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Journal Articles

Numerical ellipsometry: AI for real-time, in situ process control for absorbing films growing on unknown transparent substrates

Editor’s Pick
F. K. Urban, III, D. Barton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053405 (2024)
https://doi.org/10.1116/6.0003817
Published: August 2024
View article titled, Numerical ellipsometry: AI for real-time, <em>in situ</em> process control for absorbing films growing on unknown transparent substrates
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Journal Articles

Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon

Featured
F. K. Urban, D. Barton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043401 (2024)
https://doi.org/10.1116/6.0003548
Published: May 2024
View article titled, Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon
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Journal Articles

Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control

Featured
F. K. Urban, III, D. Barton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023404 (2024)
https://doi.org/10.1116/6.0003196
Published: January 2024
View article titled, Numerical ellipsometry: Artificial intelligence for real-time, <em>in situ</em> absorbing film process control
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Journal Articles

Numerical ellipsometry: A method for selecting a single β-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor

F. K. Urban, III, D. Barton, M. Schubert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013402 (2023)
https://doi.org/10.1116/6.0002235
Published: December 2022
View article titled, Numerical ellipsometry: A method for selecting a single β-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor
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Journal Articles

Numerical ellipsometry: n-k plane analysis of transparent conducting films

D. Barton, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 041508 (2011)
https://doi.org/10.1116/1.3589803
Published: June 2011
View article titled, Numerical ellipsometry: <em>n-k</em> plane analysis of transparent conducting films
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Journal Articles

Numerical ellipsometry: Analysis of thin metal layers using n - k - d twisted curve methods with multiple incidence angles

F. K. Urban, III, D. Barton, T. Tiwald
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 947–952 (2010)
https://doi.org/10.1116/1.3439679
Published: June 2010
View article titled, Numerical ellipsometry: Analysis of thin metal layers using n - k - d twisted curve methods with multiple incidence angles
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Journal Articles

Nanoparticle beam formation and investigation of gold nanostructured films

A. Khabari, F. K. Urban, III, P. Griffiths, I. Petrov, Y.-W. Kim, C. Bungay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 21, 2313–2318 (2003)
https://doi.org/10.1116/1.1615985
Published: November 2003
View article titled, Nanoparticle beam formation and investigation of gold nanostructured films
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Journal Articles

Nanophase films deposited from a high-rate, nanoparticle beam

F. K. Urban, III, A. Hosseini-Tehrani, P. Griffiths, A. Khabari, Y.-W. Kim, I. Petrov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 20, 995–999 (2002)
https://doi.org/10.1116/1.1481749
Published: June 2002
View article titled, Nanophase films deposited from a high-rate, nanoparticle beam
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Journal Articles

Nanophase copper thin films deposited from a beam source

F. K. Urban, III, A. Khabari, A. Hosseini-Tehrani, P. Griffiths, G. Fernandez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 2374–2377 (1999)
https://doi.org/10.1116/1.581915
Published: July 1999
View article titled, Nanophase copper thin films deposited from a beam source
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Journal Articles

Modeling of large cluster synthesis

A. Hosseini-Tehrani, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 2364–2367 (1999)
https://doi.org/10.1116/1.581774
Published: July 1999
View article titled, Modeling of large cluster synthesis
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Journal Articles

Deconvolution of tip affected atomic force microscope images and comparison to Rutherford backscattering spectrometry

M. F. Tabet, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 800–804 (1997)
https://doi.org/10.1116/1.589412
Published: July 1997
View article titled, Deconvolution of tip affected atomic force microscope images and comparison to Rutherford backscattering spectrometry
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Journal Articles

Determining the optical properties of a mixed-metal oxide film, Co 3−x−y Cr x Fe y O 4 , with spectroscopic ellipsometry and atomic force microscopy

P. Ruzakowski Athey, M. F. Tabet, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 998–1006 (1997)
https://doi.org/10.1116/1.580794
Published: May 1997
View article titled, Determining the optical properties of a mixed-metal oxide film, Co 3−x−y Cr x Fe y O 4 , with spectroscopic ellipsometry and atomic force microscopy
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Journal Articles

Use of multiple analytical techniques to confirm improved optical modeling of SnO2:F films by atomic force microscopy and spectroscopic ellipsometry

P. Ruzakowski Athey, F. K. Urban, III, P. H. Holloway
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 14, 3436–3444 (1996)
https://doi.org/10.1116/1.588776
Published: November 1996
View article titled, Use of multiple analytical techniques to confirm improved optical modeling of SnO<sub>2</sub>:F films by atomic force microscopy and spectroscopic ellipsometry
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Journal Articles

Analysis of surface void fraction using atomic force microscopy

C. S. Lindquist, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1957–1962 (1996)
https://doi.org/10.1116/1.580367
Published: May 1996
View article titled, Analysis of surface void fraction using atomic force microscopy
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Journal Articles

Optical properties of cobalt oxide films deposited by spray pyrolysis

P. Ruzakowski Athey, F. K. Urban, III, M. F. Tabet, W. A. McGahan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 685–692 (1996)
https://doi.org/10.1116/1.580372
Published: May 1996
View article titled, Optical properties of cobalt oxide films deposited by spray pyrolysis
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Journal Articles

Numerical ellipsometry: Real‐time solutions using mapping onto the complex index plane

D. Barton, J. C. Comfort, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 786–790 (1996)
https://doi.org/10.1116/1.580390
Published: May 1996
View article titled, Numerical ellipsometry: Real‐time solutions using mapping onto the complex index plane
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Journal Articles

Development of artificial neural networks for in situ ellipsometry of films growing on unknown substrates

F. K. Urban, III, M. F. Tabet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 1952–1956 (1994)
https://doi.org/10.1116/1.578988
Published: July 1994
View article titled, Development of artificial neural networks for <em>in</em> <em>situ</em> ellipsometry of films growing on unknown substrates
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Journal Articles

Virtual interface method for in situ ellipsometry of films grown on unknown substrates

F. K. Urban, III, M. F. Tabet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 11, 976–980 (1993)
https://doi.org/10.1116/1.578578
Published: July 1993
View article titled, Virtual interface method for <em>in</em> <em>situ</em> ellipsometry of films grown on unknown substrates
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