1-1 of 1
Sumit Choudhary
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies

Sumit Choudhary, Midathala Yogesh, Daniel Schwarz, Hannes S. Funk, Subrata Ghosh, Satinder K. Sharma, Jörg Schulze, Kenneth E. Gonsalves
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052203 (2023)
https://doi.org/10.1116/6.0002767
Published: August 2023
View article titled, Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies
Open the PDF for Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies in another window
Includes: Supplementary data