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Helena Ronkainen
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Journal Articles

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Perttu Sippola, Alexander Pyymaki Perros, Oili M. E. Ylivaara, Helena Ronkainen, Jaakko Julin, Xuwen Liu, Timo Sajavaara, Jarkko Etula, Harri Lipsanen, Riikka L. Puurunen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051508 (2018)
https://doi.org/10.1116/1.5038856
Published: July 2018
View article titled, Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
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Includes: Supplementary data
Journal Articles

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Lauri Kilpi, Oili M. E. Ylivaara, Antti Vaajoki, Xuwen Liu, Ville Rontu, Sakari Sintonen, Eero Haimi, Jari Malm, Markus Bosund, Marko Tuominen, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Riikka L. Puurunen, Helena Ronkainen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A122 (2018)
https://doi.org/10.1116/1.5003729
Published: December 2017
View article titled, Tribological properties of thin films made by atomic layer deposition sliding against silicon
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Journal Articles

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Oili M. E. Ylivaara, Lauri Kilpi, Xuwen Liu, Sakari Sintonen, Saima Ali, Mikko Laitinen, Jaakko Julin, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Helena Ronkainen, Riikka L. Puurunen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 01B105 (2017)
https://doi.org/10.1116/1.4966198
Published: November 2016
View article titled, Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
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Journal Articles

Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon

Lauri Kilpi, Oili M. E. Ylivaara, Antti Vaajoki, Jari Malm, Sakari Sintonen, Marko Tuominen, Riikka L. Puurunen, Helena Ronkainen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A124 (2016)
https://doi.org/10.1116/1.4935959
Published: November 2015
View article titled, Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
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Journal Articles

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova, Jussi Lyytinen, Kestutis Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031102 (2013)
https://doi.org/10.1116/1.4801921
Published: April 2013
View article titled, Characterization of thin film adhesion by MEMS shaft-loading blister testing
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