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Journal Articles

A high precision 25-actuator optical surface bender for ultra-high resolution soft x-ray spectroscopies

Kai-Yang Kao, Chih-Yu Hua, Hok-Sum Fung, Shang-Wei Lin, Hsuan-Yao Chao, Shang-Ching Yeh, Shih-Chun Chung, Di-Jing Huang, Chien-Te Chen
Journal: AIP Conference Proceedings
AIP Conf. Proc. 2054, 060005 (2019)
https://doi.org/10.1063/1.5084636
Published: January 2019
View article titled, A high precision 25-actuator optical surface bender for ultra-high resolution soft x-ray spectroscopies
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