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Raghuveer S. Makala
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Journal Articles

Extending area selective deposition of ruthenium onto 3D SiO2-Si multilayer stacks

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Kartik Sondhi, Rahul Sharangpani, Roshan Tirukkonda, Joyeeta Nag, Xing-Cai Guo, Michael A. Gribelyuk, Raghuveer S. Makala, Senaka Kanakamedala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 050402 (2023)
https://doi.org/10.1116/6.0002860
Published: August 2023
View articletitled, Extending area selective deposition of ruthenium onto 3D SiO2-Si multilayer stacks
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Includes: Supplementary data
Journal Articles

Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling

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Roshan J. Tirukkonda, Mark D. Kraman, Rahul Sharangpani, Kartik Sondhi, Aaron N. Fancher, Stephen R. Ross, Joyeeta Nag, Alexei L. Bogdanov, Raghuveer S. Makala, Senaka K. Kanakamedala
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 043202 (2023)
https://doi.org/10.1116/6.0002709
Published: June 2023
View articletitled, Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling
Open the PDF for Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling in another window
Includes: Supplementary data
Journal Articles

Area selective deposition of ruthenium on 3D structures

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Kartik Sondhi, Rahul Sharangpani, Ramy Nashed Bassely Said, Joyeeta Nag, Michael Gribelyuk, Senaka Kanakamedala, Raghuveer S. Makala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062412 (2022)
https://doi.org/10.1116/6.0002148
Published: November 2022
View articletitled, Area selective deposition of ruthenium on 3D structures
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Includes: Supplementary data
Journal Articles

Thermal atomic layer etching of amorphous and crystalline Al2O3 films

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Jessica A. Murdzek, Adarsh Rajashekhar, Raghuveer S. Makala, Steven M. George
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 042602 (2021)
https://doi.org/10.1116/6.0000995
Published: June 2021
View articletitled, Thermal atomic layer etching of amorphous and crystalline Al2O3 films
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Journal Articles

Pulsed laser deposition of Bi 2 Te 3 -based thermoelectric thin films

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Raghuveer S. Makala, K. Jagannadham, B. C. Sales
Journal: Journal of Applied Physics
J. Appl. Phys. 94, 3907–3918 (2003)
https://doi.org/10.1063/1.1600524
Published: September 2003
View articletitled, Pulsed laser deposition of Bi 2 Te 3 -based thermoelectric thin films
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