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John R. Abelson
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Journal Articles

Using metal precursors to passivate oxides for area selective deposition

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Kinsey L. Canova, Laurent Souqui, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033407 (2023)
https://doi.org/10.1116/6.0002413
Published: April 2023
View article titled, Using metal precursors to passivate oxides for area selective deposition
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Includes: Supplementary data
Journal Articles

Coalescence of ultrathin films by atomic layer deposition or chemical vapor deposition: Models of the minimum thickness based on nucleation and growth rates

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Diana K. LaFollette, Kinsey L. Canova, Zhejun V. Zhang, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 023403 (2022)
https://doi.org/10.1116/6.0001562
Published: January 2022
View article titled, Coalescence of ultrathin films by atomic layer deposition or chemical vapor deposition: Models of the minimum thickness based on nucleation and growth rates
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Includes: Supplementary data
Journal Articles

Infrared reflection spectroscopy of adsorbed intermediates in real time during chemical vapor deposition of oxides

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Zhejun V. Zhang, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063221 (2021)
https://doi.org/10.1116/6.0001328
Published: November 2021
View article titled, Infrared reflection spectroscopy of adsorbed intermediates in real time during chemical vapor deposition of oxides
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Journal Articles

Superconformal chemical vapor deposition using plasma-generated atomic species as a consumable growth inhibitor

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Yu Yang, Kinsey L. Canova, Sreenivas Jayaraman, Do-Young Kim, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043409 (2021)
https://doi.org/10.1116/6.0001018
Published: May 2021
View article titled, Superconformal chemical vapor deposition using plasma-generated atomic species as a consumable growth inhibitor
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Includes: Supplementary data
Journal Articles

Selective chemical vapor deposition of HfB2 on Al2O3 over SiO2 and the acceleration of nucleation on SiO2 by pretreatment with Hf[N(CH3)2]4

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Zhejun V. Zhang, Sumeng Liu, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023415 (2021)
https://doi.org/10.1116/6.0000691
Published: March 2021
View article titled, Selective chemical vapor deposition of HfB2 on Al2O3 over SiO2 and the acceleration of nucleation on SiO2 by pretreatment with Hf[N(CH3)2]4
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Includes: Supplementary data
Journal Articles

Ultrasmooth cobalt films on SiO2 by chemical vapor deposition using a nucleation promoter and a growth inhibitor

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Zhejun V. Zhang, Sumeng Liu, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023414 (2021)
https://doi.org/10.1116/6.0000688
Published: March 2021
View article titled, Ultrasmooth cobalt films on SiO2 by chemical vapor deposition using a nucleation promoter and a growth inhibitor
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Includes: Supplementary data
Journal Articles

Superconformal growth and trench filling using a consumable inhibitor in chemical vapor deposition of Hf1−xVxBy

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Kinsey L. Canova, Zhejun V. Zhang, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 013402 (2021)
https://doi.org/10.1116/6.0000640
Published: December 2020
View article titled, Superconformal growth and trench filling using a consumable inhibitor in chemical vapor deposition of Hf1−xVxBy
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Includes: Supplementary data
Journal Articles

New strategies for conformal, superconformal, and ultrasmooth films by low temperature chemical vapor deposition

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John R. Abelson, Gregory S. Girolami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 030802 (2020)
https://doi.org/10.1116/6.0000035
Published: April 2020
View article titled, New strategies for conformal, superconformal, and ultrasmooth films by low temperature chemical vapor deposition
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Journal Articles

Area-selective chemical vapor deposition of cobalt from dicobalt octacarbonyl: Enhancement of dielectric-dielectric selectivity by adding a coflow of NH3

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Zhejun V. Zhang, Sumeng Liu, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033401 (2020)
https://doi.org/10.1116/1.5144501
Published: March 2020
View article titled, Area-selective chemical vapor deposition of cobalt from dicobalt octacarbonyl: Enhancement of dielectric-dielectric selectivity by adding a coflow of NH3
Open the PDF for Area-selective chemical vapor deposition of cobalt from dicobalt octacarbonyl: Enhancement of dielectric-dielectric selectivity by adding a coflow of NH3 in another window
Includes: Supplementary data
Journal Articles

Low temperature chemical vapor deposition of superconducting vanadium nitride thin films

