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Journal Articles

Enhanced Cherenkov phase matching terahertz wave generation via a magnesium oxide doped lithium niobate ridged waveguide crystal

K. Takeya, T. Minami, H. Okano, S. R. Tripathi, K. Kawase
Journal: APL Photonics
APL Photonics 2, 016102 (2017)
https://doi.org/10.1063/1.4968043
Published: November 2016
View article titled, Enhanced Cherenkov phase matching terahertz wave generation via a magnesium oxide doped lithium niobate ridged waveguide crystal
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Journal Articles

Enhanced generation of fast protons from a polymer-coated metal foil by a femtosecond intense laser field

Hiroaki Kishimura, Hiroto Morishita, Yasuhisa H. Okano, Yasuaki Okano, Yoichiro Hironaka, Ken-ichi Kondo, Kazutaka G. Nakamura, Yuji Oishi, Koshichi Nemoto
Journal: Applied Physics Letters
Appl. Phys. Lett. 85, 2736–2738 (2004)
https://doi.org/10.1063/1.1803915
Published: October 2004
View article titled, Enhanced generation of fast protons from a polymer-coated metal foil by a femtosecond intense laser field
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Journal Articles

Beam induced deposition of an ultraviolet transparent silicon oxide film by focused gallium ion beam

M. Ogasawara, M. Kariya, H. Nakamura, H. Komano, S. Inoue, K. Sugihara, N. Hayasaka, K. Horioka, T. Takigawa, H. Okano, I. Mori, Y. Yamazaki, M. Miyoshi, T. Watanabe, K. Okumura
Journal: Applied Physics Letters
Appl. Phys. Lett. 68, 732–734 (1996)
https://doi.org/10.1063/1.116724
Published: February 1996
View article titled, Beam induced deposition of an ultraviolet transparent silicon oxide film by focused gallium ion beam
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Journal Articles

Enhancement of hydrogen pumping by injecting fluorine into the exhaust system of turbomolecular pumps

N. Ogure, A. Shibata, K. Ono, N. Hayasaka, H. Okano, K. Okumura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 524–530 (1995)
https://doi.org/10.1116/1.579778
Published: May 1995
View article titled, Enhancement of hydrogen pumping by injecting fluorine into the exhaust system of turbomolecular pumps
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Journal Articles

Damage‐free selective etching of Si native oxides using NH3/NF3 and SF6/H2O down‐flow etching

H. Nishino, N. Hayasaka, H. Okano
Journal: Journal of Applied Physics
J. Appl. Phys. 74, 1345–1348 (1993)
https://doi.org/10.1063/1.354890
Published: July 1993
View article titled, Damage‐free selective etching of Si native oxides using NH<sub>3</sub>/NF<sub>3</sub> and SF<sub>6</sub>/H<sub>2</sub>O down‐flow etching
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Journal Articles

Smoothing of the Si surface using CF4/O2 down‐flow etching

H. Nishino, N. Hayasaka, K. Horioka, J. Shiozawa, S. Nadahara, N. Shooda, Y. Akama, A. Sakai, H. Okano
Journal: Journal of Applied Physics
J. Appl. Phys. 74, 1349–1353 (1993)
https://doi.org/10.1063/1.354891
Published: July 1993
View article titled, Smoothing of the Si surface using CF<sub>4</sub>/O<sub>2</sub> down‐flow etching
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Journal Articles

Synchrotron radiation‐excited etching of SiO2 with SF6 at 143 and 251 Å using undulator radiation

K. Shobatake, H. Ohashi, K. Fukui, A. Hiraya, N. Hayasaka, H. Okano, A. Yoshida, H. Kume
Journal: Applied Physics Letters
Appl. Phys. Lett. 56, 2189–2191 (1990)
https://doi.org/10.1063/1.103241
Published: May 1990
View article titled, Synchrotron radiation‐excited etching of SiO<sub>2</sub> with SF<sub>6</sub> at 143 and 251 Å using undulator radiation
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Journal Articles

Contrast enhancement pattern transfer etching of phosphorus‐doped polycrystalline silicon

N. Hayasaka, H. Nakahara, H. Okano, Y. Horiike
Journal: Applied Physics Letters
Appl. Phys. Lett. 51, 1328–1330 (1987)
https://doi.org/10.1063/1.98668
Published: October 1987
View article titled, Contrast enhancement pattern transfer etching of phosphorus‐doped polycrystalline silicon
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Journal Articles

Fast wave current drive experiment on JFT‐2M

Y. Uesugi, T. Yamamoto, K. Hoshino, H. Ohtsuka, H. Kawashima, M. Hasegawa, S. Kasai, T. Kawakami, T. Matoba, T. Matsuda, H. Matsumoto, M. Miura, M. Mori, K. Odajima, H. Ogawa, T. Ogawa, S. Sengoku, T. Shoji, N. Suzuki, T. Tamai, T. Yamauchi, K. Hasegawa, A. Honda, I. Ishibori, Y. Kashiwa, M. Kazawa, K. Kikuchi, Y. Matsuzaki, K. Ohuchi, H. Okano, E. Sato, T. Shibata, T. Shibuya, T. Shiina, T. Tani, K. Yokoyama
Journal: AIP Conference Proceedings
AIP Conf. Proc. 159, 179–182 (1987)
https://doi.org/10.1063/1.36670
Published: September 1987
View article titled, Fast wave current drive experiment on JFT‐2M
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Journal Articles

Photo‐assisted anisotropic etching of phosphorus‐doped polycrystalline silicon employing reactive species generated by a microwave discharge

N. Hayasaka, H. Okano, M. Sekine, Y. Horiike
Journal: Applied Physics Letters
Appl. Phys. Lett. 48, 1165–1166 (1986)
https://doi.org/10.1063/1.96458
Published: April 1986
View article titled, Photo‐assisted anisotropic etching of phosphorus‐doped polycrystalline silicon employing reactive species generated by a microwave discharge
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Journal Articles

Electrohydrodynamic ion source with a reservoir and an emitter tip heated by electron bombardment

T. Noda, T. Okutani, K. Yagi, H. Tamura, H. Okano, H. Watanabe
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 53, 1482–1483 (1982)
https://doi.org/10.1063/1.1137164
Published: September 1982
View article titled, Electrohydrodynamic ion source with a reservoir and an emitter tip heated by electron bombardment
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Journal Articles

Field‐emission and field‐ion microscopy of lanthanum hexaboride

M. Futamoto, S. Hosoki, H. Okano, U. Kawabe
Journal: Journal of Applied Physics
J. Appl. Phys. 48, 3541–3546 (1977)
https://doi.org/10.1063/1.324151
Published: August 1977
View article titled, Field‐emission and field‐ion microscopy of lanthanum hexaboride
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