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Mike L. van de Poll
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Journal Articles

Erratum: “Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic layer deposition with subsecond plasma exposure times” [Appl. Phys. Lett. 123 , 182902 (2023)]

Free
Mike L. van de Poll, Hardik Jain, James N. Hilfiker, Mikko Utriainen, Paul Poodt, Wilhelmus M. M. Kessels, Bart Macco
Journal: Applied Physics Letters
Appl. Phys. Lett. 123, 249901 (2023)
https://doi.org/10.1063/5.0188189
Published: December 2023
View articletitled, Erratum: “Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic layer deposition with subsecond plasma exposure times” [Appl. Phys. Lett. 123 , 182902 (2023)]
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Journal Articles

Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic layer deposition with subsecond plasma exposure times

Open Access
Mike L. van de Poll, Hardik Jain, James N. Hilfiker, Mikko Utriainen, Paul Poodt, Wilhelmus M. M. Kessels, Bart Macco
Journal: Applied Physics Letters
Appl. Phys. Lett. 123, 182902 (2023)
https://doi.org/10.1063/5.0168768
Published: October 2023
View articletitled, Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic layer deposition with subsecond plasma exposure times
Open the PDF for Excellent conformality of atmospheric-pressure plasma-enhanced spatial atomic layer deposition with subsecond plasma exposure times in another window
Includes: Supplementary data