Page 1 | Search Results | AIP Publishing

Skip to Main Content

Skip Nav Destination

1-4 of 4

Sort by

Sort Order Select

Journal Articles

Crystallization kinetics during layer exchange of ²⁸Si implanted Al films for fabrication of quantum computers: A theoretical model

Ella B. Schneider, Jonathan England

J. Vac. Sci. Technol. A 42, 042703 (2024)

https://doi.org/10.1116/6.0003638

Published: May 2024

View article titled, Crystallization kinetics during layer exchange of <sup>28</sup>Si implanted Al films for fabrication of quantum computers: A theoretical model

Includes: Supplementary data

Journal Articles

Use of TRIDYN and medium energy ion scattering to calibrate an industrial arsenic plasma doping process

Jonathan England, Jaap Van den Berg, Andrew Rossall

J. Vac. Sci. Technol. B 37, 031206 (2019)

https://doi.org/10.1116/1.5088958

Published: April 2019

View article titled, Use of TRIDYN and medium energy ion scattering to calibrate an industrial arsenic plasma doping process

Journal Articles

Characterization of arsenic plasma doping and postimplant processing of silicon using medium energy ion scattering

Jaap van den Berg, Andrew Rossall, Jonathan England

J. Vac. Sci. Technol. B 37, 032901 (2019)

https://doi.org/10.1116/1.5088954

Published: April 2019

View article titled, Characterization of arsenic plasma doping and postimplant processing of silicon using medium energy ion scattering

Journal Articles

The Effect of Amorphization Conditions on the Measured Activation of Source Drain Extension Implants

Jonathan England, Alexander Kontos, Anthony Renau, Russell Gwilliam, Andrew Smith, Andrew Knights, Amitabh Jain

AIP Conf. Proc. 1066, 91–94 (2008)

https://doi.org/10.1063/1.3033691

Published: November 2008

View article titled, The Effect of Amorphization Conditions on the Measured Activation of Source Drain Extension Implants