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Journal Articles

Zinc sulfide chemical vapor deposition optical ceramic analyzed by XPS

Brian Butkus, Alexandros Kostogiannes, Andrew Howe, Myungkoo Kang, Romain Gaume, Kathleen A. Richardson, Parag Banerjee
Journal: Surface Science Spectra
Surf. Sci. Spectra 30, 024019 (2023)
https://doi.org/10.1116/6.0002777
Published: September 2023
View article titled, Zinc sulfide chemical vapor deposition optical ceramic analyzed by XPS
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Includes: Supplementary data
Journal Articles

Calcium sulfide powder analyzed by XPS

Brian Butkus, Matthew Havel, Alexandros Kostogiannes, Andrew Howe, Myungkoo Kang, Romain Gaume, Kathleen A. Richardson, Parag Banerjee
Journal: Surface Science Spectra
Surf. Sci. Spectra 30, 014005 (2023)
https://doi.org/10.1116/6.0002304
Published: February 2023
View article titled, Calcium sulfide powder analyzed by XPS
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Includes: Supplementary data
Journal Articles

Lanthanum sulfide powder analyzed by XPS

Brian Butkus, Matthew Havel, Alexandros Kostogiannes, Andrew Howe, Myungkoo Kang, Romain Gaume, Kathleen A. Richardson, Parag Banerjee
Journal: Surface Science Spectra
Surf. Sci. Spectra 30, 014001 (2023)
https://doi.org/10.1116/6.0002252
Published: January 2023
View article titled, Lanthanum sulfide powder analyzed by XPS
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Includes: Supplementary data
Journal Articles

In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches

S. Novia Berriel, Corbin Feit, Nick Keller, Nicholas G. Rudawski, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062403 (2022)
https://doi.org/10.1116/6.0001937
Published: September 2022
View article titled, <em>In situ</em> spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO<sub>2</sub> nanotrenches
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Includes: Supplementary data
Journal Articles

Surface oxidation of hydrophobic ZnSe for enhanced growth of atomic layer deposited aluminum oxide

Corbin Feit, Jaynlynn Sosa, Alexandros Kostogiannes, Matthieu Chazot, Nicholas G. Rudawski, Titel Jurca, Kathleen A. Richardson, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052402 (2022)
https://doi.org/10.1116/6.0002018
Published: August 2022
View article titled, Surface oxidation of hydrophobic ZnSe for enhanced growth of atomic layer deposited aluminum oxide
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Journal Articles

Machine learning approach to thickness prediction from in situ spectroscopic ellipsometry data for atomic layer deposition processes

Ayush Arunachalam, S. Novia Berriel, Corbin Feit, Udit Kumar, Sudipta Seal, Kanad Basu, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 012405 (2022)
https://doi.org/10.1116/6.0001482
Published: December 2021
View article titled, Machine learning approach to thickness prediction from <em>in situ</em> spectroscopic ellipsometry data for atomic layer deposition processes
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Journal Articles

In situ ellipsometry aided rapid ALD process development and parameter space visualization of cerium oxide nanofilms

Udit Kumar, Corbin Feit, S. Novia Berriel, Ayush Arunachalam, Tamil Selvan Sakthivel, Kanad Basu, Parag Banerjee, Sudipta Seal
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 060405 (2021)
https://doi.org/10.1116/6.0001329
Published: November 2021
View article titled, <em>In situ</em> ellipsometry aided rapid ALD process development and parameter space visualization of cerium oxide nanofilms
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Includes: Supplementary data
Journal Articles

Semiconductor-to-metal transition in atomic layer deposition (ALD) of VO2 films using VCl4 and water

Jeya Prakash Ganesan, Durjoy Dev, Adithi Krishnaprasad, Corbin Feit, Daniel Moser, Ravindra K. Kanjolia, Tania Roy, Parag Banerjee
Journal: Applied Physics Letters
Appl. Phys. Lett. 118, 261902 (2021)
https://doi.org/10.1063/5.0053566
Published: June 2021
View article titled, Semiconductor-to-metal transition in atomic layer deposition (ALD) of VO<sub>2</sub> films using VCl<sub>4</sub> and water
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Includes: Supplementary data
Journal Articles

Achieving near-zero temperature coefficient of resistivity in atomic layer deposition TiSixN films through composition tuning

Corbin Feit, Srishti Chugh, Ajit R. Dhamdhere, Hae Young Kim, Shaurya Dabas, Somilkumar J. Rathi, Niloy Mukherjee, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062404 (2020)
https://doi.org/10.1116/6.0000453
Published: October 2020
View article titled, Achieving near-zero temperature coefficient of resistivity in atomic layer deposition TiSi<sub>x</sub>N films through composition tuning
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Includes: Supplementary data
Journal Articles

Review Article: Atomic layer deposition of doped ZnO films

Zhengning Gao, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 050802 (2019)
https://doi.org/10.1116/1.5112777
Published: August 2019
View article titled, Review Article: Atomic layer deposition of doped ZnO films
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Journal Articles

Unraveling delocalized electrons in metal induced gap states from second harmonics

Zhengning Gao, Mallik M. R. Hussain, Domenico de Ceglia, Maria A. Vincenti, Andrew Sarangan, Imad Agha, Michael Scalora, Joseph W. Haus, Parag Banerjee
Journal: Applied Physics Letters
Appl. Phys. Lett. 111, 161601 (2017)
https://doi.org/10.1063/1.4996893
Published: October 2017
View article titled, Unraveling delocalized electrons in metal induced gap states from second harmonics
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Includes: Supplementary data
Journal Articles

Standing and sitting adlayers in atomic layer deposition of ZnO

Zhengning Gao, Fei Wu, Yoon Myung, Ruixiang Fei, Ravindra Kanjolia, Li Yang, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A143 (2016)
https://doi.org/10.1116/1.4938080
Published: December 2015
View article titled, Standing and sitting adlayers in atomic layer deposition of ZnO
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Includes: Supplementary data
Journal Articles

Charge transport in single CuO nanowires

Junnan Wu, Bo Yin, Fei Wu, Yoon Myung, Parag Banerjee
Journal: Applied Physics Letters
Appl. Phys. Lett. 105, 183506 (2014)
https://doi.org/10.1063/1.4900966
Published: November 2014
View article titled, Charge transport in single CuO nanowires
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Includes: Supplementary data
Journal Articles

Correlation of Raman, electrical, and optical properties of high- κ , atomic layer deposited Al-doped TiO 2

Lauren C. Haspert, Parag Banerjee, Laurent Henn-Lecordier, Gary W. Rubloff
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041807 (2011)
https://doi.org/10.1116/1.3610970
Published: August 2011
View article titled, Correlation of Raman, electrical, and optical properties of high- κ , atomic layer deposited Al-doped TiO 2
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Journal Articles

Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

Parag Banerjee, Won-Jae Lee, Ki-Ryeol Bae, Sang Bok Lee, Gary W. Rubloff
Journal: Journal of Applied Physics
J. Appl. Phys. 108, 043504 (2010)
https://doi.org/10.1063/1.3466987
Published: August 2010
View article titled, Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films
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Includes: Supplementary data