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Elham Mohimi, Zhejun V. Zhang, Justin L. Mallek, Sumeng Liu, Brian B. Trinh, Pralav P. Shetty, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031509 (2019)
https://doi.org/10.1116/1.5088050
Published: April 2019
View article titled, Low temperature chemical vapor deposition of superconducting vanadium nitride thin films
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Journal Articles

Seamless fill of deep trenches by chemical vapor deposition: Use of a molecular growth inhibitor to eliminate pinch-off

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Tushar K. Talukdar, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021509 (2019)
https://doi.org/10.1116/1.5068684
Published: January 2019
View article titled, Seamless fill of deep trenches by chemical vapor deposition: Use of a molecular growth inhibitor to eliminate pinch-off
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Includes: Supplementary data
Journal Articles

Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films

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Elham Mohimi, Kinsey Canova, Zhejun Zhang, Sumeng Liu, Justin L. Mallek, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021503 (2019)
https://doi.org/10.1116/1.5079805
Published: January 2019
View article titled, Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films
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Includes: Supplementary data
Journal Articles

Chemical vapor deposition of magnetic iron-cobalt alloy thin films: Use of ammonia to stabilize growth from carbonyl precursors

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Pengyi Zhang, Zhejun Zhang, John R. Abelson, Gregory S. Girolami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 061505 (2018)
https://doi.org/10.1116/1.5045671
Published: September 2018
View article titled, Chemical vapor deposition of magnetic iron-cobalt alloy thin films: Use of ammonia to stabilize growth from carbonyl precursors
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Journal Articles

Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes

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Tushar K. Talukdar, Wenjiao B. Wang, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051513 (2018)
https://doi.org/10.1116/1.5038100
Published: August 2018
View article titled, Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes
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Includes: Supplementary data
Journal Articles

Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition

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Tushar K. Talukdar, Sumeng Liu, Zhejun Zhang, Frank Harwath, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051504 (2018)
https://doi.org/10.1116/1.5040855
Published: July 2018
View article titled, Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition
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Journal Articles

Area selective CVD of metallic films from molybdenum, iron, and ruthenium carbonyl precursors: Use of ammonia to inhibit nucleation on oxide surfaces

Editor’s PickFree
Elham Mohimi, Zhejun V. Zhang, Sumeng Liu, Justin L. Mallek, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041507 (2018)
https://doi.org/10.1116/1.5023236
Published: July 2018
View article titled, Area selective CVD of metallic films from molybdenum, iron, and ruthenium carbonyl precursors: Use of ammonia to inhibit nucleation on oxide surfaces
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Includes: Supplementary data
Journal Articles

Chemical vapor deposition of MnxNy films from bis(2,2,6,6-tetramethylpiperidido)manganese(II) and ammonia

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Elham Mohimi, Brian B. Trinh, Shaista Babar, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 060603 (2016)
https://doi.org/10.1116/1.4964839
Published: October 2016
View article titled, Chemical vapor deposition of MnxNy films from bis(2,2,6,6-tetramethylpiperidido)manganese(II) and ammonia
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Journal Articles

Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth

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Pengyi Zhang, Elham Mohimi, Tushar K. Talukdar, John R. Abelson, Gregory S. Girolami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051518 (2016)
https://doi.org/10.1116/1.4961942
Published: September 2016
View article titled, Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth
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Journal Articles

Iron–cobalt alloy thin films with high saturation magnetizations grown by conformal metalorganic CVD

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Pengyi Zhang, Shaista Babar, John R. Abelson, Sarbeswar Sahoo, Meng Zhu, Michael Kautzky, Luke M. Davis, Gregory S. Girolami
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061521 (2015)
https://doi.org/10.1116/1.4935449
Published: November 2015
View article titled, Iron–cobalt alloy thin films with high saturation magnetizations grown by conformal metalorganic CVD
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Includes: Supplementary data
Journal Articles

The energy landscape of glassy dynamics on the amorphous hafnium diboride surface

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Duc Nguyen, Justin Mallek, Andrew N. Cloud, John R. Abelson, Gregory S. Girolami, Joseph Lyding, Martin Gruebele
Journal: The Journal of Chemical Physics
J. Chem. Phys. 141, 204501 (2014)
https://doi.org/10.1063/1.4901132
Published: November 2014
View article titled, The energy landscape of glassy dynamics on the amorphous hafnium diboride surface
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Includes: Supplementary data