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J. L. Shohet
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Journal Articles

Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

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M. R. Baklanov, V. Jousseaume, T. V. Rakhimova, D. V. Lopaev, Yu. A. Mankelevich, V. V. Afanas'ev, J. L. Shohet, S. W. King, E. T. Ryan
Journal: Applied Physics Reviews
Appl. Phys. Rev. 6, 011301 (2019)
https://doi.org/10.1063/1.5054304
Published: February 2019
View article titled, Impact of VUV photons on SiO<sub>2</sub> and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models
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Journal Articles

Measurement of the vacuum-ultraviolet absorption spectrum of low-k dielectrics using X-ray reflectivity

F. A. Choudhury, H. M. Nguyen, S. W. King, C. H. Lee, Y. H. Lin, H. S. Fung, C. C. Chen, W. Li, D. Benjamin, J. M. Blatz, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 112, 082902 (2018)
https://doi.org/10.1063/1.5025180
Published: February 2018
View article titled, Measurement of the vacuum-ultraviolet absorption spectrum of low-k dielectrics using X-ray reflectivity
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Journal Articles

Transmission of oxygen radicals through free-standing single-layer and multilayer silicon-nitride and silicon-dioxide films

F. A. Choudhury, H. M. Nguyen, G. Sabat, B. B. Minkoff, Y. Nishi, M. R. Sussman, J. L. Shohet
Journal: Journal of Applied Physics
J. Appl. Phys. 122, 084101 (2017)
https://doi.org/10.1063/1.5000135
Published: August 2017
View article titled, Transmission of oxygen radicals through free-standing single-layer and multilayer silicon-nitride and silicon-dioxide films
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Journal Articles

The effect of vacuum ultraviolet irradiation on the time-dependent dielectric breakdown of organosilicate dielectrics

D. Pei, P. Xue, W. Li, X. Guo, Y. H. Lin, H. S. Fung, C. C. Chen, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 109, 122905 (2016)
https://doi.org/10.1063/1.4962949
Published: September 2016
View article titled, The effect of vacuum ultraviolet irradiation on the time-dependent dielectric breakdown of organosilicate dielectrics
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Journal Articles

Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

F. A. Choudhury, H. M. Nguyen, M. R. Baklanov, J. F. de Marneffe, W. Li, D. Pei, D. I. Benjamin, H. Zheng, S. W. King, Y.-H. Lin, H.-S. Fung, C.-C. Chen, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 109, 122902 (2016)
https://doi.org/10.1063/1.4962899
Published: September 2016
View article titled, Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation
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Journal Articles

Effects of ultraviolet (UV) irradiation in air and under vacuum on low-k dielectrics

F. A. Choudhury, E. T. Ryan, H. M. Nguyen, Y. Nishi, J. L. Shohet
Journal: AIP Advances
AIP Advances 6, 075012 (2016)
https://doi.org/10.1063/1.4959277
Published: July 2016
View article titled, Effects of ultraviolet (UV) irradiation in air and under vacuum on low-k dielectrics
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Journal Articles

Nonthermal combined ultraviolet and vacuum-ultraviolet curing process for organosilicate dielectrics

H. Zheng, X. Guo, D. Pei, W. Li, J. Blatz, K. Hsu, D. Benjamin, Y.-H. Lin, H.-S. Fung, C.-C. Chen, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 108, 242906 (2016)
https://doi.org/10.1063/1.4954176
Published: June 2016
View article titled, Nonthermal combined ultraviolet and vacuum-ultraviolet curing process for organosilicate dielectrics
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Journal Articles

Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films

W. Li, D. Pei, X. Guo, M. K. Cheng, S. Lee, Q. Lin, S. W. King, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 108, 202901 (2016)
https://doi.org/10.1063/1.4950717
Published: May 2016
View article titled, Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films
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Journal Articles

Measurements of Schottky barrier at the low-k SiOC:H/Cu interface using vacuum ultraviolet photoemission spectroscopy

X. Guo, D. Pei, H. Zheng, S. W. King, Y.-H. Lin, H.-S. Fung, C.-C. Chen, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 107, 232905 (2015)
https://doi.org/10.1063/1.4937582
Published: December 2015
View article titled, Measurements of Schottky barrier at the low-k SiOC:H/Cu interface using vacuum ultraviolet photoemission spectroscopy
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Journal Articles

Publisher's Note: “Defect-induced bandgap narrowing in low-k dielectrics” [Appl. Phys. Lett. 107 , 082903 (2015)]

X. Guo, H. Zheng, S. W. King, V. V. Afanas'ev, M. R. Baklanov, J.-F. de Marneffe, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 107, 139903 (2015)
https://doi.org/10.1063/1.4931961
Published: September 2015
View article titled, Publisher's Note: “Defect-induced bandgap narrowing in low-k dielectrics” [Appl. Phys. Lett. 107 , 082903 (2015)]
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Journal Articles

Defect-induced bandgap narrowing in low-k dielectrics

X. Guo, H. Zheng, S. W. King, V. V. Afanas'ev, M. R. Baklanov, J.-F. de Marneffe, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 107, 082903 (2015)
https://doi.org/10.1063/1.4929702
Published: August 2015
View article titled, Defect-induced bandgap narrowing in low-k dielectrics
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Journal Articles

Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics

H. Zheng, X. Guo, D. Pei, E. T. Ryan, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 106, 192905 (2015)
https://doi.org/10.1063/1.4921271
Published: May 2015
View article titled, Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics
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Journal Articles

Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress

X. Guo, S. W. King, H. Zheng, P. Xue, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 106, 012904 (2015)
https://doi.org/10.1063/1.4905462
Published: January 2015
View article titled, Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress
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Journal Articles

Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics

H. Zheng, E. T. Ryan, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 105, 202902 (2014)
https://doi.org/10.1063/1.4901742
Published: November 2014
View article titled, Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics
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Journal Articles

Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass

X. Guo, J. E. Jakes, S. Banna, Y. Nishi, J. L. Shohet
Journal: Journal of Applied Physics
J. Appl. Phys. 116, 044103 (2014)
https://doi.org/10.1063/1.4891501
Published: July 2014
View article titled, Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass
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Journal Articles

Measurement of bandgap energies in low-k organosilicates

M. T. Nichols, W. Li, D. Pei, G. A. Antonelli, Q. Lin, S. Banna, Y. Nishi, J. L. Shohet
Journal: Journal of Applied Physics
J. Appl. Phys. 115, 094105 (2014)
https://doi.org/10.1063/1.4867644
Published: March 2014
View article titled, Measurement of bandgap energies in low-k organosilicates
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Journal Articles

Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation

H. Zheng, S. W. King, V. Ryan, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 104, 062904 (2014)
https://doi.org/10.1063/1.4865407
Published: February 2014
View article titled, Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation
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Journal Articles

Effects of neutron irradiation of ultra-thin HfO2 films

K.-W. Hsu, H. Ren, R. J. Agasie, S. Bian, Y. Nishi, J. L. Shohet
Journal: Applied Physics Letters
Appl. Phys. Lett. 104, 032910 (2014)
https://doi.org/10.1063/1.4863222
Published: January 2014
View article titled, Effects of neutron irradiation of ultra-thin HfO<sub>2</sub> films
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Journal Articles

The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials

M. T. Nichols, K. Mavrakakis, Q. Lin, J. L. Shohet
Journal: Journal of Applied Physics
J. Appl. Phys. 114, 104107 (2013)
https://doi.org/10.1063/1.4821065
Published: September 2013
View article titled, The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials
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Journal Articles

The effect of water uptake on the mechanical properties of low-k organosilicate glass

X. Guo, J. E. Jakes, M. T. Nichols, S. Banna, Y. Nishi, J. L. Shohet
Journal: Journal of Applied Physics
J. Appl. Phys. 114, 084103 (2013)
https://doi.org/10.1063/1.4817917
Published: August 2013
View article titled, The effect of water uptake on the mechanical properties of low-k organosilicate glass
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