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Quan-Zhi Zhang
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Journal Articles

Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Ze-Xuan Liu, Xing-Yu Li, Quan-Zhi Zhang, Julian Schulze, Ruo-Bing Zhang, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053006 (2024)
https://doi.org/10.1116/6.0003745
Published: July 2024
View article titled, Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings
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Journal Articles

Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges

Jing-Yu Sun, Julian Schulze, Fang-Fang Ma, Quan-Zhi Zhang, You-Nian Wang
Journal: Physics of Plasmas
Phys. Plasmas 30, 120702 (2023)
https://doi.org/10.1063/5.0175060
Published: December 2023
View article titled, Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges
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Journal Articles

Enhancing plasma uniformity by employing non-uniform magnetic field modulation in capacitively coupled plasmas

Fang-Fang Ma, Quan-Zhi Zhang, Yu-Meng Cui, You-Nian Wang
Journal: Applied Physics Letters
Appl. Phys. Lett. 123, 202103 (2023)
https://doi.org/10.1063/5.0169640
Published: November 2023
View article titled, Enhancing plasma uniformity by employing non-uniform magnetic field modulation in capacitively coupled plasmas
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Journal Articles

Combined influence of airflows and a parallel magnetic field on the discharge characteristics of AC dielectric barrier discharge

Yu-Ying Wang, Hui-Jie Yan, Ting Li, Xiao-Dong Bai, Xiao Wang, Jian Song, Quan-Zhi Zhang
Journal: AIP Advances
AIP Advances 13, 085327 (2023)
https://doi.org/10.1063/5.0155171
Published: August 2023
View article titled, Combined influence of airflows and a parallel magnetic field on the discharge characteristics of AC dielectric barrier discharge
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Journal Articles

Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors

Fang-Fang Ma, Quan-Zhi Zhang, Dao-Man Han, Zi-Lan Xiong, Ming Gao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053002 (2023)
https://doi.org/10.1116/6.0002585
Published: July 2023
View article titled, Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors
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Journal Articles

Optimization of overshoot in the pulsed radio frequency inductively coupled argon plasma by step waveform modulation

Xiang-Yun Lv, Quan-Zhi Zhang, Ke Jiang, Fei Gao, You-Nian Wang
Journal: Journal of Applied Physics
J. Appl. Phys. 133, 043301 (2023)
https://doi.org/10.1063/5.0130054
Published: January 2023
View article titled, Optimization of overshoot in the pulsed radio frequency inductively coupled argon plasma by step waveform modulation
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Journal Articles

Measurements of surface charge dynamics and surface-breakdown characteristics of surface dielectric barrier discharges

Ting Li, Hui-Jie Yan, Si-Qi Yu, Yu-Ying Wang, Jia-Qi Li, Jian Song, Quan-Zhi Zhang
Journal: Journal of Applied Physics
J. Appl. Phys. 132, 153301 (2022)
https://doi.org/10.1063/5.0102975
Published: October 2022
View article titled, Measurements of surface charge dynamics and surface-breakdown characteristics of surface dielectric barrier discharges
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Journal Articles

Observation of nonlinear sheath oscillations in symmetric capacitive discharges at low pressures

Jing-Yu Sun, Quan-Zhi Zhang, You-Nian Wang
Journal: Physics of Plasmas
Phys. Plasmas 28, 013509 (2021)
https://doi.org/10.1063/5.0022457
Published: January 2021
View article titled, Observation of nonlinear sheath oscillations in symmetric capacitive discharges at low pressures
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Journal Articles

The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials

Jing-Yu Sun, De-Qi Wen, Quan-Zhi Zhang, Yong-Xin Liu, You-Nian Wang
Journal: Physics of Plasmas
Phys. Plasmas 26, 063505 (2019)
https://doi.org/10.1063/1.5094100
Published: June 2019
View article titled, The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials
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Journal Articles

Enhancement of surface discharge in catalyst pores in dielectric barrier discharges

Editor’s Pick
Jian-Guo Gu, Ya Zhang, Ming-Xiang Gao, Hong-Yu Wang, Quan-Zhi Zhang, Lin Yi, Wei Jiang
Journal: Journal of Applied Physics
J. Appl. Phys. 125, 153303 (2019)
https://doi.org/10.1063/1.5082568
Published: April 2019
View article titled, Enhancement of surface discharge in catalyst pores in dielectric barrier discharges
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Journal Articles

Mechanisms for plasma cryogenic etching of porous materials

Quan-Zhi Zhang, Stefan Tinck, Jean-François de Marneffe, Liping Zhang, Annemie Bogaerts
Journal: Applied Physics Letters
Appl. Phys. Lett. 111, 173104 (2017)
https://doi.org/10.1063/1.4999439
Published: October 2017
View article titled, Mechanisms for plasma cryogenic etching of porous materials
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Includes: Supplementary data
Journal Articles

Phase modulation in pulsed dual-frequency capacitively coupled plasmas

De-Qi Wen, Quan-Zhi Zhang, Wei Jiang, Yuan-Hong Song, Annemie Bogaerts, You-Nian Wang
Journal: Journal of Applied Physics
J. Appl. Phys. 115, 233303 (2014)
https://doi.org/10.1063/1.4884225
Published: June 2014
View article titled, Phase modulation in pulsed dual-frequency capacitively coupled plasmas
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Journal Articles

Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 discharge

Quan-Zhi Zhang, You-Nian Wang, Annemie Bogaerts
Journal: Journal of Applied Physics
J. Appl. Phys. 115, 223302 (2014)
https://doi.org/10.1063/1.4882297
Published: June 2014
View article titled, Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled <em>CF</em><sub>4</sub> discharge
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Journal Articles

Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas

Yong-Xin Liu, Quan-Zhi Zhang, Jia Liu, Yuan-Hong Song, Annemie Bogaerts, You-Nian Wang
Journal: Applied Physics Letters
Appl. Phys. Lett. 101, 114101 (2012)
https://doi.org/10.1063/1.4751984
Published: September 2012
View article titled, Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas
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Journal Articles

Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge

Quan-Zhi Zhang, Wei Jiang, Lu-Jing Hou, You-Nian Wang
Journal: Journal of Applied Physics
J. Appl. Phys. 109, 013308 (2011)
https://doi.org/10.1063/1.3530626
Published: January 2011
View article titled, Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge
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Journal Articles

Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources

Quan-Zhi Zhang, Wei Jiang, Shu-Xia Zhao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 287–292 (2010)
https://doi.org/10.1116/1.3305537
Published: February 2010
View article titled, Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
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