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Journal Articles

Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al₂O₃

M. A. Mione, R. Engeln, V. Vandalon, W. M. M. Kessels, F. Roozeboom

Appl. Phys. Lett. 115, 083101 (2019)

https://doi.org/10.1063/1.5113753

Published: August 2019

View articletitled, Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3

Includes: Supplementary data

Journal Articles

Detection of rovibrationally excited molecular hydrogen in the electronic ground state via synchrotron radiation

S. Béchu, S. Aleiferis, J. Bentounes, L. Gavilan, V. A. Shakhatov, A. Bès, P. Svarnas, S. Mazouffre, N. de Oliviera, R. Engeln, J. L. Lemaire

Appl. Phys. Lett. 111, 074103 (2017)

https://doi.org/10.1063/1.4985617

Published: August 2017

View articletitled, Detection of rovibrationally excited molecular hydrogen in the electronic ground state via synchrotron radiation

Journal Articles

Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

Y. Liu, S. Welzel, S. A. Starostin, M. C. M. van de Sanden, R. Engeln, H. W. de Vries

J. Appl. Phys. 121, 243301 (2017)

https://doi.org/10.1063/1.4985619

Published: June 2017

View articletitled, Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

Journal Articles

Fluid modelling of CO₂ dissociation in a dielectric barrier discharge

S. Ponduri, M. M. Becker, S. Welzel, M. C. M. van de Sanden, D. Loffhagen, R. Engeln

J. Appl. Phys. 119, 093301 (2016)

https://doi.org/10.1063/1.4941530

Published: March 2016

View articletitled, Fluid modelling of CO2 dissociation in a dielectric barrier discharge

Journal Articles

A time-resolved imaging and electrical study on a high current atmospheric pressure spark discharge

J. M. Palomares, A. Kohut, G. Galbács, R. Engeln, Zs. Geretovszky

J. Appl. Phys. 118, 233305 (2015)

https://doi.org/10.1063/1.4937729

Published: December 2015

View articletitled, A time-resolved imaging and electrical study on a high current atmospheric pressure spark discharge

Journal Articles

Note: Rotational Raman scattering on CO₂ plasma using a volume Bragg grating as a notch filter

B. L. M. Klarenaar, F. Brehmer, S. Welzel, H. J. van der Meiden, M. C. M. van de Sanden, R. Engeln

Rev. Sci. Instrum. 86, 046106 (2015)

https://doi.org/10.1063/1.4918730

Published: April 2015

View articletitled, Note: Rotational Raman scattering on CO2 plasma using a volume Bragg grating as a notch filter

Journal Articles

CO and byproduct formation during CO₂ reduction in dielectric barrier discharges

F. Brehmer, S. Welzel, M. C. M. van de Sanden, R. Engeln

J. Appl. Phys. 116, 123303 (2014)

https://doi.org/10.1063/1.4896132

Published: September 2014

View articletitled, CO and byproduct formation during CO2 reduction in dielectric barrier discharges

Journal Articles

Synergistic etch rates during low-energetic plasma etching of hydrogenated amorphous carbon

T. A. R. Hansen, J. W. Weber, P. G. J. Colsters, D. M. H. G. Mestrom, M. C. M. van de Sanden, R. Engeln

J. Appl. Phys. 112, 013302 (2012)

https://doi.org/10.1063/1.4730924

Published: July 2012

View articletitled, Synergistic etch rates during low-energetic plasma etching of hydrogenated amorphous carbon

Journal Articles

Production of negative ions on graphite surface in H₂/D₂ plasmas: Experiments and srim calculations

G. Cartry, L. Schiesko, C. Hopf, A. Ahmad, M Carrère, J. M. Layet, P. Kumar, R. Engeln

Phys. Plasmas 19, 063503 (2012)

https://doi.org/10.1063/1.4725188

Published: June 2012

View articletitled, Production of negative ions on graphite surface in H2/D2 plasmas: Experiments and srim calculations

Journal Articles

Nonequilibrium rovibrational energy distributions of hydrogen isotopologues in an expanding plasma jet

O. Gabriel, J. J. A. van den Dungen, D. C. Schram, R. Engeln

J. Chem. Phys. 132, 104305 (2010)

https://doi.org/10.1063/1.3352550

Published: March 2010

View articletitled, Nonequilibrium rovibrational energy distributions of hydrogen isotopologues in an expanding plasma jet

Journal Articles

B-spline parametrization of the dielectric function applied to spectroscopic ellipsometry on amorphous carbon

J. W. Weber, T. A. R. Hansen, M. C. M. van de Sanden, R. Engeln

J. Appl. Phys. 106, 123503 (2009)

https://doi.org/10.1063/1.3257237

Published: December 2009

View articletitled, B-spline parametrization of the dielectric function applied to spectroscopic ellipsometry on amorphous carbon

Journal Articles

Modeling and experiments on differential pumping in linear plasma generators operating at high gas flows

H. J. N. van Eck, W. R. Koppers, G. J. van Rooij, W. J. Goedheer, R. Engeln, D. C. Schram, N. J. Lopes Cardozo, A. W. Kleyn

J. Appl. Phys. 105, 063307 (2009)

https://doi.org/10.1063/1.3086622

Published: March 2009

View articletitled, Modeling and experiments on differential pumping in linear plasma generators operating at high gas flows

Journal Articles

The Cascaded Arc: High Flows of Rovibrationally Excited H 2 and its Impact on H − Ion Formation

