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Seiji Samukawa
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Journal Articles

Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method

Tomoki Harada, Daisuke Ohori, Kazuhiko Endo, Seiji Samukawa, Tetsuo Ikari, Atsuhiko Fukuyama
Journal: Journal of Applied Physics
J. Appl. Phys. 133, 125703 (2023)
https://doi.org/10.1063/5.0146578
Published: March 2023
View article titled, Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method
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Journal Articles

Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition

Beibei Ge, Daisuke Ohori, Yi-Ho Chen, Takuya Ozaki, Kazuhiko Endo, Yiming Li, Jenn-Hwan Tarng, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022405 (2022)
https://doi.org/10.1116/6.0001607
Published: February 2022
View article titled, Room-temperature and high-quality HfO<sub>2</sub>/SiO<sub>2</sub> gate stacked film grown by neutral beam enhanced atomic layer deposition
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Journal Articles

Selective atomic layer reaction between GaN and SiN in HBr neutral beam etching

Daisuke Ohori, Takahiro Sawada, Kenta Sugawara, Masaya Okada, Ken Nakata, Kazutaka Inoue, Daisuke Sato, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 042601 (2021)
https://doi.org/10.1116/6.0000867
Published: May 2021
View article titled, Selective atomic layer reaction between GaN and SiN in HBr neutral beam etching
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Journal Articles

Surface wettability of silicon nanopillar array structures fabricated by biotemplate ultimate top-down processes

Sou Takeuchi, Daisuke Ohori, Masahiro Sota, Teruhisa Ishida, Yiming Li, Jenn-Hwan Tarng, Kazuhiko Endo, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023202 (2021)
https://doi.org/10.1116/6.0000770
Published: February 2021
View article titled, Surface wettability of silicon nanopillar array structures fabricated by biotemplate ultimate top-down processes
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Journal Articles

Output density quantification of electricity generation by flowing deionized water on graphene

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Kei Kuriya, Kotaro Ochiai, Golap Kalita, Masaki Tanemura, Atsuki Komiya, Gota Kikugawa, Taku Ohara, Ichiro Yamashita, Fumio S. Ohuchi, M. Meyyappan, Seiji Samukawa, Katsuyoshi Washio, Takeru Okada
Journal: Applied Physics Letters
Appl. Phys. Lett. 117, 123905 (2020)
https://doi.org/10.1063/5.0018862
Published: September 2020
View article titled, Output density quantification of electricity generation by flowing deionized water on graphene
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Journal Articles

Atomic-layer etching of GaN by using an HBr neutral beam

Daisuke Ohori, Takahiro Sawada, Kenta Sugawara, Masaya Okada, Ken Nakata, Kazutaka Inoue, Daisuke Sato, Hideyuki Kurihara, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 032603 (2020)
https://doi.org/10.1116/6.0000126
Published: April 2020
View article titled, Atomic-layer etching of GaN by using an HBr neutral beam
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Journal Articles

Influence of rf sputter power on ZnO film characteristics for transparent memristor devices

Firman Mangasa Simanjuntak, Takeo Ohno, Seiji Samukawa
Journal: AIP Advances
AIP Advances 9, 105216 (2019)
https://doi.org/10.1063/1.5125665
Published: October 2019
View article titled, Influence of rf sputter power on ZnO film characteristics for transparent memristor devices
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Journal Articles

Atomic layer defect-free etching for germanium using HBr neutral beam

Featured
Takuya Fujii, Daisuke Ohori, Shuichi Noda, Yosuke Tanimoto, Daisuke Sato, Hideyuki Kurihara, Wataru Mizubayashi, Kazuhiko Endo, Yiming Li, Yao-Jen Lee, Takuya Ozaki, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051001 (2019)
https://doi.org/10.1116/1.5100547
Published: July 2019
View article titled, Atomic layer defect-free etching for germanium using HBr neutral beam
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Journal Articles

Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam

Editor’s Pick
Daisuke Ohori, Takuya Fujii, Shuichi Noda, Wataru Mizubayashi, Kazuhiko Endo, En-Tzu Lee, Yiming Li, Yao-Jen Lee, Takuya Ozaki, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021003 (2019)
https://doi.org/10.1116/1.5079692
Published: January 2019
View article titled, Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam
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Journal Articles

Temperature-dependent radiative and non-radiative dynamics of photo-excited carriers in extremely high-density and small InGaN nanodisks fabricated by neutral-beam etching using bio-nano-templates

Yafeng Chen, Takayuki Kiba, Junichi Takayama, Akio Higo, Tomoyuki Tanikawa, Shula Chen, Seiji Samukawa, Akihiro Murayama
Journal: Journal of Applied Physics
J. Appl. Phys. 123, 204305 (2018)
https://doi.org/10.1063/1.5027627
Published: May 2018
View article titled, Temperature-dependent radiative and non-radiative dynamics of photo-excited carriers in extremely high-density and small InGaN nanodisks fabricated by neutral-beam etching using bio-nano-templates
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Journal Articles

