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Se-Jin Oh
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Journal Articles

Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths

Se-Jin Oh, Chang-Gil Son, Min-kyu Sohn, Doug-Yong Sung, Min-Sung Kim, Ji-Soo Im, Sang Ki Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052204 (2023)
https://doi.org/10.1116/6.0002890
Published: September 2023
View article titled, Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths
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Journal Articles

Improving detection of plasma etching end point using light compensation on optical emission spectra

Se-Jin Oh, Doug-Yong Sung, Jung-Min Ko, Sang Ki Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052206 (2022)
https://doi.org/10.1116/6.0002009
Published: September 2022
View article titled, Improving detection of plasma etching end point using light compensation on optical emission spectra
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Journal Articles

Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch

Se-Jin Oh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 044201 (2022)
https://doi.org/10.1116/6.0001883
Published: May 2022
View article titled, Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch
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Journal Articles

Measurement of sheath thickness at a floating potential

Hyung-Sik Han, Hyo-Chang Lee, Se-Jin Oh, Chin-Wook Chung
Journal: Physics of Plasmas
Phys. Plasmas 21, 023512 (2014)
https://doi.org/10.1063/1.4866015
Published: February 2014
View article titled, Measurement of sheath thickness at a floating potential
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Journal Articles

Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas

Young-Cheol Kim, Sung-Ho Jang, Se-Jin Oh, Hyo-Chang Lee, Chin-Wook Chung
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 84, 053505 (2013)
https://doi.org/10.1063/1.4802673
Published: May 2013
View article titled, Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas
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Journal Articles

Electrical test method using high density plasmas for high-end printed circuit boards

Se-Jin Oh, Young-Cheol Kim, Chin-Wook Chung
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 83, 013503 (2012)
https://doi.org/10.1063/1.3676162
Published: January 2012
View article titled, Electrical test method using high density plasmas for high-end printed circuit boards
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Journal Articles

Measurement of the sheath capacitance of a planar probe

Se-Jin Oh, Young-Kwang Lee, Chin-Wook Chung
Journal: Physics of Plasmas
Phys. Plasmas 18, 103511 (2011)
https://doi.org/10.1063/1.3646476
Published: October 2011
View article titled, Measurement of the sheath capacitance of a planar probe
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Journal Articles

Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures

Se-Jin Oh, Young-Chul Kim, Chin-Wook Chung
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 82, 026107 (2011)
https://doi.org/10.1063/1.3553008
Published: February 2011
View article titled, Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures
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Journal Articles

Radio frequency-compensated Langmuir probe with auxiliary double probes

Se-Jin Oh, Seung-Ju Oh, Chin-Wook Chung
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 81, 093501 (2010)
https://doi.org/10.1063/1.3478338
Published: September 2010
View article titled, Radio frequency-compensated Langmuir probe with auxiliary double probes
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Journal Articles

Measurement of electron temperature and ion density using the self-bias effect in plasmas

Kwang-Tae Hwang, Se-Jin Oh, Ik-Jin Choi, Chin-Wook Chung
Journal: Physics of Plasmas
Phys. Plasmas 17, 063501 (2010)
https://doi.org/10.1063/1.3430632
Published: June 2010
View article titled, Measurement of electron temperature and ion density using the self-bias effect in plasmas
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Journal Articles

New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges

Se-Jin Oh, Sung-Ho Jang, Young-Cheol Kim, Chin-Wook Chung
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 81, 053503 (2010)
https://doi.org/10.1063/1.3427220
Published: May 2010
View article titled, New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges
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