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Journal Articles

Analysis of emission data from O 2 plasmas used for microbe sterilization

S. P. Sharma, B. A. Cruden, M. V. V. S. Rao, A. A. Bolshakov
Journal: Journal of Applied Physics
J. Appl. Phys. 95, 3324–3333 (2004)
https://doi.org/10.1063/1.1650921
Published: April 2004
View articletitled, Analysis of emission data from O 2 plasmas used for microbe sterilization
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Journal Articles

Fourier-transform infrared and optical emission spectroscopy of CF 4 / O 2 /Ar mixtures in an inductively coupled plasma

Brett A. Cruden, M. V. V. S. Rao, Surendra P. Sharma, M. Meyyappan
Journal: Journal of Applied Physics
J. Appl. Phys. 93, 5053–5062 (2003)
https://doi.org/10.1063/1.1563819
Published: May 2003
View articletitled, Fourier-transform infrared and optical emission spectroscopy of CF 4 / O 2 /Ar mixtures in an inductively coupled plasma
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Journal Articles

Neutral gas temperature estimate in CF 4 / O 2 / Ar inductively coupled plasmas

Brett A. Cruden, M. V. V. S. Rao, Surendra P. Sharma, M. Meyyappan
Journal: Applied Physics Letters
Appl. Phys. Lett. 81, 990–992 (2002)
https://doi.org/10.1063/1.1497998
Published: August 2002
View articletitled, Neutral gas temperature estimate in CF 4 / O 2 / Ar inductively coupled plasmas
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Journal Articles

Measured cross sections and ion energies for a CHF 3 discharge

B. L. Peko, R. L. Champion, M. V. V. S. Rao, J. K. Olthoff
Journal: Journal of Applied Physics
J. Appl. Phys. 92, 1657–1662 (2002)
https://doi.org/10.1063/1.1491276
Published: August 2002
View articletitled, Measured cross sections and ion energies for a CHF 3 discharge
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Journal Articles

Optical path length control in plasma absorption measurements

Brett A. Cruden, M. V. V. S. Rao, Surendra P. Sharma, M. Meyyappan
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 73, 2578–2582 (2002)
https://doi.org/10.1063/1.1483898
Published: July 2002
View articletitled, Optical path length control in plasma absorption measurements
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Journal Articles

Neutral gas temperature estimates in an inductively coupled CF 4 plasma by fitting diatomic emission spectra

Brett A. Cruden, M. V. V. S. Rao, Surendra P. Sharma, M. Meyyappan
Journal: Journal of Applied Physics
J. Appl. Phys. 91, 8955–8964 (2002)
https://doi.org/10.1063/1.1474614
Published: June 2002
View articletitled, Neutral gas temperature estimates in an inductively coupled CF 4 plasma by fitting diatomic emission spectra
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Journal Articles

Detection of chamber conditioning by CF 4 plasmas in an inductively coupled plasma reactor

Brett A. Cruden, M. V. V. S. Rao, Surendra P. Sharma, M. Meyyappan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 20, 353–363 (2002)
https://doi.org/10.1116/1.1447246
Published: January 2002
View articletitled, Detection of chamber conditioning by CF 4 plasmas in an inductively coupled plasma reactor
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Journal Articles

Impact of gas heating in inductively coupled plasmas

D. B. Hash, D. Bose, M. V. V. S. Rao, B. A. Cruden, M. Meyyappan, S. P. Sharma
Journal: Journal of Applied Physics
J. Appl. Phys. 90, 2148–2157 (2001)
https://doi.org/10.1063/1.1390503
Published: September 2001
View articletitled, Impact of gas heating in inductively coupled plasmas
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Journal Articles

Electron Interactions with CHF3

L. G. Christophorou, J. K. Olthoff, M. V. V. S. Rao
Journal: Journal of Physical and Chemical Reference Data
J. Phys. Chem. Ref. Data 26, 1–15 (1997)
https://doi.org/10.1063/1.556004
Published: January 1997
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Journal Articles

Electron Interactions with CF4

L. G. Christophorou, J. K. Olthoff, M. V. V. S. Rao
Journal: Journal of Physical and Chemical Reference Data
J. Phys. Chem. Ref. Data 25, 1341–1388 (1996)
https://doi.org/10.1063/1.555986
Published: September 1996
View articletitled, Electron Interactions with CF4
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