Nitrogen doping effect on flow-induced voltage generation from graphene-water interface

Takeru Okada, Golap Kalita, Masaki Tanemura, Ichiro Yamashita, M. Meyyappan, Seiji Samukawa
Journal: Applied Physics Letters
Appl. Phys. Lett. 112, 023902 (2018)
https://doi.org/10.1063/1.5007273
Published: January 2018
View article titled, Nitrogen doping effect on flow-induced voltage generation from graphene-water interface
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Journal Articles

Composite films of highly ordered Si nanowires embedded in SiGe0.3 for thermoelectric applications

Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, Seiji Samukawa
Journal: Journal of Applied Physics
J. Appl. Phys. 122, 165302 (2017)
https://doi.org/10.1063/1.4986355
Published: October 2017
View article titled, Composite films of highly ordered Si nanowires embedded in SiGe<sub>0.3</sub> for thermoelectric applications
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Journal Articles

Neutral beam and ICP etching of HKMG MOS capacitors: Observations and a plasma-induced damage model

Tai-Chen Kuo, Tzu-Lang Shih, Yin-Hsien Su, Wen-Hsi Lee, Michael Ira Current, Seiji Samukawa
Journal: Journal of Applied Physics
J. Appl. Phys. 123, 161517 (2018)
https://doi.org/10.1063/1.4985852
Published: October 2017
View article titled, Neutral beam and ICP etching of HKMG MOS capacitors: Observations and a plasma-induced damage model
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Journal Articles

Spin relaxation in Si nanoclusters embedded in free-standing SiGe nanocolumns

N. P. Stepina, A. F. Zinovieva, A. V. Dvurechenskii, Shuichi Noda, Md. Zaman Molla, Seiji Samukawa
Journal: Applied Physics Letters
Appl. Phys. Lett. 110, 203103 (2017)
https://doi.org/10.1063/1.4983644
Published: May 2017
View article titled, Spin relaxation in Si nanoclusters embedded in free-standing SiGe nanocolumns
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Journal Articles

Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon nanowires array

Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, Seiji Samukawa
Journal: Applied Physics Letters
Appl. Phys. Lett. 110, 091908 (2017)
https://doi.org/10.1063/1.4977778
Published: March 2017
View article titled, Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon nanowires array
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Journal Articles

Fabrication of germanium nanodisk array by neutral beam etching with protein as etching mask

Takuya Fujii, Takeru Okada, Taiga Isoda, Mohd Erman Syazwan, Mohamed-Tahar Chentir, Kohei M. Itoh, Ichiro Yamashita, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 021801 (2017)
https://doi.org/10.1116/1.4976524
Published: February 2017
View article titled, Fabrication of germanium nanodisk array by neutral beam etching with protein as etching mask
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Journal Articles

Al and Ge simultaneous oxidation using neutral beam post-oxidation for formation of gate stack structures

Takeo Ohno, Daiki Nakayama, Seiji Samukawa
Journal: Applied Physics Letters
Appl. Phys. Lett. 107, 133107 (2015)
https://doi.org/10.1063/1.4932385
Published: September 2015
View article titled, Al and Ge simultaneous oxidation using neutral beam post-oxidation for formation of gate stack structures
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Journal Articles

Resistive switching in a few nanometers thick tantalum oxide film formed by a metal oxidation

Takeo Ohno, Seiji Samukawa
Journal: Applied Physics Letters
Appl. Phys. Lett. 106, 173110 (2015)
https://doi.org/10.1063/1.4919724
Published: April 2015
View article titled, Resistive switching in a few nanometers thick tantalum oxide film formed by a metal oxidation
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Journal Articles

Impact of artificial lateral quantum confinement on exciton-spin relaxation in a two-dimensional GaAs electronic system

Takayuki Kiba, Toru Tanaka, Yosuke Tamura, Akio Higo, Cedric Thomas, Seiji Samukawa, Akihiro Murayama
Journal: AIP Advances
AIP Advances 4, 107112 (2014)
https://doi.org/10.1063/1.4897958
Published: October 2014
View article titled, Impact of artificial lateral quantum confinement on exciton-spin relaxation in a two-dimensional GaAs electronic system
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Journal Articles

Simulation study of type-II Ge/Si quantum dot for solar cell applications

Weiguo Hu, Mohammad Maksudur Rahman, Ming-Yi Lee, Yiming Li, Seiji Samukawa
Journal: Journal of Applied Physics
J. Appl. Phys. 114, 124509 (2013)
https://doi.org/10.1063/1.4821114
Published: September 2013
View article titled, Simulation study of type-II Ge/Si quantum dot for solar cell applications
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