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1-20 of 212
Mark J. Kushner
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Journal Articles
Journal Articles
J. Vac. Sci. Technol. A 42, 043008 (2024)
Published: June 2024
Includes: Supplementary data
Journal Articles
Gottlieb S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce, Jane P. Chang, Jessica C. DeMott, Vincent M. Donnelly, Rémi Dussart, Andreas Fischer, Richard A. Gottscho, Satoshi Hamaguchi, Masanobu Honda, Masaru Hori, Kenji Ishikawa, Steven G. Jaloviar, Keren J. Kanarik, Kazuhiro Karahashi, Akiteru Ko, Hiten Kothari, Nobuyuki Kuboi, Mark J. Kushner, Thorsten Lill, Pingshan Luan, Ali Mesbah, Eric Miller, Shoubhanik Nath, Yoshinobu Ohya, Mitsuhiro Omura, Chanhoon Park, John Poulose, Shahid Rauf, Makoto Sekine, Taylor G. Smith, Nathan Stafford, Theo Standaert, Peter L. G. Ventzek
J. Vac. Sci. Technol. B 42, 041501 (2024)
Published: June 2024
Journal Articles
David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
J. Vac. Sci. Technol. B 42, 042202 (2024)
Published: June 2024
Journal Articles
Journal Articles
Journal Articles
Journal Articles
J. Vac. Sci. Technol. A 41, 013006 (2023)
Published: December 2022
Journal Articles
Journal Articles
Yao Du, Florian Krüger, Sang Ki Nam, Hoki Lee, Suyoung Yoo, Jacob Eapen, Mark J. Kushner, Steven Shannon
J. Vac. Sci. Technol. A 40, 053007 (2022)
Published: September 2022
Journal Articles
Journal Articles
Journal Articles
J. Vac. Sci. Technol. A 40, 043001 (2022)
Published: May 2022
Journal Articles
Journal Articles
Positive charging of grains in an afterglow plasma is enhanced by ions drifting in an electric field
Journal:
Physics of Plasmas
Phys. Plasmas 28, 103702 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063002 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 052403 (2021)
Published: August 2021
Journal Articles
Peter J. Bruggeman, Renee R. Frontiera, Uwe R. Kortshagen, Mark J. Kushner, Suljo Linic, George C. Schatz, Himashi Andaraarachchi, Stephen Exarhos, Leighton O. Jones, Chelsea M. Mueller, Christopher C. Rich, Chi Xu, Yuanfu Yue, Yi Zhang
Journal:
Journal of Applied Physics
J. Appl. Phys. 129, 200902 (2021)
Published: May 2021
Journal Articles
Journal Articles
J. Vac. Sci. Technol. A 39, 033003 (2021)
Published: March 2021
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