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Kenichiro Mizohata
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Journal Articles

Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor

Editor’s Pick
Alexey Ganzhinov, Miika Mattinen, Kenichiro Mizohata, Mykhailo Chundak, Timo Hatanpää, Mikko Ritala, Matti Putkonen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022403 (2025)
https://doi.org/10.1116/6.0004240
Published: January 2025
View article titled, Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor
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Journal Articles

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Editor’s Pick
Heli Seppänen, Igor Prozheev, Christoffer Kauppinen, Sami Suihkonen, Kenichiro Mizohata, Harri Lipsanen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052401 (2023)
https://doi.org/10.1116/6.0002705
Published: July 2023
View article titled, Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon
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Journal Articles

Size dependent swift heavy ion induced Au nanoparticle elongation in SiO2 matrix

Spyridon Korkos, Kenichiro Mizohata, Sami Kinnunen, Timo Sajavaara, Kai Arstila
Journal: Journal of Applied Physics
J. Appl. Phys. 132, 045901 (2022)
https://doi.org/10.1063/5.0099164
Published: July 2022
View article titled, Size dependent swift heavy ion induced Au nanoparticle elongation in SiO<sub>2</sub> matrix
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Journal Articles

Atomic layer deposition of GdF3 thin films

Elisa Atosuo, Kenichiro Mizohata, Miika Mattinen, Miia Mäntymäki, Marko Vehkamäki, Markku Leskelä, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022402 (2022)
https://doi.org/10.1116/6.0001629
Published: January 2022
View article titled, Atomic layer deposition of GdF<sub>3</sub> thin films
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Journal Articles

In-situ plasma treatment of Cu surfaces for reducing the generation of vacuum arc breakdowns

Anton Saressalo, Aarre Kilpeläinen, Kenichiro Mizohata, Iaroslava Profatilova, Anton Nolvi, Ivan Kassamakov, Pertti Tikkanen, Sergio Calatroni, Walter Wuensch, Flyura Djurabekova
Journal: Journal of Applied Physics
J. Appl. Phys. 130, 143302 (2021)
https://doi.org/10.1063/5.0062674
Published: October 2021
View article titled, <em>In-situ</em> plasma treatment of Cu surfaces for reducing the generation of vacuum arc breakdowns
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Journal Articles

Atomic layer deposition of TbF3 thin films

Elisa Atosuo, Juha Ojala, Mikko J. Heikkilä, Miika Mattinen, Kenichiro Mizohata, Jyrki Räisänen, Markku Leskelä, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 022404 (2021)
https://doi.org/10.1116/6.0000790
Published: February 2021
View article titled, Atomic layer deposition of TbF<sub>3</sub> thin films
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Journal Articles

Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition

Kaupo Kukli, Marianna Kemell, Helena Castán, Salvador Dueñas, Joosep Link, Raivo Stern, Mikko J. Heikkilä, Taivo Jõgiaas, Jekaterina Kozlova, Mihkel Rähn, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 042405 (2020)
https://doi.org/10.1116/6.0000212
Published: June 2020
View article titled, Magnetic properties and resistive switching in mixture films and nanolaminates consisting of iron and silicon oxides grown by atomic layer deposition
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Journal Articles

Effect of interstitial carbon on the evolution of early-stage irradiation damage in equi-atomic FeMnNiCoCr high-entropy alloys

Eryang Lu, Ilja Makkonen, Kenichiro Mizohata, Zhiming Li, Jyrki Räisänen, Filip Tuomisto
Journal: Journal of Applied Physics
J. Appl. Phys. 127, 025103 (2020)
https://doi.org/10.1063/1.5130748
Published: January 2020
View article titled, Effect of interstitial carbon on the evolution of early-stage irradiation damage in equi-atomic FeMnNiCoCr high-entropy alloys
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Journal Articles

Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors

Editor’s Pick
Ville Miikkulainen, Katja Väyrynen, Kenichiro Mizohata, Jyrki Räisänen, Marko Vehkamäki, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 060911 (2019)
https://doi.org/10.1116/1.5124100
Published: November 2019
View article titled, Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors
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Journal Articles

Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia

Miia Mäntymäki, Elisa Atosuo, Mikko J. Heikkilä, Marko Vehkamäki, Miika Mattinen, Kenichiro Mizohata, Jyrki Räisänen, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020929 (2019)
https://doi.org/10.1116/1.5081494
Published: February 2019
View article titled, Studies on solid state reactions of atomic layer deposited thin films of lithium carbonate with hafnia and zirconia
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Journal Articles

Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing

Editor’s Pick
Miika Mattinen, Timo Hatanpää, Peter J. King, Kristoffer Meinander, Kenichiro Mizohata, Pasi Jalkanen, Jyrki Räisänen, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020921 (2019)
https://doi.org/10.1116/1.5074153
Published: February 2019
View article titled, Crystalline tungsten sulfide thin films by atomic layer deposition and mild annealing
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Includes: Supplementary data
Journal Articles

Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition

Editor’s Pick
Peter J. King, Marko Vehkamäki, Miika Mattinen, Mikko J. Heikkilä, Kenichiro Mizohata, Wontae Noh, Markku Leskelä, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020602 (2019)
https://doi.org/10.1116/1.5081997
Published: January 2019
View article titled, Toward epitaxial ternary oxide multilayer device stacks by atomic layer deposition
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Journal Articles

Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O3 for atomic layer deposition of ZrO2

Editor’s Pick
Sanni Seppälä, Marko Vehkamäki, Kenichiro Mizohata, Wontae Noh, Jyrki Räisänen, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020912 (2019)
https://doi.org/10.1116/1.5079539
Published: January 2019
View article titled, Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H<sub>2</sub>O and O<sub>3</sub> for atomic layer deposition of ZrO<sub>2</sub>
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Journal Articles

Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)2(THF) and H2O

Editor’s Pick
Tomi Iivonen, Mikko Kaipio, Timo Hatanpää, Kenichiro Mizohata, Kristoffer Meinander, Jyrki Räisänen, Jiyeon Kim, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 010908 (2019)
https://doi.org/10.1116/1.5066638
Published: January 2019
View article titled, Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA)<sub>2</sub>(THF) and H<sub>2</sub>O
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Journal Articles

Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

Editor’s Pick
Kaupo Kukli, Marianna Kemell, Marko Vehkamäki, Mikko J. Heikkilä, Kenichiro Mizohata, Kristjan Kalam, Mikko Ritala, Markku Leskelä, Ivan Kundrata, Karol Fröhlich
Journal: AIP Advances
AIP Advances 7, 025001 (2017)
https://doi.org/10.1063/1.4975928
Published: February 2017
View article titled, Atomic layer deposition and properties of mixed Ta<sub>2</sub>O<sub>5</sub> and ZrO<sub>2</sub> films
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Journal Articles

Enhanced process and composition control for atomic layer deposition with lithium trimethylsilanolate

Amund Ruud, Ville Miikkulainen, Kenichiro Mizohata, Helmer Fjellvåg, Ola Nilsen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B133 (2017)
https://doi.org/10.1116/1.4972209
Published: December 2016
View article titled, Enhanced process and composition control for atomic layer deposition with lithium trimethylsilanolate
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Includes: Supplementary data
Journal Articles

As2S3 thin films deposited by atomic layer deposition

Elina Färm, Mikko J. Heikkilä, Marko Vehkamäki, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä, Marianna Kemell
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B114 (2017)
https://doi.org/10.1116/1.4968202
Published: November 2016
View article titled, As<sub>2</sub>S<sub>3</sub> thin films deposited by atomic layer deposition
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Journal Articles

Potential gold(I) precursors evaluated for atomic layer deposition

Maarit Mäkelä, Timo Hatanpää, Mikko Ritala, Markku Leskelä, Kenichiro Mizohata, Kristoffer Meinander, Jyrki Räisänen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B112 (2017)
https://doi.org/10.1116/1.4968193
Published: November 2016
View article titled, Potential gold(I) precursors evaluated for atomic layer deposition
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Journal Articles

Low-temperature atomic layer deposition of copper(II) oxide thin films

Tomi Iivonen, Jani Hämäläinen, Benoît Marchand, Kenichiro Mizohata, Miika Mattinen, Georgi Popov, Jiyeon Kim, Roland A. Fischer, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A109 (2016)
https://doi.org/10.1116/1.4933089
Published: October 2015
View article titled, Low-temperature atomic layer deposition of copper(II) oxide thin films
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Journal Articles

Preparation and bioactive properties of nanocrystalline hydroxyapatite thin films obtained by conversion of atomic layer deposited calcium carbonate

Jani Holopainen, Kyösti Kauppinen, Kenichiro Mizohata, Eero Santala, Esa Mikkola, Mikko Heikkilä, Hanna Kokkonen, Markku Leskelä, Petri Lehenkari, Juha Tuukkanen, Mikko Ritala
Journal: Biointerphases
Biointerphases 9, 031008 (2014)
https://doi.org/10.1116/1.4889975
Published: July 2014
View article titled, Preparation and bioactive properties of nanocrystalline hydroxyapatite thin films obtained by conversion of atomic layer deposited calcium carbonate
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