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Journal Articles

Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments

Soon-Won Jung, Min Hyuk Chang, Kyeong-Joon Jo, Mi-Hee Jung, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052201 (2023)
https://doi.org/10.1116/6.0002631
Published: July 2023
View article titled, Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments
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Journal Articles

Nonvolatile programmable metallization cell memory switching element based on Ag-doped SbTe solid electrolyte

Young Sam Park, Seung Yun Lee, Sung Min Yoon, Soon Won Jung, Byoung Gon Yu, Soo Jin Lee, Soon Gil Yoon
Journal: Applied Physics Letters
Appl. Phys. Lett. 91, 162107 (2007)
https://doi.org/10.1063/1.2789663
Published: October 2007
View article titled, Nonvolatile programmable metallization cell memory switching element based on Ag-doped SbTe solid electrolyte
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Journal Articles

Low power and high speed phase-change memory devices with silicon-germanium heating layers

Seung-Yun Lee, Sung-Min Yoon, Young-Sam Park, Byoung-Gon Yu, Sang-Hoon Kim, Sang-Heung Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 1244–1248 (2007)
https://doi.org/10.1116/1.2752515
Published: June 2007
View article titled, Low power and high speed phase-change memory devices with silicon-germanium heating layers
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Journal Articles

Polycrystalline silicon-germanium heating layer for phase-change memory applications

Seung-Yun Lee, Kyu-Jeong Choi, Sang-Ouk Ryu, Sung-Min Yoon, Nam-Yeal Lee, Young-Sam Park, Sang-Hoon Kim, Sang-Heung Lee, Byoung-Gon Yu
Journal: Applied Physics Letters
Appl. Phys. Lett. 89, 053517 (2006)
https://doi.org/10.1063/1.2335363
Published: August 2006
View article titled, Polycrystalline silicon-germanium heating layer for phase-change memory applications
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Journal Articles

Effects of high-dose BF 2 + implantation on the formation of Ti-germanosilicide on polycrystalline Si/Si 0.87 Ge 0.13 / Si layers

Chan Woo Park, Seung-Yun Lee, Sang-Hoon Kim, Jin-Yeong Kang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 2193–2197 (2003)
https://doi.org/10.1116/1.1612936
Published: September 2003
View article titled, Effects of high-dose BF 2 + implantation on the formation of Ti-germanosilicide on polycrystalline Si/Si 0.87 Ge 0.13 / Si layers
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Journal Articles

Reflow of copper in oxygen anneal ambients

Seung-Yun Lee, Sung-Ho Choi, Jin-Yeong Kang, Chong-Ook Park
Journal: Journal of Applied Physics
J. Appl. Phys. 88, 5946–5950 (2000)
https://doi.org/10.1063/1.1288783
Published: November 2000
View article titled, Reflow of copper in oxygen anneal ambients
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Journal Articles

Reflow of copper in an oxygen ambient

Seung-Yun Lee, Dong-Won Kim, Sa-Kyun Rha, Chong-Ook Park, Hyung-Ho Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 2902–2905 (1998)
https://doi.org/10.1116/1.590292
Published: September 1998
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Journal Articles

Characterization of TiN barriers against Cu diffusion by capacitance–voltage measurement

Sa-Kyun Rha, Seung-Yun Lee, Won-Jun Lee, Yong-Sup Hwang, Chong-Ook Park, Dong-Won Kim, Youn-Seoung Lee, Chung-Nam Whang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 2019–2025 (1998)
https://doi.org/10.1116/1.590123
Published: July 1998
View article titled, Characterization of TiN barriers against Cu diffusion by capacitance–voltage measurement
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