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R. L. Van Meirhaeghe
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Journal Articles

Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

K. De Keyser, C. Van Bockstael, R. L. Van Meirhaeghe, C. Detavernier, E. Verleysen, H. Bender, W. Vandervorst, J. Jordan-Sweet, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 96, 173503 (2010)
https://doi.org/10.1063/1.3384997
Published: April 2010
View article titled, Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
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Journal Articles

In situ x-ray diffraction study of Ni–Yb interlayer and alloy systems on Si(100)

W. Knaepen, J. Demeulemeester, J. Jordan-Sweet, A. Vantomme, C. Detavernier, R. L. Van Meirhaeghe, C. Lavoie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 20–26 (2010)
https://doi.org/10.1116/1.3259875
Published: November 2009
View article titled, <em>In situ</em> x-ray diffraction study of Ni–Yb interlayer and alloy systems on Si(100)
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Journal Articles

In situ study of the formation of silicide phases in amorphous Ni–Si mixed layers

C. Van Bockstael, C. Detavernier, R. L. Van Meirhaeghe, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 106, 064515 (2009)
https://doi.org/10.1063/1.3194318
Published: September 2009
View article titled, <em>In situ</em> study of the formation of silicide phases in amorphous Ni–Si mixed layers
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Journal Articles

In situ x-ray diffraction study of metal induced crystallization of amorphous germanium

W. Knaepen, S. Gaudet, C. Detavernier, R. L. Van Meirhaeghe, J. Jordan Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 105, 083532 (2009)
https://doi.org/10.1063/1.3110722
Published: April 2009
View article titled, <em>In situ</em> x-ray diffraction study of metal induced crystallization of amorphous germanium
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Journal Articles

Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films

C. Van Bockstael, K. De Keyser, R. L. Van Meirhaeghe, C. Detavernier, J. L. Jordan-Sweet, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 94, 033504 (2009)
https://doi.org/10.1063/1.3073750
Published: January 2009
View article titled, Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films
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Journal Articles

Formation and stability of NiSi in the presence of Co and Fe alloying elements

D. Deduytsche, C. Detavernier, R. L. Van Meirhaeghe, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1971–1977 (2008)
https://doi.org/10.1116/1.3010719
Published: November 2008
View article titled, Formation and stability of NiSi in the presence of Co and Fe alloying elements
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Journal Articles

Effect of Pt addition on growth stress and thermal stress of NiSi films

C. Van Bockstael, K. De Keyser, D. Deduytsche, R. L. Van Meirhaeghe, C. Detavernier, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 104, 053510 (2008)
https://doi.org/10.1063/1.2973679
Published: September 2008
View article titled, Effect of Pt addition on growth stress and thermal stress of NiSi films
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Journal Articles

Study of metal-related deep-level defects in germanide Schottky barriers on n -type germanium

E. Simoen, K. Opsomer, C. Claeys, K. Maex, C. Detavernier, R. L. Van Meirhaeghe, P. Clauws
Journal: Journal of Applied Physics
J. Appl. Phys. 104, 023705 (2008)
https://doi.org/10.1063/1.2956708
Published: July 2008
View article titled, Study of metal-related deep-level defects in germanide Schottky barriers on n -type germanium
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Journal Articles

Growth of pinhole-free ytterbium silicide film by solid-state reaction on Si(001) with a thin amorphous Si interlayer

Yu-Long Jiang, Qi Xie, Christophe Detavernier, R. L. Van Meirhaeghe, Guo-Ping Ru, Xin-Ping Qu, Bing-Zong Li, Paul K. Chu
Journal: Journal of Applied Physics
J. Appl. Phys. 102, 033508 (2007)
https://doi.org/10.1063/1.2767375
Published: August 2007
View article titled, Growth of pinhole-free ytterbium silicide film by solid-state reaction on Si(001) with a thin amorphous Si interlayer
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Journal Articles

Characterization of the texture of silicide films using electron backscattered diffraction

K. De Keyser, C. Detavernier, R. L. Van Meirhaeghe
Journal: Applied Physics Letters
Appl. Phys. Lett. 90, 121920 (2007)
https://doi.org/10.1063/1.2716362
Published: March 2007
View article titled, Characterization of the texture of silicide films using electron backscattered diffraction
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Journal Articles

Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors

W. P. Leroy, C. Detavernier, R. L. Van Meirhaeghe, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 101, 053714 (2007)
https://doi.org/10.1063/1.2561173
Published: March 2007
View article titled, Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors
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Journal Articles

Formation and morphological stability of NiSi in the presence of W , Ti , and Ta alloying elements

D. Deduytsche, C. Detavernier, R. L. Van Meirhaeghe, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 101, 044508 (2007)
https://doi.org/10.1063/1.2433133
Published: February 2007
View article titled, Formation and morphological stability of NiSi in the presence of W , Ti , and Ta alloying elements
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Journal Articles

Oxidation suppression in ytterbium silicidation by Ti ∕ Ti N bicapping layer

Yu-Long Jiang, Qi Xie, Christophe Detavernier, R. L. Van Meirhaeghe, Guo-Ping Ru, Xin-Ping Qu, Bing-Zong Li, Anping Huang, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 285–289 (2007)
https://doi.org/10.1116/1.2464123
Published: February 2007
View article titled, Oxidation suppression in ytterbium silicidation by Ti ∕ Ti N bicapping layer
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Journal Articles

Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions

K. Opsomer, D. Deduytsche, C. Detavernier, R. L. Van Meirhaeghe, A. Lauwers, K. Maex, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 90, 031906 (2007)
https://doi.org/10.1063/1.2431781
Published: January 2007
View article titled, Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions
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Journal Articles

Deep level transient spectroscopy study of Pd and Pt sputtering damage in n -type germanium

E. Simoen, K. Opsomer, C. Claeys, K. Maex, C. Detavernier, R. L. Van Meirhaeghe, P. Clauws
Journal: Applied Physics Letters
Appl. Phys. Lett. 89, 202114 (2006)
https://doi.org/10.1063/1.2388869
Published: November 2006
View article titled, Deep level transient spectroscopy study of Pd and Pt sputtering damage in n -type germanium
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Journal Articles

Deep level transient spectroscopy study of nickel-germanide Schottky barriers on n -type germanium

E. Simoen, K. Opsomer, C. Claeys, K. Maex, C. Detavernier, R. L. Van Meirhaeghe, S. Forment, P. Clauws
Journal: Applied Physics Letters
Appl. Phys. Lett. 88, 183506 (2006)
https://doi.org/10.1063/1.2199615
Published: May 2006
View article titled, Deep level transient spectroscopy study of nickel-germanide Schottky barriers on n -type germanium
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Journal Articles

Solid-state formation of titanium carbide and molybdenum carbide as contacts for carbon-containing semiconductors

W. P. Leroy, C. Detavernier, R. L. Van Meirhaeghe, A. J. Kellock, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 99, 063704 (2006)
https://doi.org/10.1063/1.2180436
Published: March 2006
View article titled, Solid-state formation of titanium carbide and molybdenum carbide as contacts for carbon-containing semiconductors
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Journal Articles

High-temperature degradation of NiSi films: Agglomeration versus Ni Si 2 nucleation

D. Deduytsche, C. Detavernier, R. L. Van Meirhaeghe, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 98, 033526 (2005)
https://doi.org/10.1063/1.2005380
Published: August 2005
View article titled, High-temperature degradation of NiSi films: Agglomeration versus Ni Si 2 nucleation
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Journal Articles

Low-temperature formation of CoSi 2 in the presence of Au

C. Detavernier, C. Lavoie, F. M. d’Heurle, H. Bender, R. L. Van Meirhaeghe
Journal: Journal of Applied Physics
J. Appl. Phys. 95, 5340–5346 (2004)
https://doi.org/10.1063/1.1691180
Published: May 2004
View article titled, Low-temperature formation of CoSi 2 in the presence of Au
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Journal Articles

Blue electroluminescence from multilayered BaS:Eu/Al 2 S 3 thin films

P. F. Smet, D. Poelman, R. L. Van Meirhaeghe
Journal: Journal of Applied Physics
J. Appl. Phys. 95, 184–190 (2004)
https://doi.org/10.1063/1.1630372
Published: January 2004
View article titled, Blue electroluminescence from multilayered BaS:Eu/Al 2 S 3 thin films
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