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Paul F. Nealey
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Journal Articles

High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers

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Kyunghyeon Lee, Emma Vargo, Christopher Eom, Ricardo Ruiz, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062804 (2024)
https://doi.org/10.1116/6.0004046
Published: October 2024
View articletitled, High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers
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Journal Articles

Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores

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Wen Chen, Soonmin Yim, Nestor J. Zaluzec, Gordon S. W. Craig, Seth B. Darling, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062803 (2024)
https://doi.org/10.1116/6.0004050
Published: October 2024
View articletitled, Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores
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Journal Articles

Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

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Elizabeth M. Ashley, Peter J. Duda, III, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064005 (2021)
https://doi.org/10.1116/6.0001287
Published: October 2021
View articletitled, Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution
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Includes: Supplementary data
Journal Articles

Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications

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Moshe Dolejsi, Priya Moni, Cody T. Bezik, Chun Zhou, Juan J. de Pablo, Karen K. Gleason, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061804 (2019)
https://doi.org/10.1116/1.5121541
Published: October 2019
View articletitled, Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications
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Journal Articles

Ellipsometry-based combination of isothermal sorption-desorption measurement and temperature programmed desorption technique: A probe for interaction of thin polymer films with solvent vapor

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Mikhail Yu. Efremov, Paul F. Nealey
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 89, 055114 (2018)
https://doi.org/10.1063/1.5021269
Published: May 2018
View articletitled, Ellipsometry-based combination of isothermal sorption-desorption measurement and temperature programmed desorption technique: A probe for interaction of thin polymer films with solvent vapor
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Includes: Supplementary data
Journal Articles

Creating periodic local strain in monolayer graphene with nanopillars patterned by self-assembled block copolymer

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Hongyi Mi, Solomon Mikael, Chi-Chun Liu, Jung-Hun Seo, Gui Gui, Alice L. Ma, Paul F. Nealey, Zhenqiang Ma
Journal: Applied Physics Letters
Appl. Phys. Lett. 107, 143107 (2015)
https://doi.org/10.1063/1.4932657
Published: October 2015
View articletitled, Creating periodic local strain in monolayer graphene with nanopillars patterned by self-assembled block copolymer
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Journal Articles

Communication: SHG-detected circular dichroism imaging using orthogonal phase-locked laser pulses

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Jeremy W. Jarrett, Xiaoying Liu, Paul F. Nealey, Richard A. Vaia, Giulio Cerullo, Kenneth L. Knappenberger, Jr.
Journal: The Journal of Chemical Physics
J. Chem. Phys. 142, 151101 (2015)
https://doi.org/10.1063/1.4918972
Published: April 2015
View articletitled, Communication: SHG-detected circular dichroism imaging using orthogonal phase-locked laser pulses
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Journal Articles

Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns

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Ling-Shu Wan, Paulina A. Rincon Delgadillo, Roel Gronheid, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F301 (2013)
https://doi.org/10.1116/1.4818882
Published: September 2013
View articletitled, Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
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Journal Articles

Fabrication of large-area, high-density Ni nanopillar arrays on GaAs substrates using diblock copolymer lithography and electrodeposition

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Chun-Chieh Chang, Dan Botez, Lei Wan, Paul F. Nealey, Steven Ruder, Thomas F. Kuech
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031801 (2013)
https://doi.org/10.1116/1.4798464
Published: April 2013
View articletitled, Fabrication of large-area, high-density Ni nanopillar arrays on GaAs substrates using diblock copolymer lithography and electrodeposition
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Journal Articles

Demonstration of glass transition temperature shift in thin supported polystyrene films by internal reference method

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Mikhail Yu. Efremov, Christopher Thode, Paul F. Nealey
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 84, 023905 (2013)
https://doi.org/10.1063/1.4793226
Published: February 2013
View articletitled, Demonstration of glass transition temperature shift in thin supported polystyrene films by internal reference method
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Includes: Supplementary data
Journal Articles

Mechanical properties of polymeric nanostructures fabricated through directed self-assembly of symmetric diblock and triblock copolymers

