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Journal Articles

Efficient electron heating in short-pulsed magnetron discharges

Sang-Hun Seo, Jung-Hwan In, Hong-Young Chang
Journal: Journal of Applied Physics
J. Appl. Phys. 98, 083302 (2005)
https://doi.org/10.1063/1.2102072
Published: October 2005
View article titled, Efficient electron heating in short-pulsed magnetron discharges
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Journal Articles

Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Sang-Hun Seo, Jung-Hwan In, Hong-Young Chang, Jeon-Geon Han
Journal: Journal of Applied Physics
J. Appl. Phys. 98, 043301 (2005)
https://doi.org/10.1063/1.1990264
Published: August 2005
View article titled, Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge
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Journal Articles

Effect of duty cycle on plasma parameters in the pulsed dc magnetron argon discharge

Sang-Hun Seo, Jung-Hwan In, Hong-Young Chang, Jeon-Geon Han
Journal: Applied Physics Letters
Appl. Phys. Lett. 86, 262103 (2005)
https://doi.org/10.1063/1.1946900
Published: June 2005
View article titled, Effect of duty cycle on plasma parameters in the pulsed dc magnetron argon discharge
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Journal Articles

Characterization of pulsed plasma in unbalanced magnetron argon discharge

Sang-Won Lee, Sang-Hun Seo, Jung-Hwan In, Chin-Wook Chung, Hong-Young Chang
Journal: Physics of Plasmas
Phys. Plasmas 12, 063502 (2005)
https://doi.org/10.1063/1.1924709
Published: June 2005
View article titled, Characterization of pulsed plasma in unbalanced magnetron argon discharge
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Journal Articles

Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge

Sang-Hun Seo, Jung-Hwan In, Hong-Young Chang
Journal: Journal of Applied Physics
J. Appl. Phys. 97, 023305 (2005)
https://doi.org/10.1063/1.1834709
Published: December 2004
View article titled, Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge
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Journal Articles

Effects of substrate bias on electron energy distribution in magnetron sputtering system

Sang-Hun Seo, Jung-Hwan In, Hong-Young Chang, Jeon-Geon Han
Journal: Physics of Plasmas
Phys. Plasmas 11, 4796–4800 (2004)
https://doi.org/10.1063/1.1786592
Published: October 2004
View article titled, Effects of substrate bias on electron energy distribution in magnetron sputtering system
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Journal Articles

Electron transport in the downstream region of planar unbalanced magnetron discharge

Sang-Hun Seo, Hong-Young Chang
Journal: Journal of Applied Physics
J. Appl. Phys. 96, 1310–1317 (2004)
https://doi.org/10.1063/1.1767620
Published: August 2004
View article titled, Electron transport in the downstream region of planar unbalanced magnetron discharge
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Journal Articles

Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges

Sang-Hun Seo, Jung-Hwan In, Hong-Young Chang
Journal: Journal of Applied Physics
J. Appl. Phys. 96, 57–64 (2004)
https://doi.org/10.1063/1.1755850
Published: July 2004
View article titled, Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges
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Journal Articles

Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Sang-Hun Seo, Hong-Young Chang
Journal: Physics of Plasmas
Phys. Plasmas 11, 3595–3601 (2004)
https://doi.org/10.1063/1.1759629
Published: July 2004
View article titled, Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge
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Journal Articles

The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma

ChinWook Chung, Sang-Hun Seo, Hong-Young Chang
Journal: Physics of Plasmas
Phys. Plasmas 7, 3584–3587 (2000)
https://doi.org/10.1063/1.1286804
Published: September 2000
View article titled, The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma
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Journal Articles

Evolution of the electron energy distribution function in a planar inductive argon discharge

Sang-Hun Seo, S. S. Kim, Jung-In Hong, C. S. Chang, Hong-Young Chang
Journal: Applied Physics Letters
Appl. Phys. Lett. 76, 149–151 (2000)
https://doi.org/10.1063/1.125685
Published: January 2000
View article titled, Evolution of the electron energy distribution function in a planar inductive argon discharge
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Journal Articles

Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen

Sang-Hun Seo, Jung-In Hong, Hong-Young Chang
Journal: Applied Physics Letters
Appl. Phys. Lett. 74, 2776–2778 (1999)
https://doi.org/10.1063/1.124010
Published: May 1999
View article titled, Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen
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Journal Articles

On the heating mode transition in high-frequency inductively coupled argon discharge

Sang-Hun Seo, Jung-In Hong, Keun-Hee Bai, Hong-Young Chang
Journal: Physics of Plasmas
Phys. Plasmas 6, 614–618 (1999)
https://doi.org/10.1063/1.873206
Published: February 1999
View article titled, On the heating mode transition in high-frequency inductively coupled argon discharge
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Journal Articles

The deposition of SiOF film with low dielectric constant in a helicon plasma source

Jung‐Hyung Kim, Sang‐Hun Seo, Seok‐Min Yun, Hong‐Young Chang, Kwang‐Man Lee, Chi‐Kyu Choi
Journal: Applied Physics Letters
Appl. Phys. Lett. 68, 1507–1509 (1996)
https://doi.org/10.1063/1.115681
Published: March 1996
View article titled, The deposition of SiOF film with low dielectric constant in a helicon plasma source
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