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1-20 of 59
Shinji Matsui
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Journal Articles
Makoto Okada, Yuichi Haruyama, Shinji Matsui, Emi Nishioka, Risa Hosoda, Mizuho Kondo, Nobuhiro Kawatsuki, Tomoyuki Sasaki, Hiroshi Ono
J. Vac. Sci. Technol. B 31, 06FB04 (2013)
Published: November 2013
Journal Articles
J. Vac. Sci. Technol. B 30, 06FB06 (2012)
Published: October 2012
Journal Articles
J. Vac. Sci. Technol. B 30, 011601 (2012)
Published: December 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 06FC18 (2011)
Published: November 2011
Journal Articles
Mechanical characteristics of imprinted nanostructures fabricated with a poly(dimethylsiloxane) mold
J. Vac. Sci. Technol. B 29, 06FC10 (2011)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 06FC09 (2011)
Published: November 2011
Journal Articles
Yohei Sawada, Yuichi Haruyama, Kazuhiro Kanda, Shinji Matsui, Makoto Okada, Hiroto Miyake, Takeshi Ohsaki, Yoshihiko Hirai, Hiroshi Hiroshima
J. Vac. Sci. Technol. B 29, 06FC05 (2011)
Published: October 2011
Journal Articles
Makoto Okada, Yuichi Haruyama, Shinji Matsui, Hiroto Miyake, Shuso Iyoshi, Takao Yukawa, Hidekazu Takeuchi
J. Vac. Sci. Technol. B 29, 06FC04 (2011)
Published: October 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 06FC03 (2011)
Published: October 2011
Journal Articles
J. Vac. Sci. Technol. B 29, 011005 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. B 28, C6M50–C6M56 (2010)
Published: December 2010
Journal Articles
Makoto Okada, Masayuki Iwasa, Hiroto Miyake, Takeshi Ohsaki, Yuichi Haruyama, Kazuhiro Kanda, Shinji Matsui
J. Vac. Sci. Technol. B 28, C6M17–C6M22 (2010)
Published: November 2010
Journal Articles
J. Vac. Sci. Technol. B 28, 740–743 (2010)
Published: July 2010
Journal Articles
J. Vac. Sci. Technol. B 27, 2805–2809 (2009)
Published: December 2009
Journal Articles
Reo Kometani, Toshinari Ichihashi, Kazuhiro Kanda, Tsuneo Suzuki, Koichi Niihara, Sunao Ishihara, Takashi Kaito, Shinji Matsui
J. Vac. Sci. Technol. B 26, 2628–2631 (2008)
Published: December 2008
Journal Articles
Jun-Ichi Fujita, Yuta Ikeda, Satoshi Okada, Kodai Higashi, Shotaro Nakasawa, Masahiko Ishida, Shinji Matsui
J. Vac. Sci. Technol. B 25, 2624–2627 (2007)
Published: December 2007
Journal Articles
J. Vac. Sci. Technol. B 25, 2180–2183 (2007)
Published: December 2007
Journal Articles
Journal Articles
Journal Articles
Toyoaki Eguchi, Taichi Okuda, Takeshi Matsushima, Akira Kataoka, Ayumi Harasawa, Kotone Akiyama, Toyohiko Kinoshita, Yukio Hasegawa, Masanori Kawamori, Yuichi Haruyama, Shinji Matsui
Journal:
Applied Physics Letters
Appl. Phys. Lett. 89, 243119 (2006)
Published: December 2006
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