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Kazuki Yoshida
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Journal Articles

Multiple layers of aluminum silicate and silicon dioxide deposited by room-temperature atomic layer deposition for enhanced cation sorption

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Takeru Saito, Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042406 (2022)
https://doi.org/10.1116/6.0001908
Published: June 2022
View articletitled, Multiple layers of aluminum silicate and silicon dioxide deposited by room-temperature atomic layer deposition for enhanced cation sorption
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Journal Articles

Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon

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Kazuki Yoshida, Issei Nagata, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 022408 (2022)
https://doi.org/10.1116/6.0001622
Published: February 2022
View articletitled, Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon
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Journal Articles

Room temperature atomic layer deposition of niobium oxide using plasma excited humidified argon and its application to anticorrosion to hydrochloric acid

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Kazuki Yoshida, Kentaro Tokoro, Kensaku Kanomata, Masanori Miura, Kentaro Saito, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 060901 (2019)
https://doi.org/10.1116/1.5116844
Published: September 2019
View articletitled, Room temperature atomic layer deposition of niobium oxide using plasma excited humidified argon and its application to anticorrosion to hydrochloric acid
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Journal Articles

Surface reaction kinetics of room temperature atomic layer deposition of ZnO observed by in situ IR absorption spectroscopy

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Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020922 (2019)
https://doi.org/10.1116/1.5079465
Published: February 2019
View articletitled, Surface reaction kinetics of room temperature atomic layer deposition of ZnO observed by in situ IR absorption spectroscopy
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Journal Articles

Large enhancement of photocatalytic activity by chemical etching of TiO2 crystallized glass

Open Access
Kazuki Yoshida, Yoshihiro Takahashi, Rie Ihara, Nobuaki Terakado, Takumi Fujiwara, Hideki Kato, Masato Kakihana
Journal: APL Materials
APL Mater. 2, 106103 (2014)
https://doi.org/10.1063/1.4897961
Published: October 2014
View articletitled, Large enhancement of photocatalytic activity by chemical etching of TiO2 crystallized glass
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