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Journal Articles

Wafer-scale bonded GaN–AlN with high interface thermal conductance

Featured
Man Li, Kaicheng Pan, Yijun Ge, Kenny Huynh, Mark S. Goorsky, Timothy S. Fisher, Yongjie Hu
Journal: Applied Physics Letters
Appl. Phys. Lett. 125, 032104 (2024)
https://doi.org/10.1063/5.0206263
Published: July 2024
View article titled, Wafer-scale bonded GaN–AlN with high interface thermal conductance
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Journal Articles

Experimental determination of critical thickness limitations of (010) β -(AlxGa1 − x)2O3 heteroepitaxial films

James Spencer Lundh, Kenny Huynh, Michael Liao, William Olsen, Kaicheng Pan, Kohei Sasaki, Keita Konishi, Hannah N. Masten, Jennifer K. Hite, Michael A. Mastro, Nadeemullah A. Mahadik, Mark Goorsky, Akito Kuramata, Karl D. Hobart, Travis J. Anderson, Marko J. Tadjer
Journal: Applied Physics Letters
Appl. Phys. Lett. 123, 222104 (2023)
https://doi.org/10.1063/5.0174682
Published: November 2023
View article titled, Experimental determination of critical thickness limitations of (010) <em>β</em> -(Al<sub>x</sub>Ga<sub>1 − x</sub>)<sub>2</sub>O<sub>3</sub> heteroepitaxial films
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Journal Articles

Thermal transport and structural improvements due to annealing of wafer bonded β-Ga2O3|4H-SiC

Michael E. Liao, Kenny Huynh, Zhe Cheng, Jingjing Shi, Samuel Graham, Mark S. Goorsky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063203 (2023)
https://doi.org/10.1116/6.0002693
Published: September 2023
View article titled, Thermal transport and structural improvements due to annealing of wafer bonded β-Ga<sub>2</sub>O<sub>3</sub>|4H-SiC
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Journal Articles

Origins of epitaxial macro-terraces and macro-steps on GaN substrates

Michael E. Liao, William L. Olsen, Kenny Huynh, Dorian P. Luccioni, Yekan Wang, XianRong Huang, Michael J. Wojcik, Andrew A. Allerman, Mark S. Goorsky
Journal: Journal of Applied Physics
J. Appl. Phys. 133, 185701 (2023)
https://doi.org/10.1063/5.0147667
Published: May 2023
View article titled, Origins of epitaxial macro-terraces and macro-steps on GaN substrates
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Journal Articles

Depth-dependent recovery of thermal conductivity after recrystallization of amorphous silicon

Kenny Huynh, Yekan Wang, Michael E. Liao, Thomas Pfeifer, John Tomko, Ethan Scott, Khalid Hattar, Patrick E. Hopkins, Mark S. Goorsky
Journal: Journal of Applied Physics
J. Appl. Phys. 133, 135101 (2023)
https://doi.org/10.1063/5.0133548
Published: April 2023
View article titled, Depth-dependent recovery of thermal conductivity after recrystallization of amorphous silicon
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Journal Articles

Optimization of chemical mechanical polishing of (010) β-Ga2O3

Michael E. Liao, Kenny Huynh, Lezli Matto, Dorian P. Luccioni, Mark S. Goorsky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013205 (2023)
https://doi.org/10.1116/6.0002241
Published: January 2023
View article titled, Optimization of chemical mechanical polishing of (010) β-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Measuring sub-surface spatially varying thermal conductivity of silicon implanted with krypton

Editor’s Pick
Thomas W. Pfeifer, John A. Tomko, Eric Hoglund, Ethan A. Scott, Khalid Hattar, Kenny Huynh, Michael Liao, Mark Goorsky, Patrick E. Hopkins
Journal: Journal of Applied Physics
J. Appl. Phys. 132, 075112 (2022)
https://doi.org/10.1063/5.0094876
Published: August 2022
View article titled, Measuring sub-surface spatially varying thermal conductivity of silicon implanted with krypton
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Includes: Supplementary data
Journal Articles

Surface reaction dependence of molecular beam epitaxy grown aluminum on various orientations of β-Ga2O3

Kenny Huynh, Michael E. Liao, Akhil Mauze, Takeki Itoh, Xingxu Yan, James S. Speck, Xiaoqing Pan, Mark S. Goorsky
Journal: APL Materials
APL Mater. 10, 011110 (2022)
https://doi.org/10.1063/5.0069958
Published: January 2022
View article titled, Surface reaction dependence of molecular beam epitaxy grown aluminum on various orientations of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>
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