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1-20 of 295
J. E. Greene
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Journal Articles
J. Vac. Sci. Technol. A 41, 063406 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 38, 051601 (2020)
Published: August 2020
Journal Articles
Zhengtao Wu, Olof Tengstrand, Babak Bakhit, Jun Lu, J. E. Greene, Lars Hultman, Ivan Petrov, Grzegorz Greczynski
J. Vac. Sci. Technol. A 38, 023006 (2020)
Published: January 2020
Journal Articles
Daniel Edström, Davide G. Sangiovanni, Ludvig Landälv, Per Eklund, J. E. Greene, Ivan Petrov, Lars Hultman, Valeriu Chirita
J. Vac. Sci. Technol. A 37, 061508 (2019)
Published: October 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 060801 (2019)
Published: October 2019
Journal Articles
Babak Bakhit, David L. J. Engberg, Jun Lu, Johanna Rosen, Hans Högberg, Lars Hultman, Ivan Petrov, J. E. Greene, Grzegorz Greczynski
J. Vac. Sci. Technol. A 37, 031506 (2019)
Published: April 2019
Journal Articles
J. Vac. Sci. Technol. A 36, 051512 (2018)
Published: August 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 030604 (2018)
Published: April 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 020602 (2018)
Published: January 2018
Journal Articles
Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
J. Vac. Sci. Technol. A 35, 05C204 (2017)
Published: September 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 060601 (2017)
Published: July 2017
Journal Articles
Ivan Petrov, Allen Hall, Antonio B. Mei, Nils Nedfors, Igor Zhirkov, Johanna Rosen, Amber Reed, Brandon Howe, Grzegorz Greczynski, Jens Birch, Lars Hultman, J. E. Greene
J. Vac. Sci. Technol. A 35, 050601 (2017)
Published: April 2017
Journal Articles
H. Fager, O. Tengstrand, J. Lu, S. Bolz, B. Mesic, W. Kölker, Ch. Schiffers, O. Lemmer, J. E. Greene, L. Hultman, I. Petrov, G. Greczynski
Journal:
Journal of Applied Physics
J. Appl. Phys. 121, 171902 (2017)
Published: March 2017
Journal Articles
Journal Articles
Journal Articles
J. Vac. Sci. Technol. A 34, 041509 (2016)
Published: June 2016
Journal Articles
Hanna Fager, Brandon M. Howe, Grzegorz Greczynski, Jens Jensen, A. B. Mei, Jun Lu, Lars Hultman, J. E. Greene, Ivan Petrov
J. Vac. Sci. Technol. A 33, 05E103 (2015)
Published: May 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 05E101 (2015)
Published: March 2015
Journal Articles
Journal Articles
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