113, 083714 (2013)
https://doi.org/10.1063/1.4793504
Published: February 2013
View article titled, Point defect reduction and carrier lifetime improvement of Si- and C-face 4H-SiC epilayers
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Journal Articles

Evaluation of long carrier lifetimes in thick 4H silicon carbide epitaxial layers

Tetsuya Miyazawa, Masahiko Ito, Hidekazu Tsuchida
Journal: Applied Physics Letters
Appl. Phys. Lett. 97, 202106 (2010)
https://doi.org/10.1063/1.3517487
Published: November 2010
View article titled, Evaluation of long carrier lifetimes in thick 4H silicon carbide epitaxial layers
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Journal Articles

Enhanced annealing of the Z 1 ∕ 2 defect in 4H–SiC epilayers

Liutauras Storasta, Hidekazu Tsuchida, Tetsuya Miyazawa, Takeshi Ohshima
Journal: Journal of Applied Physics
J. Appl. Phys. 103, 013705 (2008)
https://doi.org/10.1063/1.2829776
Published: January 2008
View article titled, Enhanced annealing of the Z 1 ∕ 2 defect in 4H–SiC epilayers
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