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1-11 of 11
Taesung Kim
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Journal Articles
Journal Articles
Uniform deposition method of monodispersed SiO2 nanoparticles on a 300-mm Si wafer surface
Available to Purchase
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 92, 113704 (2021)
Published: November 2021
Journal Articles
Application of electrospray-scanning mobility particle sizer for the measurement of sub-10 nm chemical mechanical planarization slurry abrasive size distribution
Available to Purchase
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 91, 075117 (2020)
Published: July 2020
Journal Articles
Journal Articles
Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer
Available to Purchase
J. Vac. Sci. Technol. A 36, 021506 (2018)
Published: December 2017
Journal Articles
Note: Electric field assisted megasonic atomization for size-controlled nanoparticles
Available to Purchase
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 88, 076106 (2017)
Published: July 2017
Journal Articles
Note: Evaluation of slurry particle size analyzers for chemical mechanical planarization process
Available to Purchase
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 87, 046101 (2016)
Published: April 2016
Journal Articles
Development of particle characteristics diagnosis system for nanoparticle analysis in vacuum
Available to PurchaseDongbin Kim, Jihun Mun, HyeongU Kim, Ju-Young Yun, Yong-Ju Kim, TaeWan Kim, Taesung Kim, Sang-Woo Kang
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 87, 023304 (2016)
Published: February 2016
Journal Articles
Reduction of metal contact resistance of graphene devices via CO2 cluster cleaning
Available to Purchase
Journal:
Applied Physics Letters
Appl. Phys. Lett. 104, 223110 (2014)
Published: June 2014
Includes: Supplementary data
Journal Articles
A novel approach to use of elastomer for monitoring of pressure using plastic optical fiber
Available to Purchase
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 81, 045108 (2010)
Published: April 2010
Journal Articles