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Journal Articles

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

João Saccoman, Nilton Francelosi A. Neto, José H. D. da Silva

J. Vac. Sci. Technol. A 42, 033402 (2024)

https://doi.org/10.1116/6.0003255

Published: March 2024

View article titled, Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Journal Articles

Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering

Nilton Francelosi A. Neto, Cristiane Stegemann, Lucas J. Affonço, Douglas M. G. Leite, José H. D. da Silva

J. Vac. Sci. Technol. A 40, 013405 (2022)

https://doi.org/10.1116/6.0001418

Published: November 2021

View article titled, Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering