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1-2 of 2
F. Scott Johnson
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Journal Articles
pn -junction delineation in Si devices using scanning capacitance spectroscopy
Available to PurchaseHal Edwards, Vladimir A. Ukraintsev, Richard San Martin, F. Scott Johnson, Philip Menz, Shawn Walsh, Stan Ashburn, K. Scott Wills, Ken Harvey, Mi-Chang Chang
Journal:
Journal of Applied Physics
J. Appl. Phys. 87, 1485–1495 (2000)
Published: February 2000
Journal Articles