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1-9 of 9
Justinas Palisaitis
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Journal Articles
J. Vac. Sci. Technol. A 42, 020401 (2024)
Published: January 2024
Includes: Supplementary data
Journal Articles
Vladyslav Rogoz, Oleksandr Pshyk, Bartosz Wicher, Justinas Palisaitis, Jun Lu, Daniel Primetzhofer, Ivan Petrov, Lars Hultman, Grzegorz Greczynski
J. Vac. Sci. Technol. A 41, 063108 (2023)
Published: October 2023
Journal Articles
Chih-Wei Hsu, Ivan Martinovic, Roger Magnusson, Babak Bakhit, Justinas Palisaitis, Per. O. Å. Persson, Polla Rouf, Henrik Pedersen
J. Vac. Sci. Technol. A 40, 060402 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 013405 (2021)
Published: December 2020
Includes: Supplementary data
Journal Articles
Chih-Wei Hsu, Petro Deminskyi, Ivan Martinovic, Ivan G. Ivanov, Justinas Palisaitis, Henrik Pedersen
Journal:
Applied Physics Letters
Appl. Phys. Lett. 117, 093101 (2020)
Published: September 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 34, 031511 (2016)
Published: April 2016
Journal Articles
Jr-Tai Chen, Ingemar Persson, Daniel Nilsson, Chih-Wei Hsu, Justinas Palisaitis, Urban Forsberg, Per O. Å. Persson, Erik Janzén
Journal:
Applied Physics Letters
Appl. Phys. Lett. 106, 251601 (2015)
Published: June 2015
Journal Articles
Yen-Ting Chen, Tsutomu Araki, Justinas Palisaitis, Per O. Å. Persson, Li-Chyong Chen, Kuei-Hsien Chen, Per Olof Holtz, Jens Birch, Yasushi Nanishi
Journal:
Applied Physics Letters
Appl. Phys. Lett. 103, 203108 (2013)
Published: November 2013
Includes: Supplementary data
Journal Articles
Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films
Agne Zukauskaite, Gunilla Wingqvist, Justinas Palisaitis, Jens Jensen, Per O. Å. Persson, Ramin Matloub, Paul Muralt, Yunseok Kim, Jens Birch, Lars Hultman
Journal:
Journal of Applied Physics
J. Appl. Phys. 111, 093527 (2012)
Published: May 2012