O. Gabriel, W. E. N. van Harskamp, D. C. Schram, M. C. M. van de Sanden, R. Engeln

AIP Conf. Proc. 1097, 22–30 (2009)

https://doi.org/10.1063/1.3112517

Published: March 2009

View articletitled, The Cascaded Arc: High Flows of Rovibrationally Excited H 2 and its Impact on H − Ion Formation

Journal Articles

Trace gas measurements using optically resonant cavities and quantum cascade lasers operating at room temperature

S. Welzel, G. Lombardi, P. B. Davies, R. Engeln, D. C. Schram, J. Röpcke

J. Appl. Phys. 104, 093115 (2008)

https://doi.org/10.1063/1.3008014

Published: November 2008

View articletitled, Trace gas measurements using optically resonant cavities and quantum cascade lasers operating at room temperature

Journal Articles

High sensitivity imaging Thomson scattering for low temperature plasma

H. J. van der Meiden, R. S. Al, C. J. Barth, A. J. H. Donné, R. Engeln, W. J. Goedheer, B. de Groot, A. W. Kleyn, W. R. Koppers, N. J. Lopes Cardozo, M. J. van de Pol, P. R. Prins, D. C. Schram, A. E. Shumack, P. H. M. Smeets, W. A. J. Vijvers, J. Westerhout, G. M. Wright, G. J. van Rooij

Rev. Sci. Instrum. 79, 013505 (2008)

https://doi.org/10.1063/1.2832333

Published: January 2008

View articletitled, High sensitivity imaging Thomson scattering for low temperature plasma

Journal Articles

Extreme hydrogen plasma densities achieved in a linear plasma generator

G. J. van Rooij, V. P. Veremiyenko, W. J. Goedheer, B. de Groot, A. W. Kleyn, P. H. M. Smeets, T. W. Versloot, D. G. Whyte, R. Engeln, D. C. Schram, N. J. Lopes Cardozo

Appl. Phys. Lett. 90, 121501 (2007)

https://doi.org/10.1063/1.2716208

Published: March 2007

View articletitled, Extreme hydrogen plasma densities achieved in a linear plasma generator

Journal Articles

Detailed study of the plasma-activated catalytic generation of ammonia in N 2 -H 2 plasmas

J. H. van Helden, W. Wagemans, G. Yagci, R. A. B. Zijlmans, D. C. Schram, R. Engeln, G. Lombardi, G. D. Stancu, J. Röpcke

J. Appl. Phys. 101, 043305 (2007)

https://doi.org/10.1063/1.2645828

Published: February 2007

View articletitled, Detailed study of the plasma-activated catalytic generation of ammonia in N 2 -H 2 plasmas

Journal Articles

N, NH, and N H 2 radical densities in a remote Ar – N H 3 – Si H 4 plasma and their role in silicon nitride deposition

P. J. van den Oever, J. H. van Helden, J. L. van Hemmen, R. Engeln, D. C. Schram, M. C. M. van de Sanden, W. M. M. Kessels

J. Appl. Phys. 100, 093303 (2006)

https://doi.org/10.1063/1.2358330

Published: November 2006

View articletitled, N, NH, and N H 2 radical densities in a remote Ar – N H 3 – Si H 4 plasma and their role in silicon nitride deposition

Journal Articles

In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al 2 O 3

S. B. S. Heil, P. Kudlacek, E. Langereis, R. Engeln, M. C. M. van de Sanden, W. M. M. Kessels

Appl. Phys. Lett. 89, 131505 (2006)

https://doi.org/10.1063/1.2357886

Published: September 2006

View articletitled, In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al 2 O 3

Includes: Supplementary data

Journal Articles

Density and production of NH and N H 2 in an Ar – N H 3 expanding plasma jet

P. J. van den Oever, J. H. van Helden, C. C. H. Lamers, R. Engeln, D. C. Schram, M. C. M. van de Sanden, W. M. M. Kessels

J. Appl. Phys. 98, 093301 (2005)

https://doi.org/10.1063/1.2123371

Published: November 2005

View articletitled, Density and production of NH and N H 2 in an Ar – N H 3 expanding plasma jet

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Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al₂O₃

Detection of rovibrationally excited molecular hydrogen in the electronic ground state via synchrotron radiation

Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

Fluid modelling of CO₂ dissociation in a dielectric barrier discharge

A time-resolved imaging and electrical study on a high current atmospheric pressure spark discharge

Note: Rotational Raman scattering on CO₂ plasma using a volume Bragg grating as a notch filter

CO and byproduct formation during CO₂ reduction in dielectric barrier discharges

Synergistic etch rates during low-energetic plasma etching of hydrogenated amorphous carbon

Production of negative ions on graphite surface in H₂/D₂ plasmas: Experiments and srim calculations

Nonequilibrium rovibrational energy distributions of hydrogen isotopologues in an expanding plasma jet

B-spline parametrization of the dielectric function applied to spectroscopic ellipsometry on amorphous carbon

Modeling and experiments on differential pumping in linear plasma generators operating at high gas flows

The Cascaded Arc: High Flows of Rovibrationally Excited H 2 and its Impact on H − Ion Formation

Trace gas measurements using optically resonant cavities and quantum cascade lasers operating at room temperature

High sensitivity imaging Thomson scattering for low temperature plasma

Extreme hydrogen plasma densities achieved in a linear plasma generator

Detailed study of the plasma-activated catalytic generation of ammonia in N 2 -H 2 plasmas

N, NH, and N H 2 radical densities in a remote Ar – N H 3 – Si H 4 plasma and their role in silicon nitride deposition

In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al 2 O 3

Density and production of NH and N H 2 in an Ar – N H 3 expanding plasma jet

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