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Oliver Ambacher
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Journal Articles

Structural and electrical properties of fiber textured and epitaxial molybdenum thin films prepared by magnetron sputter epitaxy

Open Access
Balasubramanian Sundarapandian, Mohit Raghuwanshi, Patrik Straňák, Yuan Yu, Haiyan Lyu, Mario Prescher, Lutz Kirste, Oliver Ambacher
Journal: Applied Physics Letters
Appl. Phys. Lett. 126, 011601 (2025)
https://doi.org/10.1063/5.0231694
Published: January 2025
View articletitled, Structural and electrical properties of fiber textured and epitaxial molybdenum thin films prepared by magnetron sputter epitaxy
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Journal Articles

Elastic properties of rock salt ScN thin films investigated by laser ultrasound

Open Access
Pavel D. Pupyrev, Saskia Mihalic, Akash Nair, Patrik Straňák, Elena Mayer, Florian Hörich, Armin Dadgar, André Strittmatter, Oliver Ambacher, Andreas Mayer
Journal: Journal of Applied Physics
J. Appl. Phys. 136, 235103 (2024)
https://doi.org/10.1063/5.0237166
Published: December 2024
View articletitled, Elastic properties of rock salt ScN thin films investigated by laser ultrasound
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Journal Articles

Clarification of the spontaneous polarization direction in crystals with wurtzite structure

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Simon Fichtner, Mohamed Yassine, Chris G. Van de Walle, Oliver Ambacher
Journal: Applied Physics Letters
Appl. Phys. Lett. 125, 040501 (2024)
https://doi.org/10.1063/5.0217301
Published: July 2024
View articletitled, Clarification of the spontaneous polarization direction in crystals with wurtzite structure
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Journal Articles

Comparison of aluminum nitride thin films prepared by magnetron sputter epitaxy in nitrogen and ammonia atmosphere

Open Access
Balasubramanian Sundarapandian, Dat Q. Tran, Lutz Kirste, Patrik Straňák, Andreas Graff, Mario Prescher, Akash Nair, Mohit Raghuwanshi, Vanya Darakchieva, Plamen P. Paskov, Oliver Ambacher
Journal: Applied Physics Letters
Appl. Phys. Lett. 124, 182101 (2024)
https://doi.org/10.1063/5.0202161
Published: May 2024
View articletitled, Comparison of aluminum nitride thin films prepared by magnetron sputter epitaxy in nitrogen and ammonia atmosphere
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Includes: Supplementary data
Journal Articles

Influence of growth temperature on the properties of aluminum nitride thin films prepared by magnetron sputter epitaxy

Open Access
Balasubramanian Sundarapandian, Ali Yassine, Lutz Kirste, Martina Baeumler, Patrik Straňák, Evelin Fisslthaler, Mario Prescher, Mohamed Yassine, Akash Nair, Mohit Raghuwanshi, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 134, 185107 (2023)
https://doi.org/10.1063/5.0171167
Published: November 2023
View articletitled, Influence of growth temperature on the properties of aluminum nitride thin films prepared by magnetron sputter epitaxy
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Journal Articles

Effect of V/III ratio and growth pressure on surface and crystal quality of AlN grown on sapphire by metal-organic chemical vapor deposition

Open Access
Isabel Streicher, Stefano Leone, Lutz Kirste, Oliver Ambacher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032702 (2022)
https://doi.org/10.1116/6.0001794
Published: May 2022
View articletitled, Effect of V/III ratio and growth pressure on surface and crystal quality of AlN grown on sapphire by metal-organic chemical vapor deposition
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Journal Articles

On the origin of the turn-on voltage drop of GaN-based current aperture vertical electron transistors

Open Access
Philipp Döring, Matthias Sinnwell, Richard Reiner, Rachid Driad, Patrick Waltereit, Stefano Leone, Stefan Müller, Michael Mikulla, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 131, 114502 (2022)
https://doi.org/10.1063/5.0079760
Published: March 2022
View articletitled, On the origin of the turn-on voltage drop of GaN-based current aperture vertical electron transistors
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Journal Articles

On the exceptional temperature stability of ferroelectric Al1-xScxN thin films

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Md. Redwanul Islam, Niklas Wolff, Mohamed Yassine, Georg Schönweger, Björn Christian, Hermann Kohlstedt, Oliver Ambacher, Fabian Lofink, Lorenz Kienle, Simon Fichtner
Journal: Applied Physics Letters
Appl. Phys. Lett. 118, 232905 (2021)
https://doi.org/10.1063/5.0053649
Published: June 2021
View articletitled, On the exceptional temperature stability of ferroelectric Al1-xScxN thin films
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Includes: Supplementary data
Journal Articles

Atomic scale confirmation of ferroelectric polarization inversion in wurtzite-type AlScN

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Niklas Wolff, Simon Fichtner, Benedikt Haas, Md Redwanul Islam, Florian Niekiel, Maximilian Kessel, Oliver Ambacher, Christoph Koch, Bernhard Wagner, Fabian Lofink, Lorenz Kienle
Journal: Journal of Applied Physics
J. Appl. Phys. 129, 034103 (2021)
https://doi.org/10.1063/5.0033205
Published: January 2021
View articletitled, Atomic scale confirmation of ferroelectric polarization inversion in wurtzite-type AlScN
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Includes: Supplementary data
Journal Articles

Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures

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Jana Ligl, Stefano Leone, Christian Manz, Lutz Kirste, Philipp Doering, Theodor Fuchs, Mario Prescher, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 127, 195704 (2020)
https://doi.org/10.1063/5.0003095
Published: May 2020
View articletitled, Metalorganic chemical vapor phase deposition of AlScN/GaN heterostructures
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Journal Articles

Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 11 2 ¯ thin films

Open Access
Anli Ding, Lutz Kirste, Yuan Lu, Rachid Driad, Nicolas Kurz, Vadim Lebedev, Tim Christoph, Niclas M. Feil, Roger Lozar, Thomas Metzger, Oliver Ambacher, Agnė Žukauskaitė
Journal: Applied Physics Letters
Appl. Phys. Lett. 116, 101903 (2020)
https://doi.org/10.1063/1.5129329
Published: March 2020
View articletitled, Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 11 2 ¯ thin films
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Journal Articles

Microstructural and optical emission properties of diamond multiply twinned particles

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Vadim Lebedev, Taro Yoshikawa, Christoph Schreyvogel, Lutz Kirste, Jürgen Weippert, Michael Kunzer, Andreas Graff, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 127, 025303 (2020)
https://doi.org/10.1063/1.5127170
Published: January 2020
View articletitled, Microstructural and optical emission properties of diamond multiply twinned particles
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Journal Articles

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

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Nicolas Kurz, Anli Ding, Daniel F. Urban, Yuan Lu, Lutz Kirste, Niclas M. Feil, Agnė Žukauskaitė, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 126, 075106 (2019)
https://doi.org/10.1063/1.5094611
Published: August 2019
View articletitled, Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
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Journal Articles

Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41

Open Access
Martina Baeumler, Yuan Lu, Nicolas Kurz, Lutz Kirste, Mario Prescher, Tim Christoph, Joachim Wagner, Agnė Žukauskaitė, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 126, 045715 (2019)
https://doi.org/10.1063/1.5101043
Published: July 2019
View articletitled, Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
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Journal Articles

Epitaxial growth optimization of AlGaN/GaN high electron mobility transistor structures on 3C-SiC/Si

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Stefano Leone, Fouad Benkhelifa, Lutz Kirste, Christian Manz, Ruediger Quay, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 125, 235701 (2019)
https://doi.org/10.1063/1.5092653
Published: June 2019
View articletitled, Epitaxial growth optimization of AlGaN/GaN high electron mobility transistor structures on 3C-SiC/Si
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Journal Articles

Influence of substrate holder configurations on bias enhanced nucleation area for diamond heteroepitaxy: Toward wafer-scale single-crystalline diamond synthesis

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Taro Yoshikawa, David Herrling, Frank Meyer, Frank Burmeister, Christoph E. Nebel, Oliver Ambacher, Vadim Lebedev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021207 (2019)
https://doi.org/10.1116/1.5086020
Published: March 2019
View articletitled, Influence of substrate holder configurations on bias enhanced nucleation area for diamond heteroepitaxy: Toward wafer-scale single-crystalline diamond synthesis
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Journal Articles

Formation of icosahedron twins during initial stages of heteroepitaxial diamond nucleation and growth

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Vadim Lebedev, Taro Yoshikawa, Christian Giese, Lutz Kirste, Agnė Žukauskaitė, Andreas Graff, Frank Meyer, Frank Burmeister, Oliver Ambacher
Journal: Journal of Applied Physics
J. Appl. Phys. 125, 075305 (2019)
https://doi.org/10.1063/1.5085184
Published: February 2019
View articletitled, Formation of icosahedron twins during initial stages of heteroepitaxial diamond nucleation and growth
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Journal Articles

Elastic modulus and coefficient of thermal expansion of piezoelectric Al1−xScxN (up to x = 0.41) thin films

Open Access
Yuan Lu, Markus Reusch, Nicolas Kurz, Anli Ding, Tim Christoph, Mario Prescher, Lutz Kirste, Oliver Ambacher, Agnė Žukauskaitė
Journal: APL Materials
APL Mater. 6, 076105 (2018)
https://doi.org/10.1063/1.5040190
Published: July 2018
View articletitled, Elastic modulus and coefficient of thermal expansion of piezoelectric Al1−xScxN (up to x = 0.41) thin films
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Journal Articles

Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices

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Markus Reusch, Katarzyna Holc, Wilfried Pletschen, Lutz Kirste, Agnė Žukauskaitė, Taro Yoshikawa, Dimitre Iankov, Oliver Ambacher, Vadim Lebedev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 052001 (2016)
https://doi.org/10.1116/1.4959580
Published: July 2016
View articletitled, Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
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Journal Articles

Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers

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Taro Yoshikawa, Markus Reusch, Katarzyna Holc, Dimitre Iankov, Verena Zuerbig, Agne Zukauskaite, Christoph E. Nebel, Oliver Ambacher, Vadim Lebedev
Journal: Applied Physics Letters
Appl. Phys. Lett. 108, 171903 (2016)
https://doi.org/10.1063/1.4948343
Published: April 2016
View articletitled, Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers
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