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    1-2 of 2
    Robert C. Oehrle
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    Journal Articles

    Nondestructive characterization of multilayer structures by resonant attenuated total reflection spectroscopy

    Bruno Bosacchi, Robert C. Oehrle, Eric Grosse
    Journal: Applied Physics Letters
    Appl. Phys. Lett. 51, 158–160 (1987)
    https://doi.org/10.1063/1.98907
    Published: July 1987
    Abstract
    View articletitled, Nondestructive characterization of multilayer structures by resonant attenuated total reflection spectroscopy
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    Proceedings Papers

    Resonant ATR spectroscopy in semiconductor technology

    Bruno Bosacchi, Robert C. Oehrle
    Abstract
    View Paper titled, Resonant ATR spectroscopy in semiconductor technology
    Open the PDF for Resonant ATR spectroscopy in semiconductor technology in another window

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