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Sean P. Delcambre, Shengxiang Ji, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F204 (2012)
https://doi.org/10.1116/1.4766916
Published: November 2012
View articletitled, Mechanical properties of polymeric nanostructures fabricated through directed self-assembly of symmetric diblock and triblock copolymers
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Journal Articles

Arrays of topographically and peptide-functionalized hydrogels for analysis of biomimetic extracellular matrix properties

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Michelle J. Wilson, Yaming Jiang, Bernardo Yañez-Soto, Sara Liliensiek, William L. Murphy, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F903 (2012)
https://doi.org/10.1116/1.4762842
Published: October 2012
View articletitled, Arrays of topographically and peptide-functionalized hydrogels for analysis of biomimetic extracellular matrix properties
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Includes: Supplementary data
Journal Articles

Planar-localized surface plasmon resonance device by block-copolymer and nanoimprint lithography fabrication methods

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C. Y. Peter Yang, Elaine L. Yang, Chip A. Steinhaus, Chi-Chun Liu, Paul F. Nealey, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 026801 (2012)
https://doi.org/10.1116/1.3683475
Published: February 2012
View articletitled, Planar-localized surface plasmon resonance device by block-copolymer and nanoimprint lithography fabrication methods
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Journal Articles

Fabrication of chevron patterns for patterned media with block copolymer directed assembly

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Guoliang Liu, Paul F. Nealey, Ricardo Ruiz, Elizabeth Dobisz, Kanaiyalal C. Patel, Thomas R. Albrecht
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F204 (2011)
https://doi.org/10.1116/1.3650697
Published: October 2011
View articletitled, Fabrication of chevron patterns for patterned media with block copolymer directed assembly
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Journal Articles

Towards an all-track 300 mm process for directed self-assembly

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Chi-Chun Liu, Christopher J. Thode, Paulina A. Rincon Delgadillo, Gordon S. W. Craig, Paul F. Nealey, Roel Gronheid
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F203 (2011)
https://doi.org/10.1116/1.3644341
Published: October 2011
View articletitled, Towards an all-track 300 mm process for directed self-assembly
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Journal Articles

Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns

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Huiman Kang, Francois Detcheverry, Karl O. Stuen, Gordon S. W. Craig, Juan J. de Pablo, Padma Gopalan, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6B24–C6B29 (2010)
https://doi.org/10.1116/1.3518910
Published: November 2010
View articletitled, Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns
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Journal Articles

Integration of block copolymer directed assembly with 193 immersion lithography

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Chi-Chun Liu, Paul F. Nealey, Alex K. Raub, Philip J. Hakeem, Steve R. J. Brueck, Eungnak Han, Padma Gopalan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6B30–C6B34 (2010)
https://doi.org/10.1116/1.3501348
Published: November 2010
View articletitled, Integration of block copolymer directed assembly with 193 immersion lithography
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Journal Articles

Mechanism and dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces

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Guoliang Liu, Sean P. Delcambre, Karl O. Stuen, Gordon S. W. Craig, Juan J. de Pablo, Paul F. Nealey, Kim Nygård, Dillip K. Satapathy, Oliver Bunk, Harun H. Solak
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6B13–C6B19 (2010)
https://doi.org/10.1116/1.3518918
Published: November 2010
View articletitled, Mechanism and dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces
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Journal Articles

Control of the critical dimensions and line edge roughness with pre-organized block copolymer pixelated photoresists

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Huiman Kang, Yun Jun Kim, Padma Gopalan, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2993–2997 (2009)
https://doi.org/10.1116/1.3256632
Published: December 2009
View articletitled, Control of the critical dimensions and line edge roughness with pre-organized block copolymer pixelated photoresists
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Journal Articles

Modification of a polystyrene brush layer by insertion of poly(methyl methacrylate) molecules

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Guoliang Liu, Shengxiang Ji, Karl O. Stuen, Gordon S. W. Craig, Paul F. Nealey, F. J. Himpsel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 3038–3042 (2009)
https://doi.org/10.1116/1.3253607
Published: December 2009
View articletitled, Modification of a polystyrene brush layer by insertion of poly(methyl methacrylate) molecules
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